序号 专利名 申请号 申请日 公开(公告)号 公开(公告)日 发明人
161 Optical Characterization Systems Employing Compact Synchrotron Radiation Sources US13964880 2013-08-12 US20140048707A1 2014-02-20 Yanwei Liu; Daniel C. Wack
A compact synchrotron radiation source includes an electron beam generator, an electron storage ring, one or more wiggler insertion devices disposed along one or more straight sections of the electron storage ring, the one or more wiggler insertion devices including a set of magnetic poles configured to generate a periodic alternating magnetic field suitable for producing synchrotron radiation emitted along the direction of travel of the electrons of the storage ring, wherein the one or more wiggler insertion devices are arranged to provide light to a set of illumination optics of a wafer optical characterization system or a mask optical characterization system, wherein the etendue of a light beam emitted by the one or more wiggler insertion devices is matched to the illumination optics of the at least one of a wafer optical characterization system and the mask optical characterization system.
162 ELECTROSTATIC PARTICLE INJECTOR FOR RF PARTICLE ACCELERATORS US13700518 2011-04-04 US20130082586A1 2013-04-04 Oliver Heid
A method and a device for injecting charged particles into the first cavity resonator of an RF particle accelerator are provided. A n electrode is provided at the entrance to the first cavity resonator, which electrode is connected to a DC voltage source and generates a potential well that accelerates the particles leaving an ion source towards the first cavity resonator. As a result of the ion source and the accelerator path, i.e., more particularly the cavity resonators of the accelerator path, lying at a common potential, more particularly earth potential, the electrostatic potential well does not contribute to the overall energy of the particles, the overall acceleration effect is brought about by voltage induction in the RF resonator and the DC voltage source is not loaded by the beam current, and so the latter need not be precisely regulated or powerful.
163 Method of driving an injector in an internal injection betatron US12334502 2008-12-14 US08362717B2 2013-01-29 Felix K. Chen
A betatron magnet, the betatron magnet comprising at least one electron injector positioned approximate an inside of a radius of an betatron orbit, such that electrons are injected into the betatron orbit with the at least one electron injector positioned within an electron acceleration passageway, whereby the electron acceleration passageway is located within a vacuum chamber; and wherein the at least one electron injector is driven with an inductive means.
164 ACCELERATOR AND CYCLOTRON US13113456 2011-05-23 US20110291484A1 2011-12-01 Hiroshi TSUTSUI
An accelerator includes an inflector through which a beam entering from an ion source passes and which introduces the beam to an acceleration orbit. The inflector includes a beam convergence unit that converges the beam passing through the inflector. A cyclotron, which accelerates a beam in a convoluted acceleration orbit, includes magnetic poles, D-electrodes, and an inflector. The magnetic poles generate a magnetic field in a direction perpendicular to the acceleration orbit. The D-electrodes generate a potential difference, which accelerates the beam, in the acceleration orbit. A beam, which enters in an incident direction perpendicular to the acceleration orbit, passes through the inflector, and the inflector bends the beam so as to introduce the beam to the acceleration orbit. The inflector includes a beam convergence unit that converges the beam passing through the inflector.
165 CHARGED PARTICLE CANCER THERAPY PATIENT POSITIONING METHOD AND APPARATUS US12994125 2009-05-21 US20110218430A1 2011-09-08 Vladimir Yegorovich Balakin
The invention comprises a patient positioning and/or repositioning system, such as a laying, semi-vertical, or seated patient positioning, alignment, and/or control method and apparatus used in conjunction with multi-axis charged particle radiation therapy. Patient positioning constraints optionally include one or more of: a seat support, a back support, a head support, an arm support, a knee support, and a foot support. One or more of the positioning constraints are preferably movable and/or under computer control for rapid positioning, repositioning, and/or immobilization of the patient. The system optionally uses an X-ray beam that lies in substantially the same path as a proton beam path of a particle beam cancer therapy system. The generated image is usable for: fine tuning body alignment relative to the proton beam path, to control the charged particle beam path to accurately and precisely target the tumor, and/or in system verification and validation.
166 METHOD OF DRIVING AN INJECTOR IN AN INTERNAL INJECTION BETATRON US12334502 2008-12-14 US20100148705A1 2010-06-17 Felix K. Chen
A betatron magnet, the betatron magnet comprising at least one electron injector positioned approximate an inside of a radius of an betatron orbit, such that electrons are injected into the betatron orbit with the at least one electron injector positioned within an electron acceleration passageway, whereby the electron acceleration passageway is located within a vacuum chamber; and wherein the at least one electron injector is driven with an inductive means.
167 Circular acceleration apparatus, electromagnetic wave generator and electromagnetic-wave imaging system US11860965 2007-09-25 US07634062B2 2009-12-15 Hirofumi Tanaka; Takahisa Nagayama; Nobuyuki Zumoto
An objective is to provide a circular acceleration apparatus that can accelerate higher currents as well as avoid complex controlling of a deflecting magnetic field generated by an electron deflection unit. The circular acceleration apparatus is provided, which comprising a circular accelerator 2 including an electron acceleration unit 13 and a deflection-magnetic-field generating unit 14; an electron generator 1, to which a pulsed voltage is applied, to generate electrons for injecting to the circular accelerator 2; and a circuit element which generates the pulsed voltage for providing to the electron generator 1 by making the pulsed voltage applied to the electron generator 1 have at least one of a slow rising edge and a slow falling edge.
168 Electron injection in ion implanter magnets US11281175 2005-11-17 US07402816B2 2008-07-22 Anthony Renau; Donna L. Smatlak; James Buff; Eric Hermanson
One or more electron sources are utilized to inject electrons into an ion beam being transported between the polepieces of a magnet. In some embodiments, the electron sources are located in cavities in one or both polepieces of the magnet. In other embodiments, a radio frequency or microwave plasma flood gun is located in a cavity in at least one of the polepieces or between the polepieces.
169 Apparatus for pre-acceleration of ion beams used in a heavy ion beam application system US11037572 2005-01-18 US20050134204A1 2005-06-23 Alexander Bechthold; Ulrich Ratzinger; Alwin Schempp; Bernhard Schlitt
The present invention relates to an apparatus for pre-acceleration of ions and optimized matching of beam parameters used in a heavy ion application comprising a radio frequency quadruple accelerator (RFQ) having two mini-vane pairs supported by a plurality of alternating stems accelerating the ions from about 8 keV/u to about 400 keV/u and an intertank matching section for matching the parameters of the ion beam coming from the radio frequency quadruple accelerator (RFQ) to the parameters required by a subsequent drift tube linear accelerator (DTL).
170 Beam conditioner for free electron lasers and synchrotrons US225152 1994-04-08 US5805620A 1998-09-08 Hongxiu Liu; George R. Neil
A focused optical is been used to introduce an optical pulse, or electromagnetic wave, colinearly with the electron beam in a free electron laser or synchrotron thereby adding an axial field component that accelerates the electrons on the radial outside of the distribution of electrons in the electron beam. This invention consists of using the axial electrical component of a TEM.sub.10 mode Gaussian beam in vacuum to condition the electron beam and speed up the outer electrons in the beam. The conditioning beam should possess about the same diameter as the electron beam. The beam waist of the conditioning wave must be located around the entrance of the undulator longitudinally to have a net energy exchange between the electrons in the outer part of the distribution and the conditioning wave owing to the natural divergence of a Gaussian beam. By accelerating the outer electrons, the outer and core electrons are caused to stay in phase. This increases the fraction of the electron beam energy that is converted to light thereby improving the efficiency of conversion of energy to light and therefore boosting the power output of the free electron laser and synchrotron.
171 Apparatus and method for inhibiting the generation of excessive radiation US401605 1989-08-31 US5046078A 1991-09-03 Francisco Hernandez; Jerry Chamberlain
The generation of excessive electron radiation is prevented in an apparatus which comprises an accelerator means for generating and accelerating electrons. The accelerator comprises an electron injector for emitting injector pulses, an electron gun for receiving the injector pulses, a waveguide receiving electrons from the electron gun and a high frequency source for supplying RF signals for the generation of an electric field for accelerating the electrons in the waveguide and generating the electron beam which has a predetermined intensity level according to the amplitudes of the injector pulses. A sensing means senses the amplitudes of the injector pulses and generates sensing signals. The amplitudes of the sensing signals are compared with predetermined reference voltage values and the generation of the electron beam is prevented if the amplitudes of the sensing signals exceed the predetermined reference voltage value.
172 Apparatus for acceleration and application of negative ions and electrons US186183 1988-04-26 US4992746A 1991-02-12 Ronald L. Martin
An apparatus for generating X-rays from electron synchrotron radiation or beams of accelerated ions for ion radiography or ion therapy includes a source of electrons and a source of ions, both of which are connectable to preaccelerators. The preaccelerators supply the appropriate type of charged particle to a synchrotron accelerator which accelerates ions to an energy level that is appropriate for radiography or therapy and which accelerates electrons to a level that generates X-rays by synchrotron radiation in a useful frequency range. The accelerator system also includes a storage ring into which particles are switched and circulated for later use. Electrons are extracted from the synchrotron and injected into the storage ring by fast extraction using a kicker magnet and a septum magnet. They then circulate in the storage ring for periods of hours generating X-rays which may be used for lithography of computer chips with submicron resolution. The energy loss because of this radiation is continuously replaced by a radio-frequency acceleration system. During the period that electrons are circulating in the storage ring, the synchrotron may be utilized to accelerate ions for ion radiography or ion therapy with beam extracted from the synchrotron by stripping extraction through thin foils. Other simultaneous uses for the ions or electrons from the preaccelerator may prove advantageous.
173 Electron synchrotron accelerating apparatus US369073 1989-06-21 US4988950A 1991-01-29 Koichi Nakayama; Yoshio Gomei
An electron synchrotron accelerating apparatus comprises an accelerating ring, superconducting magnets for applying deflecting magnetic fields inside the accelerating ring, and an electron injector for injecting low-energy electron beams of 40 MeV or less into the accelerating ring. The low-energy electron beams of 40 MeV or less are injected a plurality of times for each predetermined period of time, by means of the electron injector. Inventors hereof find that the radiation damping time is shorter than the beam lifetime, even though the energy of the injected electron beams is relatively low. Accordingly, the electron beams can be injected a plurality of times before the lifetime of the injected beams terminates. Even though the energy of the injected electron beams is relatively low, therefore, accumulated electron current can be increased to a predetermined value. Thus, electronic synchrotron apparatus is provided which can produce a predetermined amount of synchrotron orbit radiations despite its compactness.
174 External ion injection apparatus for a cyclotron US241307 1988-09-07 US4937531A 1990-06-26 Masatoshi Odera
The external ion injection apparatus for a cyclotron is improved so as to be applicable to a small-sized cyclotron and yet capable of accelerating a large-intensity ion beam. The improvements reside in the provision of an ion source disposed externally of a cyclotron, a first D.C. high voltage generator coupled to the ion source for generating a first D.C. high voltage to inject ions produced by the ion source as an incident ion beam with a predetermined acceleration into the cyclotron along a magnetic midplane thereof, a second D.C. high voltage generator for generating a second D.C. high voltage of the same polarity as the first D.C. high voltage, and a beam guiding electrode group arranged within the cyclotron and applied with the second D.C. high voltage for leading the incident ion beam towards the central portion of the magnetic poles of the cyclotron along a repeated semicircle orbit.
175 Charged particle beam storage and circulation apparatus US887769 1986-07-21 US4737726A 1988-04-12 Koju Ueda; Manabu Mizota; Shiro Nakamura; Shintaro Fukumoto; Takebumi Narikawa
An apparatus for accelerating and circulating a beam of charged particles includes a circular equilibrium orbit 3 for circulating the particles, a plurality of inflectors 2a-2g disposed in a spiral path sequence where the charged particles are introduced into the orbit, and negative and positive electrode pairs 18a, 18b disposed flanking the orbit to draw off and neutralize positive ions generated from residual gas in the vacuum chamber of the apparatus.
176 Low perturbation electron injector for cyclic accelerators US620646 1984-06-14 US4608537A 1986-08-26 Frederick Mako; Wallace Manheimer; Christos A. Kapetanokos; Frederick Sandel
A tapered z-pinch for externally introducing an electron beam into a parte accelerator that causes only a small development of perpendicular velocity in the electrons of the electron beam, and that causes only a small disturbance to the magnetic field lines of the particle accelerator.
177 Apparatus for shortening of electron pulses emitted from an electron gun US3454818D 1966-09-02 US3454818A 1969-07-08 SOFFER JACQUES; MANGIN JEAN PAUL
178 Method and device for providing protection against accidental beam deviation in linear particle accelerators US3448390D 1966-09-22 US3448390A 1969-06-03 GUILBAUD GEORGES; SOFFER JACQUES
179 Ceramic loaded buncher for linear accelerators US34316864 1964-02-06 US3336495A 1967-08-15 LOEW GREGORY A
180 Apparatus for injecting charged particles into the magnetic field of a cyclic particle accelerator US21870362 1962-08-22 US3325713A 1967-06-13 MILOS SEIDL; ZDENEK SEDLACEK; PAVEL SUNKA
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