Liquid phase epitaxial growing system
专利汇可以提供Liquid phase epitaxial growing system专利检索，专利查询，专利分析的服务。并且PURPOSE: To obtain a high quality epitaxial layer, by providing a slitlike openings not only at the bottom part of a semicylindrical melt holder but also on the side surface of the holder.
CONSTITUTION: A melt holder 14 has a bottom opening part 15 and in addition a sllitlike opening part 17 at the side surface between the bottom and a substrate 13. Ths substrate 13 and growing melt 16 are provided. The inside of a quartz tube 11 is evacuated. A supporting rod 18 is attached. The device is welded and sealed. When the device is heated with a core pipe, the melt flows out of the opening parts 15 and 17. Hg and the like having large specific gravities flow out of the bottom opening 15. Cd, Te and the like having small specific gravities in the melt flow out of the side opening part 17. When the device is rotated by 180 degrees in the direction B, the melt 16A, which includes a small amount of Hg, flows out of the side opening part 17. The melt having the uniform composition is attached on the surface of the substrate in the state that the constituent elements are not segregated due to the difference in specific gravities, and an epitaxial layer having the uniform composition is obtained. The unnecessary material on the surface of the melt is attached to the surface of the holder, and only the clean melt flows out. Thus a high quality crystal is obtained.
COPYRIGHT: (C)1988,JPO&Japio，下面是Liquid phase epitaxial growing system专利的具体信息内容。
| 标题 | 发布/更新时间 | 阅读量 |
|---|---|---|
| 包含单个晶格匹配的稀释氮化物结的薄膜柔性光电器件及制造方法 | 2020-05-08 | 957 |
| 台面式砷化镓掺硅阻挡杂质带太赫兹探测器及其制作方法 | 2020-05-12 | 705 |
| 微显示器件及其制备方法、显示面板 | 2020-05-14 | 713 |
| 一种用于液相外延设备的炉门装置 | 2020-05-12 | 492 |
| 法拉第转子，光隔离器和制造法拉第转子的方法 | 2020-05-11 | 816 |
| 半导体装置及其制造方法 | 2020-05-08 | 302 |
| 一种电催化产氧薄膜电极材料的制备方法及其制品和应用 | 2020-05-11 | 665 |
| 一种机械臂全自动浸泡式制备薄膜的装置 | 2020-05-08 | 692 |
| 基于异质结薄膜光源的光耦、其放大集成电路及制作方法 | 2020-05-11 | 32 |
| 一种机械臂全自动浸泡式制备薄膜的装置 | 2020-05-13 | 547 |
高效检索全球专利专利汇是专利免费检索,专利查询,专利分析-国家发明专利查询检索分析平台，是提供专利分析，专利查询，专利检索等数据服务功能的知识产权数据服务商。
我们的产品包含105个国家的1.26亿组数据，免费查、免费专利分析。
专利汇分析报告产品可以对行业情报数据进行梳理分析，涉及维度包括行业专利基本状况分析、地域分析、技术分析、发明人分析、申请人分析、专利权人分析、失效分析、核心专利分析、法律分析、研发重点分析、企业专利处境分析、技术处境分析、专利寿命分析、企业定位分析、引证分析等超过60个分析角度，系统通过AI智能系统对图表进行解读，只需1分钟，一键生成行业专利分析报告。
