子分类：
| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 81 | Actuators including serpentine arrangements of alternating actuating and opposing segments and related methods | EP01300503.8 | 2001-01-19 | EP1130446A2 | 2001-09-05 | Hill, Edward Arthur; Dhuler, Vijayakumar Rudrappa |
A micromechanical system can include a substrate, an actuator, and an actuated element. In particular, the actuator can include a serpentine arrangement of alternating actuating and opposing segments anchored at a first end thereof to the substrate wherein the actuating segments deflect in response to actuation thereof so that a second end of the serpentine arrangement moves relative to the substrate upon deflection of the actuating segments. The actuated element is attached to the second end of the serpentine arrangement so that the actuated element moves relative to the substrate upon deflection of the actuating segments. Related methods and actuators are also discussed. |
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| 82 | MICROELECTROMECHANICAL ROTARY STRUCTURES | EP00911817.5 | 2000-02-16 | EP1088163A1 | 2001-04-04 | HILL, Edward, A. |
| MEMS (Microelectromechanical System) structures are provided that are designed to rotate in response to thermal actuation or the like. In one embodiment, the MEMS rotary structure includes a hub having one or more radial spoke members that impose a rotational force upon the hub in response to applied changes in temperature. The MEMS rotary structure can also include a ring at least partially encircling the hub and connected to the hub by means of one or more hub spoke members. Controllable clockwise, counterclockwise, or both clockwise and counterclockwise rotation of the hub or ring are provided. The MEMS rotary structures can also include thermal arched beam actuators that are operably connected to the spoke member. As the temperature changes, the thermal arched beam actuators move the spoke members in order to rotate the MEMS structure. Various applications are provided for these rotating MEMS structures, including but not limited to rotary actuators, rotary switches and relays, variable capacitors, variable resistors, shutters, and valves. | ||||||
| 83 | MICROELECTROMECHANICAL POSITIONING APPARATUS | EP98957608.7 | 1998-11-05 | EP1029218A1 | 2000-08-23 | DHULER, Vijayakumar, R.; WOOD, Robert, L. |
| A microelectromechanical (MEMS) positioning apparatus is provided that can precisely microposition an object in each of the X, Y and Z directions. The MEMS positioning apparatus includes a reference surface, a support disposed in a fixed position to the reference surface, and a stage defining a XY plane that is suspended adjacent to the support and over at least a portion of the reference surface. The MEMS positioning apparatus also includes at least one and, more typically, several actuators for precisely positioning the stage and, in turn, objects carried by the stage. For example, the MEMS positioning apparatus can include first and second MEMS actuators for moving the stage in the XY plane upon actuation. In addition, the MEMS positioning apparatus can include a Z actuator, such as a thermal bimorph structure, for moving the stage in the Z direction. | ||||||
| 84 | SICHERHEITSAUSSCHALTVORRICHTUNG | EP87901036.1 | 1987-01-14 | EP0254740B1 | 1991-10-16 | MÜLLER, Manfred, K. |
| Safety disconnection device for electrical users, in particular for use in smoothing irons and portable heaters. It comprises a thermal switch (1) with another switch (22) connected in parallel with the user (R), a dropping resistor (R1) for the other switch (22) heating the thermal switch (1), also connected in parallel with the user (R), and another resistor (R2) which permanently short-circuits and heats the thermal switch (1). | ||||||
| 85 | SICHERHEITSAUSSCHALTVORRICHTUNG | EP87901036.0 | 1987-01-14 | EP0254740A1 | 1988-02-03 | MÜLLER, Manfred, K. |
| Coupe-circuit pour consommateurs électriques, en particulier destiné aux fers de repassage et appareils de chauffage portatifs. Il comporte un thermorupteur (1) avec un autre interrupteur (22) connecté en parallèle avec le consommateur (R), une résistance self (R1) pour l'autre interrupteur (22), qui chauffe le thermorupteur (1), également reliée en parallèle avec le consommateur (R) et une autre résistance (R2) qui court-circuite et chauffe le thermorupteur en permanence. | ||||||
| 86 | SWITCH DEVICE | US16078090 | 2017-02-22 | US20190050007A1 | 2019-02-14 | William Muirhead; Friedrich Von Der Luehe |
| Disclosed is a switch device that includes or is formed by a switchgear. Two sensors of the switchgear monitor two measured values and a switch of the switchgear is switched depending on these measured values. The adjustable thresholds for the measured values are displayed on a digital display integrated in the switchgear or arranged on an external input device. Both thresholds are adjusted digitally via the input device. The input device can be a commercially available smartphone with an app or a laptop. | ||||||
| 87 | Integrated electrical-switching mechanical device having a blocked state | US14289784 | 2014-05-29 | US10026563B2 | 2018-07-17 | Antonio Di-Giacomo; Christian Rivero; Pascal Fornara |
| An integrated circuit, comprising an electrical-switching mechanical device in a housing having at least one first thermally deformable assembly including a beam held in at least two different locations by at least two arms secured to edges of the housing, the beam and the arms being metallic and situated within the same first metallization level and an electrically conductive body, wherein the said first thermally deformable assembly has at least one first configuration at a first temperature and a second configuration when at least one is at a second temperature different from the first temperature, wherein the beam is at a distance from the body in the first configuration and in contact with the said body and immobilized by the said body in the second configuration and establishing or prohibiting an electrical link passing through the body and through the beam. | ||||||
| 88 | ROCKER SWITCH UNIT | US13862086 | 2013-04-12 | US20130228424A1 | 2013-09-05 | Fabian BECK |
| A removable rocker switch unit (1) has a housing (7) and an ON- and an OFF-position removably fixed to the first end of the housing (2). The rocker switch (3) has two pairs of vertically and horizontally aligned connector elements (4). The housing (7) provides two chambers, each chamber for each phase of the rocker switch (7) including a first and a second connecting elements (5, 8) in each chamber arranged to be connected by a fuse (9), a current limiter (9) or both in a series connection and/or by a varistor (9) between connecting elements (5, 8) of the two different phases. | ||||||
| 89 | Bimorph switch, bimorph switch manufacturing method, electronic circuitry and electronic circuitry manufacturing method | US11040502 | 2005-01-21 | US07170216B2 | 2007-01-30 | Hirokazu Sanpei; Jun Mizuno; Masazumi Yasuoka; Humikazu Takayanagi; Takehisa Takoshima; Masaru Miyazaki; Masayoshi Esashi |
| A bimorph switch electrically connecting a traveling contact and a fixed contact. The switch comprises a substrate having a front face, a rear face, and a through hole penetrating from the front face to the rear face; a fixed contact extending from an edge portion of the aperture of the through hole towards the inside of the aperture; and a bimorph section holding the traveling contact at a position facing the aperture and driving the traveling contact. One end of the bimorph section may be formed on a silicon oxide layer formed on a front face of the substrate. | ||||||
| 90 | Relay and cross-connect | US10509842 | 2002-04-02 | US07102482B2 | 2006-09-05 | Tore Andre |
| The present invention relates to a fuse-relay including a first pole (1, 11, 21, 31, 81) and a second pole (2, 12, 22, 32, 82). According to the invention the fuse-relay includes a resilient device (5, 18, 27, 37, 87) that is held in an elastically deformed position by a fuse (6, 16, 26, 36, 86) when the fuse (6, 16, 26, 36, 86) is whole; and in that the resilient device (5, 18, 27, 37, 87) is arranged to make or break a connection between the first pole (1, 11, 21, 31, 81) and the second pole (2, 12, 22, 32, 82) when the fuse (6, 16, 26, 36, 86) is blown. The invention also relates to a cross-connect with such fuse-relays, to a telecommunication system with such cross-connects and to a connection method. | ||||||
| 91 | Liquid metal switch employing a single volume of liquid metal | US11068633 | 2005-02-28 | US20060191778A1 | 2006-08-31 | Timothy Beerling |
| A switch comprises an input contact and at least one output contact, a single droplet of conductive liquid located in a channel, the droplet being in constant contact with the input contact, and a heater configured to heat a gas. The heated gas expands to cause the droplet to translate through the channel. | ||||||
| 92 | Micro electromechanical systems thermal switch | US10371572 | 2003-02-21 | US07034375B2 | 2006-04-25 | Joon-Won Kang |
| A Micro Electro-Mechanical Systems (MEMS) thermal switch. The switch includes a FET having a source and drain in a substrate and a beam isolated from the substrate. The beam is positioned over the source and the drain and spaced by a predefined gap. When the thermal set point is reached, the beam moves to electrically connect the source to the drain. | ||||||
| 93 | Method of making an integrated electromechanical switch and tunable capacitor | US10663983 | 2003-09-17 | US06969630B2 | 2005-11-29 | Mehmet Ozgur |
| A monolithically integrated, electromechanical microwave switch, capable of handling signals from DC to millimeter-wave frequencies, and an integrated electromechanical tunable capacitor are described. Both electromechanical devices include movable beams actuated either by thermo-mechanical or by electrostatic forces. The devices are fabricated directly on finished silicon-based integrated circuit wafers, such as CMOS, BiCMOS or bipolar wafers. The movable beams are formed by selectively removing the supporting silicon underneath the thin films available in a silicon-based integrated circuit technology, which incorporates at least one polysilicon layer and two metallization layers. A cavity and a thick, low-loss metallization are used to form an electrode above the movable beam. A thick mechanical support layer is formed on regions where the cavity is located, or substrate is bulk-micro-machined, i.e., etched. | ||||||
| 94 | Bent switching fluid cavity | US10414343 | 2003-04-14 | US06841746B2 | 2005-01-11 | Marvin Glenn Wong; Lewis R. Dove; Julius K. Botka |
| A switch having first and second mated substrates that define therebetween first and second intersecting channels of a bent switching fluid cavity. A switching fluid is held within the bent switching fluid cavity and is movable between first and second switch states in response to forces that are applied to the switching fluid. More of the switching fluid is forced into the first of the intersecting channels in the first switch state, and more of the switching fluid is forced into the second of the intersecting channels in the second switch state. | ||||||
| 95 | Integrated electromechanical switch and tunable capacitor and method of making the same | US10147300 | 2002-05-17 | US06800912B2 | 2004-10-05 | Mehmet Ozgur |
| A monolithically integrated, electromechanical microwave switch, capable of handling signals from DC to millimeter-wave frequencies, and an integrated electromechanical tunable capacitor are described. Both electromechanical devices include movable beams actuated either by thermo-mechanical or by electrostatic forces. The devices are fabricated directly on finished silicon-based integrated circuit wafers, such as CMOS, BiCMOS or bipolar wafers. The movable beams are formed by selectively removing the supporting silicon underneath the thin films available in a silicon-based integrated circuit technology, which incorporates at least one polysilicon layer and two metallization layers. A cavity and a thick, low-loss metallization are used to form an electrode above the movable beam. A thick mechanical support layer is formed on regions where the cavity is located, or substrate is bulk-micro-machined, i.e., etched. | ||||||
| 96 | Method of making an integrated electromechanical switch and tunable capacitor | US10663983 | 2003-09-17 | US20040097066A1 | 2004-05-20 | Mehmet Ozgur |
| A monolithically integrated, electromechanical microwave switch, capable of handling signals from DC to millimeter-wave frequencies, and an integrated electromechanical tunable capacitor are described. Both electromechanical devices include movable beams actuated either by thermo-mechanical or by electrostatic forces. The devices are fabricated directly on finished silicon-based integrated circuit wafers, such as CMOS, BiCMOS or bipolar wafers. The movable beams are formed by selectively removing the supporting silicon underneath the thin films available in a silicon-based integrated circuit technology, which incorporates at least one polysilicon layer and two metallization layers. A cavity and a thick, low-loss metallization are used to form an electrode above the movable beam. A thick mechanical support layer is formed on regions where the cavity is located, or substrate is bulk-micro-machined, i.e., etched. | ||||||
| 97 | THERMOMECHANICAL IN-PLANE MICROACTUATOR | US10312172 | 2002-12-18 | US20040074234A1 | 2004-04-22 | Larry L Howell; Scott Lyon |
| A microactuator (10) providing an output force and displacement in response to an increase in thermal energy is disposed. The microactuator (10) may have a substantially straight expansion member (20, 22) with a first and a second end. The first end may be coupled to a base (12, 16) and a second end may be coupled to a shuttle (24). The expansion member is capable of elongating in a elongation direction. Elongation of the expansion member may urge the shuttle to translate in an output than the elongation direction. In certain embodiments, multiple expansion members are arrayed along one side of the shuttle to drive the shuttle against a surface. Alternatively, expansion members may be disposed on both sides of the shuttle to provide balanced output force. If desired, multiple microactuators may be linked together to multiply the output displacement and/or output force. | ||||||
| 98 | Adaptive manifold | US09681380 | 2001-03-27 | US06667873B2 | 2003-12-23 | James C. Lyke; Warren G. Wilson; Ren H. Broyles |
| An adaptive electrical manifold is comprised of switchbox assemblies containing a plurality of non-volatile MEMS relay switches, apparatus for controlling these switches, and apparatus for controlling a daisy-chained group of switchbox assemblies. | ||||||
| 99 | Integrated electromechanical switch and tunable capacitor and method of making the same | US10147300 | 2002-05-17 | US20020171121A1 | 2002-11-21 | Mehmet Ozgur |
| A monolithically integrated, electromechanical microwave switch, capable of handling signals from DC to millimeter-wave frequencies, and an integrated electromechanical tunable capacitor are described. Both electromechanical devices include movable beams actuated either by thermo-mechanical or by electrostatic forces. The devices are fabricated directly on finished silicon-based integrated circuit wafers, such as CMOS, BiCMOS or bipolar wafers. The movable beams are formed by selectively removing the supporting silicon underneath the thin films available in a silicon-based integrated circuit technology, which incorporates at least one polysilicon layer and two metallization layers. A cavity and a thick, low-loss metallization are used to form an electrode above the movable beam. A thick mechanical support layer is formed on regions where the cavity is located, or substrate is bulk-micro-machined, i.e., etched. | ||||||
| 100 | Microfabricated relay with multimorph actuator and electrostatic latch mechanism | US09984288 | 2001-10-29 | US06483056B2 | 2002-11-19 | Daniel J Hyman; Mark K Hyman; Peter D Bogdanoff |
| This invention is a new type of relay that incorporates the functional combination of multimorph actuator elements with electrostatic state holding mechanisms in the development of a micromachined switching device. This combination of elements provides the benefits of high-force multimorph actuators with those of zero-power electrostatic capacitive latching in microfabricated relays with high reliability and low power consumption. The operation of the relay invention allows for several stable states for the device: a passive state using no power, an active state driving the multimorph actuator with some power, and a latched state electrostatically holding the switch state requiring essentially no power. Multimorph actuators covered by this invention include piezoelectric, thermal, and buckling multimorph actuation mechanisms. These devices use one or more sets of actuator armatures in cantilever or fixed-beam configurations, and use one or more sets of electrostatic latch electrodes for state holding. | ||||||
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