| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 21 | Relay | US10941352 | 2004-09-14 | US20050030135A1 | 2005-02-10 | James Freeman |
| In one embodiment, a method for reducing signal noise in a relay having pass-through and attenuator circuits which are alternately closed by operation of an armature assembly of the relay is disclosed. In accordance with the method, the armature assembly is provided with a grounding portion. The grounding portion of the armature assembly is oriented to make contact with the pass-through circuit when the attenuator circuit is closed, but not when the pass-through circuit is closed. | ||||||
| 22 | Micro relay of which movable contact remains separated from ground contact in non-operating state | US10305119 | 2002-11-27 | US06828888B2 | 2004-12-07 | Hideki Iwata; Hirofumi Saso |
| A micro relay is provided including a movable contact, a stationary contact, and a ground contact opposed to the movable contact. In an operating state, the movable contact touches the ground contact when the movable contact separates from the stationary contact. In a non-operating state, the movable contact remains separated from the ground contact so that the movable contact does not stick to the ground contact. Since no parasitic capacitance is formed between the stationary contact and the movable contact, the isolation property of the micro relay is improved. | ||||||
| 23 | Switch | US10624381 | 2003-07-22 | US20040124945A1 | 2004-07-01 | Yoshito Nakanishi; Norisato Shimizu; Kunihiko Nakamura; Yasuyuki Naito |
| A switch comprises voltage applying means for providing direct current potentials to first to third beams arranged with a spacing slightly distant one from another, and electrodes for inputting/outputting signals to/from the beams. By controlling the direct current potential provided to the beam, an electrostatic force is caused to thereby change the beam positions and change a capacitance between the beams. By causing an electrostatic force between the first and second beams and moving the both beams, the first and second beams can be electrically coupled together at high speed. Also, an electrostatic force is caused on the third beam arranged facing to the first and second beams, to previously place it close to the first and second beams. When the electrostatic force is released from between the first and second beams, the second beam moves toward the third beam thereby releasing the first and second beams of an electric coupling. | ||||||
| 24 | Relay | US10028254 | 2001-12-20 | US20020153980A1 | 2002-10-24 | James A. Freeman |
| Disclosed herein is a relay having a first circuit, a second circuit, a ground, an electromagnetic actuator assembly, and an armature assembly. The armature assembly is movable between first and second positions with respect to the first and second circuits, and is controlled by the electromagnetic actuator assembly. Movement of the armature assembly to its first position allows current to flow through the first circuit. Movement of the armature assembly to its second position couples the first circuit to the ground and allows current to flow through the second circuit. The ground may be embodied in an extension of the armature assembly that contacts the first circuit when the armature assembly moves to its second position, or the ground may be embodied in a biased conductor that is moved into contact with the first circuit when the armature assembly moves to its second position. | ||||||
| 25 | Series and shunt mems RF switch | US09552547 | 2000-04-19 | US06373007B1 | 2002-04-16 | Mark C. Calcatera; Christopher D. Lesniak; Richard E. Strawser |
| A micromechanical electrical systems (MEMS) metallic micromachined electrical switch usable on the die of an integrated circuit and inside the integrated circuit package for controlling radio frequency signal paths while incurring desirably small signal losses. The switch is of the single pole single throw mechanical type with provision for grounding one open-switch position node in the interest of limiting capacitance coupling across the switch in its open condition. Cantilever beam switch element suspension is included along with normally open and normally closed switch embodiments, electrostatic switch actuation and signal coupling through the closed switch by way of capacitance coupling. Low loss radio frequency operation above one gigahertz in frequency is provided. | ||||||
| 26 | 多層膜を備えるMEMS構造体 | JP2015249801 | 2015-12-22 | JP2016129134A | 2016-07-14 | ルノー ロビン; ニコラ ロルフェリン; カリム セグエニ |
| 【課題】挿入損失を低減することが可能なMEMSデバイス、特に、MEMSスイッチの製造方法を提供する。 【解決手段】基板10上にポスト30,30’及び導電線40を形成するステップと、第1膜層60と、第1膜層が、第2膜層が第2膜層が形成された領域に隣接して形成されていない領域を有するように、ポストの一つの上の領域、及び/又は、導電線上の領域の第1膜層上に第2膜層とを形成することを含む、ポスト及び導電線上に膜を形成するステップとを備える。また、基板上に形成されたポスト及び導電(伝送)線と、ポスト及び導電線上の膜とを備えるMEMSデバイス、特に、MEMSスイッチが提供される。膜は、第1膜層と、第1膜層が、第2膜層が第2膜層が形成された領域に隣接して形成されていない領域を有するように、ポストの一つの上の領域、及び/又は、導電線上の領域の第1膜層上に形成された第2膜層とを含む。 【選択図】図2a |
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| 27 | Micro-relay and a method of manufacturing the same | JP2002232182 | 2002-08-08 | JP4223246B2 | 2009-02-12 | 裕文 佐宗; 英樹 岩田; 誉嗣 柚場 |
| 28 | Micro-relay and its manufacturing method | JP2002232182 | 2002-08-08 | JP2004071481A | 2004-03-04 | IWATA HIDEKI; YUZUBA YOSHITSUGU; SASO HIROFUMI |
| <P>PROBLEM TO BE SOLVED: To provide a micro-relay provided with an isolation characteristic and having excellent sealing capability. <P>SOLUTION: This micro-relay is equipped with: a pair of fixed boards each having a fixed contact and a fixed electrode and disposed oppositely to each other; and a movable plate disposed between the fixed boards. The movable plate includes a frame part, and a movable part mounted movably with respect to the frame part. The frame part is jointed between the pair of fixed boards. The movable part is provided with a movable electrode facing to the fixed electrode and a movable contact at a position corresponding to the fixed contact, and moves between the pair of fixed boards based on electrostatic attraction force generated between the movable electrode and the fixed electrode. <P>COPYRIGHT: (C)2004,JPO | ||||||
| 29 | Micro-relay | JP2002042033 | 2002-02-19 | JP2003242873A | 2003-08-29 | IWATA HIDEKI; SASO HIROFUMI |
| PROBLEM TO BE SOLVED: To improve the isolation characteristic of a micro-relay driven by the electrostatic attraction, and to prevent a movable contact from being attracted to a grounding contact. SOLUTION: Fixed contacts 52 and 53, a movable contact 60, a grounding contact 70, a fixed electrode 56, a movable plate 57, etc., are built on a fixed substrate 51. The grounding contact 70 is located over the movable contact 67. During the drive, the movable contact 60 is brought into contact with the grounding contact 70 when it is detached from the fixed contacts 52 and 53. During the non-drive, the movable plate 57 is in a horizontal condition without any deflection, and the movable contact 60 is detached from the grounding contact 70. COPYRIGHT: (C)2003,JPO | ||||||
| 30 | MEMS structure with thick movable membrane | EP14307128.0 | 2014-12-22 | EP3038126A1 | 2016-06-29 | Rollier, Anne-Sophie; Bonnabel, Antoine; Segueni, Karim |
The present invention relates to a method of manufacturing an MEMS device that comprises the steps of forming a first membrane layer over a sacrificial base layer, forming a second membrane layer over the first membrane layer, wherein the second membrane layer comprises lateral recesses exposing lateral portions of the first membrane layer and forming stoppers to restrict movement of the first membrane layer. Moreover, it is provided MEMS device comprising a movable membrane comprising a first membrane layer and a second membrane layer formed over the first membrane layer, wherein the second membrane layer comprises lateral recesses exposing lateral portions of the first membrane layer.
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| 31 | Mems structure with multilayer membrane | EP14307127.2 | 2014-12-22 | EP3038125A1 | 2016-06-29 | Robin, Renaud; Lorphelin, Nicolas; Segueni, Karim |
The present invention relates to a method of manufacturing an MEMS device, in particular, an MEMS switch, comprising the steps of forming posts and a conduction (transmission) line over a substrate and forming a membrane over the posts and the conduction line comprising forming a first membrane layer and a second membrane layer over the first membrane layer in a region over one of the posts and/or a region over the conduction line such that the first membrane layer has a region where the second membrane layer is not formed adjacent to the region where the second membrane layer is formed. Moreover, it is provided an MEMS device, in particular, an MEMS switch, comprising posts and a conduction (transmission) line formed over a substrate and a membrane over the posts and the conduction line. The membrane comprises a first membrane layer and a second membrane layer formed over the first membrane layer in a region over one of the posts and/or a region over the conduction line such that the first membrane layer has a region where the second membrane layer is not formed adjacent to the region where the second membrane layer is formed.
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| 32 | MICRO-ELECTROMECHANICAL DEVICE AND MODULE AND METHOD OF MANUFACTURING SAME | EP04737143.0 | 2004-06-23 | EP1642311A2 | 2006-04-05 | VAN BEEK, Jozef, T., M.; STEENEKEN, Peter, G. |
| The MEMS element of the invention has a first, a second and an intermediate third electrode. It is given an increased dynamic range in that the switchable capacitor constituted by the second and the third electrode is provided in the signal path between input and output, and that the switchable capacitor constituted by the first and third electrode is provided between the signal path and ground. The MEMS element of the invention is very suitable for integration in a network of passive components. | ||||||
| 33 | メタマテリアルコンタクトを備えるマイクロ電気機械スイッチ | JP2018042929 | 2018-03-09 | JP2018198194A | 2018-12-13 | シバン・ケイ・カウル; アジャイ・クマール・ポダー; ウルリッヒ・エル・ローデ |
| 【課題】信号特性が改善され、張りつきを改善できるRF MEMSスイッチを提供する。 【解決手段】本スイッチは、第1の接地面と第2の接地面との間にある、入力ポート及び出力ポートを有する信号線を備える。また、本スイッチは、スイッチの作動を制御するためのビームを有する。また本スイッチは、第1の接地面及び第2の接地面に形成された1つ以上の欠陥接地構造と、各欠陥接地構造の上方に各欠陥接地構造と対応して位置する第2可撓性ビームとを更に有する。また本スイッチは反発性カシミール力を生成するためのメタマテリアル構造を有する。 【選択図】なし |
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| 34 | 厚い可動膜を備えるMEMS構造体 | JP2015249763 | 2015-12-22 | JP2016137565A | 2016-08-04 | アンネ−ソフィ ロリエ; アントワーヌ ボナベル; カリム セグエニ |
| 【課題】動作の信頼性を向上させるMEMSデバイスの製造方法を提供する。 【解決手段】犠牲ベース層102上に第1膜層101を形成し、前記第1膜層上に第2膜層105を形成し、前記第2膜層は、前記第1膜層の側方部を露出する側方凹部(R)を備え、前記第1膜層の移動を制限するストッパ104を形成する。また、第1膜層と、前記第1膜層上に形成された第2膜層とを備える可動膜を備え、前記第2膜層は、前記第1膜層の側方部を露出する側方凹部(R)を備える。第1膜層は、従来用いられた均一な厚みの膜よりも薄いので膜の自由移動距離は減少し、それにより動作の信頼性が向上する。 【選択図】図3e |
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| 35 | Micro-relay | JP2002232184 | 2002-08-08 | JP4124428B2 | 2008-07-23 | 裕文 佐宗; 英樹 岩田; 誉嗣 柚場 |
| 36 | Plane air bridge mems switch | JP2000212323 | 2000-07-13 | JP3619430B2 | 2005-02-09 | アルヴィン・エム・コング; ジョセフ・ピー・トリエウ; マイケル・ディー・ランマート; ラヒル・ユー・ブホラニア; ロバート・ビー・ストウクス |
| 37 | Micro-relay | JP2002232184 | 2002-08-08 | JP2004071482A | 2004-03-04 | IWATA HIDEKI; YUZUBA YOSHITSUGU; SASO HIROFUMI |
| <P>PROBLEM TO BE SOLVED: To provide a micro-relay provided with an isolation characteristic and having excellent sealing capability. <P>SOLUTION: This micro-relay is provided with: a first fixed board having a first fixed contact and a fixed electrode; a second fixed board having a second fixed contact and disposed oppositely to the first fixed board; and a movable plate disposed between the first and second boards. The movable plate includes a frame part and a movable part mounted movably with respect to the frame part. The frame part is enclosed and jointed between the first and second fixed board. The movable part is provided with a movable electrode facing to the fixed electrode and a movable contact at a position corresponding to the first and second fixed contacts, and moves between the first and second fixed boards based on electrostatic attraction force generated between the movable electrode and the fixed electrode. <P>COPYRIGHT: (C)2004,JPO | ||||||
| 38 | switch | JP2003184204 | 2003-06-27 | JP4186727B2 | 2008-11-26 | 邦彦 中村; 淑人 中西; 康幸 内藤; 紀智 清水 |
| A switch comprises voltage applying means for providing direct current potentials to first to third beams arranged with a spacing slightly distant one from another, and electrodes for inputting/outputting signals to/from the beams. By controlling the direct current potential provided to the beam, an electrostatic force is caused to thereby change the beam positions and change a capacitance between the beams. By causing an electrostatic force between the first and second beams and moving the both beams, the first and second beams can be electrically coupled together at high speed. Also, an electrostatic force is caused on the third beam arranged facing to the first and second beams, to previously place it close to the first and second beams. When the electrostatic force is released from between the first and second beams, the second beam moves toward the third beam thereby releasing the first and second beams of an electric coupling. <IMAGE> <IMAGE> <IMAGE> <IMAGE> <IMAGE> <IMAGE> | ||||||
| 39 | Micro-electro-mechanical devices and modules, as well as a method for manufacturing the same | JP2006516744 | 2004-06-23 | JP2007521612A | 2007-08-02 | ペーター、ヘー．ステーネケン; ヨーゼフ、テー．エム．ファン、ベーク |
| 本発明のＭＥＭＳ素子は、第１、第２、及び中間第３電極を有する。 第２電極と第３電極とによって構成された切替可能コンデンサが入力と出力との間の信号経路内に設けられ、第１電極と第３電極とによって構成された切替可能コンデンサが信号経路とグランドとの間に設けられるので、ダイナミック・レンジが大きくなる。 本発明のＭＥＭＳ素子は受動構成要素の回路網における集積に非常に適している。 | ||||||
| 40 | Switch | JP2003184204 | 2003-06-27 | JP2004111360A | 2004-04-08 | NAKANISHI YOSHITO; NAKAMURA KUNIHIKO; SHIMIZU NORITOMO; NAITO YASUYUKI |
| PROBLEM TO BE SOLVED: To provide a switch capable of reducing a response time and reducing a voltage being applied. SOLUTION: A switch comprises voltage applying means for respectively providing direct current potentials to first to third beams 1 to 3 arranged with a spacing slightly distant one from another, and electrodes 4 to 9 for inputting/outputting AC signals to/from the respective beams. The positions of the respective beams 1 to 3 are changed by an electrostatic force so as to change a capacitance between the beams 1 to 3. By causing an electrostatic force between the first and second beams 1 and 2 and moving the both beams, the first and second beams 1 and 2 can be electrically coupled together at high speed. Also, an electrostatic force is caused on the third beam 3 arranged facing to the second beam 2, to previously place it close to the first and second beams 1 and 2. When the electrostatic force is released from between the first and second beams 1 and 2, the second beam moves toward the third beam thereby releasing the electric coupling of the first and second beams. COPYRIGHT: (C)2004,JPO | ||||||
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