CONVEYANCE SYSTEM |
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| 申请号 | EP14751764 | 申请日 | 2014-01-08 | 公开(公告)号 | EP2957974A4 | 公开(公告)日 | 2016-11-23 |
| 申请人 | MURATA MACHINERY LTD; | 发明人 | IZUMI TAKANORI; | ||||
| 摘要 | A conveyance system that can prevent the conveyance carriages from entering by mistake is provided. The conveyance system 1 includes: a rail R that is constructed across a plurality of areas; a FOUP conveyance vehicle 10 that travels along the rail R; a reticle conveyance vehicle 20 that has a width and a height at least one of which differs from that of the FOUP conveyance vehicle 10; an optical sensor 15 that is provided to the FOUP conveyance vehicle 10, arranged at a position that does not overlap the rectile conveyance vehicle 20 in a traveling direction, and detects an obstacle in front; and a member 30 to be detected that is arranged, in an entry section into a certain area where only the rectile conveyance vehicle 20 is allowed to enter out of a plurality of areas, at a position where the rectile conveyance vehicle 20 is allowed to enter the certain area, the position being detectable by the optical sensor 15 provided to the FOUP conveyance vehicle 10. | ||||||
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