序号 专利名 申请号 申请日 公开(公告)号 公开(公告)日 发明人
21 Certification of correction US3023072D US3023072A 1962-02-27
22 Process for the treatment of tracing US2947640D US2947640A 1960-08-02
23 Method of dressing concrete US2200433D US2200433A 1940-05-14
24 Gerhard US1667854D US1667854A 1928-05-01
25 Ments US1571048D US1571048A 1926-01-26
26 Daniel h US1505215D US1505215A 1924-08-19
27 By mildbed lowby US1400489D US1400489A 1921-12-13
28 Process of tbeatijto natitbal stone US1396118D US1396118A 1921-11-08
29 챔버 입자들을 감소시키기 위한 중요 챔버 구성요소 표면 개선 KR1020167026425 2015-01-30 KR1020160130250A 2016-11-10 두안,렌-구안; 로차-알바레즈,주안카를로스; 산카라크리쉬난,람프라카쉬
본원에기술된구체예들은일반적으로자외선반도체가공챔버들에서사용하기위한챔버구성요소들을열처리하기위한장치및 방법들에관한것이다. 일체형세라믹또는유리물품들을포함하는챔버구성요소들의열처리는, 챔버구성요소들이부석성환경들에노출될때, 예를들어, 자외선광 및오존/산소라디칼들에노출될때 입자발생의가능성을감소시킬수 있다. 챔버구성요소들을열처리하는방법은일체형물품을요망되는기간동안허용가능한램프속도(ramp rate)로요망되는온도까지가열시키고후속하여일체형물품을그러한램핑속도(ramping rate)로냉각시키는것을포함한다.
30 분말 형태의 재료를 위한 열처리 장치 및 대응하는 열처리 방법 KR1020157011088 2013-10-02 KR1020150064142A 2015-06-10 레이마를렌느; 데스부와필리프; 아옹세드릭; 로누와세바스티엥
본발명은가열구역을갖는열처리로(2), 및급냉탱크(3)를포함하는분말형태의재료를위한열처리장치에관한것이다. 상기급냉탱크(3)는적어도부분적으로복수의예냉된(precooled) 고체요소로채워진용기(10)를포함하고, 상기열처리로는상기열처리로(2)의내용물이급냉탱크(3)로이송될수 있도록하기위해이동가능한방식으로장착된다. 또한본 발명은대응하는열처리방법및 라멜라리튬망간니켈마그네슘산화물의제조방법의응용에관한것이다.
31 Critical chamber component surface improvement to reduce chamber particles US14623402 2015-02-16 US09428424B2 2016-08-30 Ren-Guan Duan; Juan Carlos Rocha-Alvarez; Ramprakash Sankarakrishnan
Embodiments described herein generally relate to apparatus and methods for thermally treating chamber components for use in ultraviolet semiconductor processing chambers. Thermal treatment of chamber components comprising unitary ceramic or glass articles may reduce the probability of particle generation when the chamber components are exposed to corrosive environments, such as exposure to ultraviolet light and ozone/oxygen radicals. A method of thermally treating chamber components includes heating the unitary article at an acceptable ramp rate to a desired temperature for a desired time period and subsequently cooling the unitary article at the ramping rate.
32 HEAT TREATMENT DEVICE FOR MATERIAL IN POWDER FORM AND CORRESPONDING HEAT TREATMENT METHOD US14433097 2013-10-02 US20150263332A1 2015-09-17 Marlene Rey; Philippe Desbois; Cedric Haon; Sebastien Launois
A heat treatment device for a material in powder form, including a heat treatment furnace including a heating zone and a quenching tank. The quenching tank includes a container at least partially filled with a plurality of precooled solid elements, and the heat treatment furnace is mounted in a mobile manner to allow the content of the heat treatment furnace to be transferred to the quenching tank. A corresponding heat treatment method, for example, can implement manufacture of lamellar lithium manganese nickel magnesium oxide.
33 SYSTEM, METHOD AND APPARATUS FOR CONTROLLING GROUND OR CONCRETE TEMPERATURE US13903160 2013-05-28 US20140353864A1 2014-12-04 Chester Grochoski
A system, method and apparatus is described for achieving and maintaining concrete temperature during curing in order to improve the compressive strength of the finished concrete. A model to predict ambient conditions during a concrete pour is used to design an equipment layout scheme. A heating apparatus and a control system operate within the system to control concrete curing temperature. The system, method and apparatus are particularly useful for designing concrete pours of elevated slabs because the equipment layout is recommended based on the location of heat sinks such as I-beams, columns and rebar, etc. within a concrete slab. The system, method and apparatus are also useful for ground thawing projects.
34 SAPPHIRE COMPONENT WITH RESIDUAL COMPRESSIVE STRESS US13738200 2013-01-10 US20140193606A1 2014-07-10 Kelvin Kwong
A method comprises shaping an aluminum oxide ceramic material into a component for an electronic device. The component has first and second major surfaces. A selected region of one or both of the first and second major surfaces is heated to an annealing temperature. The selected region is then cooled below the annealing temperature, so that residual compressive stress is generated in the selected region.
35 Metal working method US13827450 1950-01-12 US2717221A 1955-09-06 CHRISTNER ROBERT M
36 Electric resistances US2647977D US2647977A 1953-08-04
37 Method for producing impregnated US2599582D US2599582A 1952-06-10
38 Road construction US2346930D US2346930A 1944-04-18
39 Process of producing coated fabrics and product thereof US23788738 1938-10-31 US2276415A 1942-03-17 MURRAY ALAN E
40 Process and apparatus for treating US2163642D US2163642A 1939-06-27
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