ROBOT TRANSPORT DEVICE

申请号 US15774882 申请日 2016-10-28 公开(公告)号 US20180323086A1 公开(公告)日 2018-11-08
申请人 SINFONIA TECHNOLOGY CO., LTD.; 发明人 Takashi SHIGETA; Toshihiro KAWAI; Haruki TAKEUCHI; Yoshimasa SUDA; Hisashi GOMI; Shigenori OZAKI;
摘要 Gas is circulated in an entire transportation space. A robot transport device includes a transportation space in which a transport robot is provided and circulation passages by which gas in the transportation space is circulated. Around the transportation space, surrounding spaces are provided. To these surrounding spaces, an object is transported by the transport robot. The transportation space communicates with each of the surrounding spaces via each of openings. The circulation passages are provided to sandwich the transportation space to avoid a working area of the transport robot, including the openings. The circulation passages are provided in pillar portions forming the transportation space.
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