| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 1 | 微机电系统（MEMS）结构及设计结构 | CN201410270234.8 | 2014-06-17 | CN104241034B | 2017-01-11 | W·A·约翰逊; J·E·拉里; A·K·斯坦珀; K·M·沃森; 余佩玲 |
| 在本文中公开了微机电系统(MEMS)结构、制造和使用方法、以及设计结构。该方法包括向微机电系统(MEMS)结构的致动器应用第一电压极性，以将MEMS结构置于用于第一操作条件的预定状态。该方法还包括在后续操作条件期间向MEMS结构的致动器应用与第一电压极性相反的第二电压极性。 | ||||||
| 2 | MEMS开关 | CN201110386333.9 | 2011-11-29 | CN102543592A | 2012-07-04 | 马特吉·戈森斯; 希尔柯·瑟伊; 皮特·斯蒂内肯; 克劳斯·莱曼 |
| 本发明提出了一种MEMS开关，其中，在衬底上方设置至少第一、第二和第三信号线，每条信号线端接于连接区。下部致动电极结构位于衬底上方。可移动接触电极悬置于连接区上方，以实现或断开三个连接区中至少两个连接区之间的电接触，上部致动电极结构设置在下部致动电极上方。对三条或更多条信号线的使用使得能够实现对称的致动力和/或使得能够利用单个可移动电极实现多种开关功能。 | ||||||
| 3 | 开关 | CN200610146780.6 | 2006-11-24 | CN1979714A | 2007-06-13 | 米泽游; 三岛直之; 中谷忠司; 阮俊英; 上田知史 |
| 本发明公开了一种开关。该开关包括：多个扭转弹簧，每个扭转弹簧的一端都固定在基板上；梁部分，所述多个扭转弹簧的另一端都固定于其上，其通过静电致动器进行摆动；以及开关接触部分，其中设置在所述梁部分处的第一触点和固定于所述基板上的第二触点处于连接或断开状态。 | ||||||
| 4 | 微机电系统方法 | CN03811935.8 | 2003-03-17 | CN1656643A | 2005-08-17 | 马奈斯·埃利亚西恩; 凯恩·莲; 刘俊华; 罗伯特·B·伦普考斯基 |
| 使用标准的印刷线路板和高密度互连技术与实践，形成了具有悬臂梁的中尺度MEMS装置。该梁包括至少是一些聚合物材料以构成其长度，在一些实施例中还包含导体材料作为其承受载荷部件。在各种实施例中，该梁被固定在靠近其一端的位置，或远离其一端的位置。 | ||||||
| 5 | 微机电系统（MEMS）结构及设计结构 | CN201410270234.8 | 2014-06-17 | CN104241034A | 2014-12-24 | W·A·约翰逊; J·E·拉里; A·K·斯坦珀; K·M·沃森; 余佩玲 |
| 在本文中公开了微机电系统(MEMS)结构、制造和使用方法、以及设计结构。该方法包括向微机电系统(MEMS)结构的致动器应用第一电压极性，以将MEMS结构置于用于第一操作条件的预定状态。该方法还包括在后续操作条件期间向MEMS结构的致动器应用与第一电压极性相反的第二电压极性。 | ||||||
| 6 | MEMS开关 | CN201110386333.9 | 2011-11-29 | CN102543592B | 2014-11-26 | 马特吉·戈森斯; 希尔柯·瑟伊; 皮特·斯蒂内肯; 克劳斯·莱曼 |
| 本发明提出了一种MEMS开关，其中，在衬底上方设置至少第一、第二和第三信号线，每条信号线端接于连接区。下部致动电极结构位于衬底上方。可移动接触电极悬置于连接区上方，以实现或断开三个连接区中至少两个连接区之间的电接触，上部致动电极结构设置在下部致动电极上方。对三条或更多条信号线的使用使得能够实现对称的致动力和/或使得能够利用单个可移动电极实现多种开关功能。 | ||||||
| 7 | 弹簧结构及使用该弹簧的促动器 | CN201010123457.3 | 2010-03-02 | CN101894711A | 2010-11-24 | 川端康大; 山地佑辅; 田中博之; 芹川知己; 篠浦达生 |
| 本发明提供一种弹簧结构，能够缩短成对的作用点彼此之间的距离，能够增大作用点的驱动力，且能通过一个部件制作。动作部件(63)通过第一支承轴(65)转动自如地支承中央附近。在动作部件(63)的左右两侧，隔着支承轴(65)在两侧分别配置有连动部件(64a、64b)。连动部件(64a、64b)通过第二支承轴(69)转动自如地被支承，另外，与动作部件(63)转动自如地连结。支承轴(69)比动作部件(63)与动作部件(64a、64b)的连结部位更接近于支承轴(65)，且在比支承轴(69)更接近支承轴(65)的部位确定作用点部分(70)。 | ||||||
| 8 | 微机电系统方法 | CN03811935.8 | 2003-03-17 | CN1326200C | 2007-07-11 | 马奈斯·埃利亚西恩; 凯恩·莲; 刘俊华; 罗伯特·B·伦普考斯基 |
| 使用标准的印刷线路板和高密度互连技术与实践，形成了具有悬臂梁的中尺度MEMS装置。该梁包括至少是一些聚合物材料以构成其长度，在一些实施例中还包含导体材料作为其承受载荷部件。在各种实施例中，该梁被固定在靠近其一端的位置，或远离其一端的位置。 | ||||||
| 9 | MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURE AND DESIGN STRUCTURES | US13920353 | 2013-06-18 | US20140368292A1 | 2014-12-18 | Ward A. Johnson; Jenifer E. Lary; Anthony K. Stamper; Kimball M. Watson; Pui L. Yee |
| Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and usage, and design structures are disclosed herein. The method includes applying a first voltage polarity to an actuator of a Micro-Electro-Mechanical System (MEMS) structure to place the MEMS structure in a predetermined state for a first operating condition. The method further includes applying a second voltage polarity which is opposite from the first voltage polarity to the actuator of the MEMS structure during a subsequent operating condition. | ||||||
| 10 | MEMS switch | US13306675 | 2011-11-29 | US08716619B2 | 2014-05-06 | Martijn Goossens; Hilco Suy; Peter Gerard Steeneken; Klaus Reimann |
| A MEMS switch in which at least first, second and third signal lines are provided over the substrate, which each terminate at a connection region. A lower actuation electrode arrangement is over the substrate. A movable contact electrode is suspended over the connection regions for making or breaking electrical contact between at least two of the three connection regions and an upper actuation electrode provided over the lower actuation electrode. The use of three of more signal lines enables a symmetrical actuation force to be achieved or enables multiple switch functions to be implemented by the single movable electrode, or both. | ||||||
| 11 | Electrostatic actuator | US11095359 | 2005-03-30 | US07859370B2 | 2010-12-28 | Kazuhiko Shirakawa |
| A switch with an actuator has two supporting columns on a substrate, and a rocking plate on the supporting columns. The rocking plate is pivoted by (pivotally mounted on) the two supporting columns. The rocking plate is made of conductive material, so that it can be subjected to electrostatic force of an adsorption electrode. In the switch, it is not necessary to provide a narrow beam to support the rocking plate, because the rocking plate is pivoted by the supporting columns. Therefore, the switch is a long-life microswitch. | ||||||
| 12 | MOVING A FREE-STANDING STRUCTURE BETWEEN HIGH AND LOW ADHESION STATES | US12405758 | 2009-03-17 | US20100237738A1 | 2010-09-23 | CHARLES GORDON SMITH; RICHARD L. KNIPE |
| Embodiments disclosed herein generally solve a stiction problem in switching devices by using a series of pulses of force which take the switch from being strongly adhered to a landing electrode to the point where it is only weakly adhered. Once in the low adhesion state, the switch can then be pulled away from contact with a lower force provided by either the spring constant of the switch and/or the electrostatic forces resulting from low voltages applied to nearby electrodes. | ||||||
| 13 | MEMS switch and manufacturing method thereof | US11429364 | 2006-05-08 | US07446634B2 | 2008-11-04 | Hee-moon Jeong; Sang-wook Kwon; Che-heung Kim; Jong-seok Kim; Jun-o Kim; Young-tack Hong; In-sang Song; Sang-hun Lee |
| A MEMS switch including a substrate at least one fixed electrode formed on top of the substrate and at least one restoring electrode formed on top of the substrate and formed at a lateral surface of the fixed electrode. At least one signal line is formed on top of the substrate and has a switching contact part. A movable electrode is distantly connected from the top of the substrate at a predetermined space via an elastic connector on the substrate and at least one contact member formed on a bottom surface of the movable electrode or on a bottom surface of the elastic connector for attachment to or detachment from the switching contact part. At least one pivot boss is formed on either the bottom surface of the movable electrode or on the top of the substrate. | ||||||
| 14 | Galvanically isolated signal conditioning system | US11005608 | 2004-12-06 | US07288940B2 | 2007-10-30 | John Wynne; Eamon Hynes |
| A galvanically isolated signal conditioning system includes a signal conditioning circuit on an integrated circuit chip; a flying capacitor; and a galvanically isolating MEMS switching device on an integrated circuit chip for selectively switching the flying capacitor from across a pair of input terminals in one state to across the input terminals of the signal conditioning circuit in another state. | ||||||
| 15 | Metal contact RF MEMS single pole double throw latching switch | US11006426 | 2004-12-06 | US07280015B1 | 2007-10-09 | James H. Schaffner; Tsung-Yuan Hsu; Adele E. Schmitz; Hui-Pin Hsu |
| Apparatus for a micro-electro-mechanical switch that provides single pole, double throw switching action. The switch has two input lines and two output lines. The switch has a seesaw cantilever arm with contacts at each end that electrically connect the input lines with the output lines. The cantilever arm is latched into position by frictional forces between structures on the cantilever arm and structures on the substrate in which the cantilever arm is disposed. The state of the switch is changed by applying an electrostatic force at one end of the cantilever arm to overcome the mechanical force holding the other end of the cantilever arm in place. | ||||||
| 16 | Electrostatic actuator, microswitch, micro optical switch, electronic device, and method of manufacturing electrostatic actuator | US10884527 | 2004-07-02 | US07164334B2 | 2007-01-16 | Kazuhiko Shirakawa |
| The present switch including the present actuator has a supporting column on a substrate, and a cap plate provided on the supporting column. The supporting column pivotally supports the cap plate. At ends of the cap plate, a plurality of beams are provided, respectively. The plurality of beams are subjected to electrostatic force of absorbing electrodes. According to the present switch, tilting directions of the cap plate (beams) can be set freely. Therefore, by providing the beams in a plurality of directions desired by a user and positioning the absorbing electrodes on the substrate so that the absorbing electrodes respectively correspond to the beams, the cap plate can be tilted in a plurality of desired directions. With this arrangement, the present switch has high degree of freedom as to the positions and number of substrate contact points. | ||||||
| 17 | Switch pad and micro-switch having the same | US11345379 | 2006-02-02 | US20060181377A1 | 2006-08-17 | Soon-cheol Kweon; Hyung-jae Shin; Che-heung Kim; Sang-hun Lee; Mark Da Silva; Siebe Bouwstra |
| A switch pad for switching signal flow and a micro-switch having the same. The switch pad comprises a body formed so that as approaching opposite end portions from a central portion of the body, the body is more remotely spaced from a horizontal plane containing a top surface of the electrostatic driving unit. With the body of the switch pad formed in this manner, the switch pad can be more stably driven. | ||||||
| 18 | Galvanically isolated signal conditioning system | US11005608 | 2004-12-06 | US20060153495A1 | 2006-07-13 | John Wynne; Eamon Hynes |
| A galvanically isolated signal conditioning system includes a signal conditioning circuit on an integrated circuit chip; a flying capacitor; and a galvanically isolating MEMS switching device on an integrated circuit chip for selectively switching the flying capacitor from across a pair of input terminals in one state to across the input terminals of the signal conditioning circuit in another state. | ||||||
| 19 | MEMS switch and method of fabricating the same | US11251804 | 2005-10-18 | US20060131147A1 | 2006-06-22 | Che-heung Kim; Hyung-jae Shin; Soon-cheol Kweon; Kyu-sik Kim; Sang-hun Lee |
| A micro electro mechanical system switch and a method of fabricating the micro electro mechanical system switch. The micro electro mechanical system switch includes a substrate, a plurality of signal lines formed on the substrate and including switching contact points and a plurality of immovable electrodes formed among the signal lines on the substrate. A plurality of anchors protrude from the substrate to predetermined heights and support at least two actuating beams installed on an identical plane so as to move up and down. A connecting unit connects the at least two actuating beams. A support unit provided on the substrate supports the connecting unit and contacting plates are installed on lower surfaces of the at least two actuating beams so as to contact the switching contact points. | ||||||
| 20 | Seesaw-type MEMS switch for radio frequency and method for manufacturing the same | US10859618 | 2004-06-03 | US20050012562A1 | 2005-01-20 | Hyung-jae Shin |
| In a seesaw-type MEMS switch for radio frequency (RF) and a method for manufacturing the same, the seesaw-type MEMS switch for radio frequency (RF) includes a substrate, a transmission line formed on the substrate having a gap therein to provide a circuit open condition, an intermittent part formed a predetermined distance from the substrate, the intermittent part being operable to contact the transmission line on both sides of the gap by performing a seesaw movement about a seesaw movement axis, and a driving part to drive the seesaw movement of the intermittent part in response to a driving signal. | ||||||
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