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Semiamorphous semiconductor

阅读:110发布:2021-02-16

专利汇可以提供Semiamorphous semiconductor专利检索,专利查询,专利分析的服务。并且PURPOSE: To increase the carrier diffusion length of semiamorphous semiconductor of direct transition type and enhance the photoelectric conversion characteristics thereof by forming Si an Ge having semiamorphous structure as the intermediate state between amorphous and crystal or mixed crystal thereof.
CONSTITUTION: 10W100% of SiH
4 is diluted with He on a heated substrate (for instance, at 450W650°C), a reaction system pressurized to 0.001W10 Torr is activated or decomposed by a glow discharge method, and an semiamorphous semiconductor film having the intermediate characteristics between amorphous structure and crystalline structure and stable energy is formed. Since the semiamorphous semiconductor becomes direct transition type as compared with the indirect monocrystalline transition type, its emitting energy absorbing efficiency is increased and the carrier diffusion length becomes 10W1,000 times the amorphous. Accordingly, a photoelectric converter having high efficiency can be obtained.
COPYRIGHT: (C)1981,JPO&Japio,下面是Semiamorphous semiconductor专利的具体信息内容。

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