Interatomic force microscope
专利汇可以提供Interatomic force microscope专利检索，专利查询，专利分析的服务。并且PURPOSE: To make it possible to align easily a thinly-narrowed light beam with the fore end of a cantilever and to improve the reliability and operability of an apparatus.
CONSTITUTION: An interatomic force microscope is equipped with a cantilever 11 the base end part of which is fixed to a fixed end 15 and to the fore end part of which a probe 12 is fitted, a three-dimensional actuator 21 which makes a sample 30 approach the probe 12 and moves the sample 30 three-dimensionally and a displacement detecting mechanism of an optical lever type wherein a spot beam is applied to the fore end part of the cantilever 11, by a laser light projector 13, a reflected light terefrom is detected by PSD 14 and a bend of the cantilever 11 is measured therefrom. The projector 13 is so provided as to be movable forward and backward in the direction of projection of light, while the cantilever 11 is so provided that it can be displaced in the horizontal direction to the surface of the sample 30, and a screen 40 is provided on the opposite side to the projector 13 in respect to the cantilever 11. A spot image of the light and a shadow of the fore end of the cantilever 11 are formed on this screen 40.
COPYRIGHT: (C)1992,JPO&Japio，下面是Interatomic force microscope专利的具体信息内容。
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