Transport apparatus |
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| 申请号 | US14365277 | 申请日 | 2012-12-17 | 公开(公告)号 | US10137576B2 | 公开(公告)日 | 2018-11-27 |
| 申请人 | Brooks Automation, Inc.; | 发明人 | Ulysses Gilchrist; Jairo Terra Moura; | ||||
| 摘要 | A substrate transport apparatus for transporting substrates, the substrate transport apparatus including a frame, at least one transfer arm connected to the frame, at least one end effector mounted to the at least one transfer arm and at least one substrate support pad disposed on the at least one end effector, the at least one substrate support pad has a configuration that effects increased friction force, resulting from an increased friction coefficient, in at least one predetermined direction. | ||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
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