HEATING DEVICE |
|||||||
| 申请号 | US15793268 | 申请日 | 2017-10-25 | 公开(公告)号 | US20180122658A1 | 公开(公告)日 | 2018-05-03 |
| 申请人 | NGK SPARK PLUG CO., LTD.; | 发明人 | Noriaki TOKUSHO; | ||||
| 摘要 | A heating device includes a base body that has a placement surface for placing a wafer thereon and a back surface that is on an opposite side of the placement surface; a heating resistor that is embedded in the base body; a cylindrical supporting body that has one end surface and the other end surface, the one end surface being connected to the back surface of the base body, the other end surface being on an opposite side of the one end surface; and a supporting-body channel that includes a portion extending in a direction from the other end surface to the one end surface of the cylindrical supporting body, and that is formed within a peripheral wall of the cylindrical supporting body. The supporting-body channel includes an opening portion that opens inwardly from an outer peripheral surface of the cylindrical supporting body. | ||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
QQ群二维码
意见反馈
意见反馈