COLOR IMAGING FOR CMP MONITORING
专利汇可以提供COLOR IMAGING FOR CMP MONITORING专利检索，专利查询，专利分析的服务。并且A polishing system includes a polishing station including a platen to support a polishing pad, a support to hold a substrate, an in-line metrology station to measure the substrate before or after polishing of a surface of the substrate in the polishing station, and a controller. The in-line metrology station includes a color line-scan camera, a white light source, a frame supporting the light source and the camera, and a motor to cause relative motion between the camera and the support along a second axis perpendicular to the first axis to cause the light source and the camera to scan across the substrate. The controller is configured to receive a color data from the camera, to generate a 2-dimensional color image from the color data, and to control polishing at the polishing station based on the color image.，下面是COLOR IMAGING FOR CMP MONITORING专利的具体信息内容。
| 标题 | 发布/更新时间 | 阅读量 |
|---|---|---|
| 涂料颜色数据库的创建方法、使用数据库的检索方法、及其系统、程序和记录介质 | 2020-05-12 | 710 |
| 一种获得物体三维和颜色数据的系统 | 2020-05-11 | 528 |
| 液体颜色数据采集信号增强器 | 2020-05-11 | 411 |
| 망색 진단 자동화를 위한 색데이터 처리 시스템 및 방법 | 2020-05-13 | 459 |
| 디스플레이 장치의 색 측정 데이터 처리 방법 | 2020-05-13 | 246 |
| 색역확장을 이용한 색데이터 변환장치 및 방법 | 2020-05-14 | 935 |
| 색 데이터 수정방법 및 표시 시스템 | 2020-05-13 | 711 |
| 컬러 데이터의 압축 방법 | 2020-05-13 | 935 |
| 彩色图像的颜色数据管理方法 | 2020-05-11 | 626 |
| HARDWARE-ACCELERATED COLOR DATA PROCESSING | 2020-05-12 | 823 |
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