摘要 |
Gas is circulated in an entire transportation space. A robot transport device includes a transportation space in which a transport robot is provided and circulation passages by which gas in the transportation space is circulated. Around the transportation space, surrounding spaces are provided. To these surrounding spaces, an object is transported by the transport robot. The transportation space communicates with each of the surrounding spaces via each of openings. The circulation passages are provided to sandwich the transportation space to avoid a working area of the transport robot, including the openings. The circulation passages are provided in pillar portions forming the transportation space. |