Vacuum coating apparatus
阅读：546发布：2023-02-04
专利汇可以提供Vacuum coating apparatus专利检索，专利查询，专利分析的服务。并且Vacuum coating apparatus having isolatable coating and vacuum chambers whose volumes are correlated to each other to minimize contamination and pump-down time, with the coating chamber having a closure means mounting a substrate holder for positioning substrates in an evaporant stream from a vapor source contained in the vacuum chamber.，下面是Vacuum coating apparatus专利的具体信息内容。
1. A vacuum coating apparatus comprising: A. an evaporation chamber; B. a coating chamber in communication with said evaporation chamber; C. gate means reciprocally movable between an open and closed position intermediate said coating and evaporation chambers for selectively isolating each from the other; D. a vapor source means in said evaporation chamber for generating an evaporant stream of coating material into said coating chamber; E. a port in a wall of said coating chamber for access thereto and wherein the ratio of the area of said port to the volume of said coating chamber is in the range from about 1:20 to about 1:30; F. door means pivotally mounted on said wall for movement into open and closed positions relative to said port with said closed position securing said door means in sealing relation with said coating chamber; G. substrate holder means mounted on an inner surface of said door means for supporting substrates in a coating position within said evaporant stream in said coating chamber; H. means for rotating said substrates on said holder means; I. means for maintaining said evaporation chamber under a continuous vacuum; J. a second vacuum means for roughing a vacuum in said coating chamber when isolated from said evaporation chamber by said gate means; K. means for isolating said second vacuum means from said coating chamber when said gate means is to be moved to the open position; L. gas means for controllably introducing an inert gas flow in said coating chamber when isolated from said evaporation chamber, when said gate means is in the closed position, to minimize ingress of ambients into said coating chamber when said door means is in the open position; and M. valve means for shutting off the flow of said inert gas to said coating chamber; wherein the ratio of the volumes of said evaporation chamber to said coating chamber is in the range from about 10:1 to about 30:1.
2. A vacuum coating apparatus comprising: A. an evaporation chamber; B. a coating chamber in communciation with said evaporation chamber; C. gate means reciprocally movable between an open and closed position intermediate said coating and evaporation chambers for selectively isolating each from the other; D. a vapor source means in said evaporation chamber for generating an evaporant stream of coating material into said coating chamber; E. a port in a wall of said coating chamber for access thereto and wherein the ratio of the area of said port to the volume of said coating chamber is in the range from about 1:20 to about 1:30; F. door means pivotally mounted on said wall for movement into open and closed positions relative to said port with said closed position securing said door means in sealing relation with said coating chamber; G. substrate holder means mounted on an inner surface of said door means for supporting substrates in a coating position within said evaporant stream in said coating chamber; H. means for rotating said substrates on said holder means; I. means for maintaining said evaporation chamber under a continuous vacuum; wherein said holder means supports said substrates within and at an angle to said evaporant stream; J. a second vacuum means for roughing a vacuum in said coating chamber when isolated from said evaporation chamber by said gate means; K. means for isolating said second vacuum meaNs from said coating chamber when said gate means is to be moved to the open position; L. gas means for controllably introducing an inert gas flow in said coating chamber when isolated from said evaporation chamber, when said gate means is in the closed position, to minimize ingress of ambients into said coating chamber when said door means is in the open position; and M. valve means for shutting off the flow of said inert gas to said coating chamber; wherein the ratio of the volumes of said evaporation chamber to said coating chamber is in the range from about 10:1 to about 30:1.
3. A vacuum coating apparatus comprising: A. an evaporation chamber; B. a coating chamber in communication with said evaporation chamber; C. gate means reciprocally movable between an open and closed position intermediate said coating and evaporation chambers for selectively isolating each from the other; D. a vapor source means in said evaporation chamber for generating an evaporant stream of coating material into said coating chamber; E. a port in a wall of said coating chamber for access thereto and wherein the ratio of the area of said port to the volume of said coating chamber is in the range from about 1:20 to about 1:30; F. door means pivotally mounted on said wall for movement into open and closed positions relative to said port with said closed position securing said door means in sealing relation with said coating chamber; G. substrate holder means mounted on an inner surface of said door means for supporting substrates in a coating position within said evaporant stream in said coating chamber; H. means for rotating said substrates on said holder means; I. means for maintaining said evaporation chamber under a continuous vacuum; wherein said holder means supports said substrates within and at an angle to said evaporant stream; wherein said holder means supports said substrates within and at an angle to said evaporant stream; J. heater means in said coating chamber within said evaporant stream for heating said subtrates to deposition means; K. an evaporant shield for said heater means in said coating chamber; L. a second vacuum means for roughing a vacuum in said coating chamber when isolated from said vacuum chamber by said gate means; M. means for isolating said second vacuum means from said coating chamber when said gate means is to be moved to the open position; N. gas means for controllably introducing an inert gas flow in said coating chamber when isolated from said evaporation chamber, when said gate means is in the closed position, to minimize ingress of ambients into said coating chamber when said door means is in the open position; and O. valve means for shutting off the flow of said inert gas to said coating chamber; wherein the ratio of the volumes of said evaporation chamber to said coating chamber is in the range from about 10:1 to about 30:1.
4. A vacuum coating apparatus comprising: A. an evaporation chamber; B. a coating chamber in communication with said evaporation chamber; C. gate means reciprocally movable between an open and closed position intermediate said coating and evaporation chambers for selectively isolating each from the other; D. a vapor source means in said evaporation chamber for generating an evaporant stream of coating material into said coating chamber; E. a port in a wall of said coating chamber for access thereto and wherein the ratio of the area of said port to the volume of said coating chamber is in the range from about 1:20 to about 1:30; F. door means pivotally mounted on said wall for movement into open and closed positions relative to said port with said closed position securing said door means in sealing relation with said coating chamber; G. substrate holder means mounted on an inner surface of said door means for sUpporting substrates in a coating position within said evaporant stream in said coating chamber; H. means for rotating said substrates on said holder means; I. mans for maintaining said evaporation chamber under a continuous vacuum; J. a valve means in said evaporation chamber reciprocally movable between an open and closed position relative to the first said vacuum means for selectively placing said evaporation chamber and the first said vacuum means in communicating and isolating relationship with each other; K. a second vacuum means for roughing a vacuum in said coating chamber when isolated from said evaporation chamber by said gate means; L. means for isolating said second vacuum means from sad coating chamber when said gate means is to be moved to the open position; M. gas means for controllably introducing an inert gas flow in said coating chamber when isolated from said evaporation chamber, when said gate means is in the closed position, to minimize ingress of ambients into said coating chamber when said door means is in the open position; and N. valve means for shutting off the flow of said inert gas to said coating chamber; wherein the ratio of the volumes of said evaporation chamber to said coating chamber is in the range from about 10:1 to about 30:1.
5. A vacuum coating apparatus comprising: A. an evaporation chamber; B. a coating chamber in communication with said evaporation chamber; C. gate means reciprocally movable between an open and closed position intermediate said coating and evaporation chambers for selectively isolating each from the other; D. a vapor source means in said evaporation chamber for generating and evaporant stream of coating material into said coating chamber: E. a port in a wall of said coating chamber for access thereto and wherein the ratio of the area of said port to the volume of said coating chamber is in the range from about 1:20 to about 1:30; F. door means pivotally mounted on said wall for movement into open and closed positions relative to said port with said closed position securing said door means in sealing relation with said coating chamber; G. substrate holder means mounted on an inner surface of said door means for supporting substrates in a coating position within said evaporant stream in said coating chamber; H. means for rotating said substrates on said holder means; I. means for maintaining said evaporation chamber under a continuous vacuum; wherein said holder means supports said substrates within and at an angle to said evaporant stream; J. a valve means in said evaporation chamber reciprocally movable between an open and closed position relative to the first said vacuum means for selectively placing said evaporator section and the first said vacuum means in communicating and isolating relationship with each other; K. a second vacuum means for roughing a vacuum in said coating chamber when isolated from said evaporation chamber by said gate means; L. means for isolating said second vacuum means from said coating chamber when said gate means is to be moved to the open position; M. gas means for controllably introducing an inert gas flow in said coating chamber when isolated from said evaporation chamber, when said gate means is in the closed position, to minimize ingress of ambients into said coating chamber when said door means is in the open position; and N. valve means for shutting off the flow of said inert gas to said coating chamber; wherein the ratio of the volumes of said evaporation chamber to said coating chamber is in the range from about 10:1 to about 30:1.
6. A vacuum coating apparatus comprising: A an evaporation chamber; B. a coating chamber in communication with said evaporation chamber; C. gate means reciprocally movable between an open and closed position intermediate said coating and evaPoration chambers for selectively isolating each from the other; D. a vapor source means in said evaporation chamber for generating an evaporant stream of coating material into said coating chamber; E. a port in a wall of said coating chamber for access thereto and wherein the ratio of the area of said port to the volume of said coating chamber is in the range from about 1:20 to about 1:30; F. door means pivotally mounted on said wall for movement into open and closed positions relative to said port with said closed position securing said door means in sealing relation with said coating chamber; G. substrate holder means mounted on an inner surface of said door means for supporting substrates in a coating position within said evaporant stream in said coating chamber; H. means for rotating said substrates on said holder means; I. means for maintaining said evaporation chamber under a continuous vacuum; wherein said holder means supports said substrates within and at an angle to said evaporant stream; J. heater means in said coating chamber within said evaporant stream for heating said substrates to deposition means; K. an evaporant shield for said heater means in said coating chamber; L. a valve means in said vacuum chamber reciprocally movable between an open and closed position between said evaporation chamber and the first said vacuum means for selectively isolating each from the other; M. a second vacuum means for roughing a vacuum in said coating chamber when isolated from said evaporation chamber by said gate means; N. means for isolating said second vacuum means from said coating chamber when said gate means is to be moved to the open position; O. gas means for controllably introducing an inert gas flow in said coating chamber when isolated from said evaporation chamber, when said gate means is in the closed position, to minimize ingress of ambients into said coating chamber when said door means is in the open position; and P. valve means for shutting off the flow of said inert gas to said coating chamber; wherein the ratio of the volumes of said evaporation chamber to said coating chamber is in the range from about 10:1 to about 30:
| 标题 | 发布/更新时间 | 阅读量 |
|---|---|---|
| 一种提高真空镀膜气氛均匀性的气路布置方法 | 2020-05-08 | 917 |
| 太阳能电池背电极和太阳能电池及其制备方法 | 2020-05-12 | 66 |
| 一种环保型太阳能光伏组件 | 2020-05-08 | 216 |
| 用于在轮毂表面镀铝铬合金的工艺 | 2020-05-11 | 581 |
| 一种3D曲面深槽面板的镀膜加工方法 | 2020-05-12 | 434 |
| 一种提高加热效率的真空热处理炉 | 2020-05-11 | 340 |
| 一种铝镀膜车灯 | 2020-05-12 | 529 |
| 一种密封胶条 | 2020-05-08 | 816 |
| 一种真空热处理炉炉门提升旋转启闭机构 | 2020-05-08 | 218 |
| 一种镀膜LED镀膜的灯罩反光板 | 2020-05-12 | 988 |
高效检索全球专利专利汇是专利免费检索,专利查询,专利分析-国家发明专利查询检索分析平台，是提供专利分析，专利查询，专利检索等数据服务功能的知识产权数据服务商。
我们的产品包含105个国家的1.26亿组数据，免费查、免费专利分析。
分析报告
专利汇分析报告产品可以对行业情报数据进行梳理分析，涉及维度包括行业专利基本状况分析、地域分析、技术分析、发明人分析、申请人分析、专利权人分析、失效分析、核心专利分析、法律分析、研发重点分析、企业专利处境分析、技术处境分析、专利寿命分析、企业定位分析、引证分析等超过60个分析角度，系统通过AI智能系统对图表进行解读，只需1分钟，一键生成行业专利分析报告。
真空镀膜热门专利
QQ群二维码
意见反馈
意见反馈