Superprecision surface working device
专利汇可以提供Superprecision surface working device专利检索，专利查询，专利分析的服务。并且PURPOSE: To perform superprecision surface working by controlling acceleration of ion particles based on a measured result of surface roughness of a workpiece in angstrom order.
CONSTITUTION: The surface roughness to be worked is measured by an interatomic power microscope 9 which is a measuring means capable of measuring the surface roughness of the workpiece 5 in angstrom order. Based on this measured result, the acceleration of ion outputted from an ion gun 14 is controlled and the ion articles are emitted toward a part to be measured of the workpiece 5. Consequently, when the part to be measured of the workpiece 5 is recessed, the ion particles are stuck thereto and when the part to be measured thereof is projecting, projecting part atoms are cut out by the impact force of the ion particles and the part to be measured can be made flat, hence the surface roughness to be worked can be made ultra-precision.
COPYRIGHT: (C)1992,JPO&Japio，下面是Superprecision surface working device专利的具体信息内容。
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