Coating of metal film
专利汇可以提供Coating of metal film专利检索，专利查询，专利分析的服务。并且PURPOSE: To improve bond strength of a metallic film extremely, by depositing a material of a metallic film on a base plate and by irradiating the film with high- energy particles simultaneously.
CONSTITUTION: An intermediate of polyimide is dropped on the main surface of the base plate 1, e.g., silicone wafer, and cured by polymerization to form the polyimide film 2. The film is then washed, and the base is set in a vacuum coater with the main surface put downwards and heated to 150°C by the plate heater 3. The aluminum ribbon 5 is evaporated from the deposition source 6 consisting of the conical basket 4 of tungsten and the aluminum ribbon 5 equipped 25cm below the base plate 1 to coat the polyimide film 2 with the aluminum film 12. 30 minutes after the application of electric current to the deposition source 6, electric voltage is applied to the source of electron rays 10 and the electron rays 13 is irradiated to the base plate 1 to strengthen the aluminum film 12.
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