| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 1 | 具有可移动厚隔膜的微机电系统结构 | CN201510959028.2 | 2015-12-18 | CN105712292A | 2016-06-29 | 安-苏菲·罗利耶; 安托万·博纳贝尔; 卡里姆·赛格尼 |
| 本发明涉及制造MEMS器件的方法，其包括以下步骤：在牺牲基层上方形成第一隔膜层，在第一隔膜层上方形成第二隔膜层，其中第二隔膜层包括暴露第一隔膜层的侧向部分的侧向凹入部，以及形成止动件以限定第一隔膜层的移动。此外，提供了MEMS器件，其包括可移动隔膜，可移动隔膜包括第一隔膜层与形成在第一隔膜层上方的第二隔膜层，其中第二隔膜层包括暴露第一隔膜层的侧向部分的侧向凹入部。 | ||||||
| 2 | 具有多层隔膜的微机电系统结构 | CN201510971269.9 | 2015-12-22 | CN105712285A | 2016-06-29 | 雷诺·罗宾; 尼古拉斯·洛尔弗兰; 卡里姆·赛格尼 |
| 本发明涉及制造尤其是MEMS开关的MEMS设备的方法，其包括在基板上方形成柱与传导(传输)线以及在柱与传导线上方形成隔膜的步骤，形成隔膜步骤包括形成第一隔膜层和在柱中的一个上方的区域和/或传导线上方的区域中在第一隔膜层上方形成第二隔膜层使得第一隔膜层具有第二隔膜层未形成在其中的区域，该区域邻近第二隔膜层形成于其中的区域。此外，提供了尤其是MEMS开关的MEMS设备，其包括形成在基板上方的柱与传导(传输)线以及在柱与传导线上方的隔膜。隔膜包括第一隔膜层与在柱中的一个上方的区域和/或传导线上方的区域中形成在第一隔膜层上方的第二隔膜层，使得第一隔膜层具有第二隔膜层未形成在其中的区域，该区域邻近第二隔膜层形成于其中的区域。 | ||||||
| 3 | 开关 | CN03133185.8 | 2003-07-25 | CN1276449C | 2006-09-20 | 中西淑人; 清水纪智; 中村邦彦; 内藤康幸 |
| 本发明提供一种开关，它能缩短响应时间及降低外加电压。该开关的构成包括为了对以互相稍微分开的间隔配置的第1根梁及第2根梁及第3根梁外加静电力而独立提供直流电位用的外加电压手段、及对各梁输入输出交流信号用的各梁上设置的电极4～9，靠静电力使各梁1～3的位置变化、使梁1～3间的电容量变化。通过使第1根梁1及第2根梁2间产生静电力，使两根梁都可动，从而梁1、2能高速地电耦合。使配置在第2根梁2对面的第3根梁3产生静电力，预先靠近第1根梁1及第2根梁2，一旦第1根梁1及第2根梁间的静电力解除，第2根梁2向第3根梁3一侧移动，第1根梁1及第2根梁2的电耦合解除。 | ||||||
| 4 | 开关 | CN03133185.8 | 2003-07-25 | CN1476033A | 2004-02-18 | 中西淑人; 清水纪智; 中村邦彦; 内藤康幸 |
| 本发明提供一种开关，它能缩短响应时间及降低外加电压。该开关的构成包括为了对以互相稍微分开的间隔配置的第1根梁及第2根梁及第3根梁外加静电力而独立提供直流电位用的外加电压手段、及对各梁输入输出交流信号用的各梁上设置的电极4～9，靠静电力使各梁1～3的位置变化、使梁1～3间的电容量变化。通过使第1根梁1及第2根梁2间产生静电力，使两根梁都可动，从而梁1、2能高速地电耦合。使配置在第2根梁2对面的第3根梁3产生静电力，预先靠近第1根梁1及第2根梁2，一旦第1根梁1及第2根梁间的静电力解除，第2根梁2向第3根梁3一侧移动，第1根梁1及第2根梁2的电耦合解除。 | ||||||
| 5 | MEMS STRUCTURE WITH MULTILAYER MEMBRANE | US14977483 | 2015-12-21 | US20160181040A1 | 2016-06-23 | Renaud Robin; Nicolas Lorphelin; Karim Segueni |
| Systems and methods for a MEMS device, in particular, a MEMS switch, and the manufacture thereof are provided. In one example, said MEMS device comprises posts and a conduction (transmission) line formed over a substrate and a membrane over the posts and the conduction line. The membrane comprises a first membrane layer and a second membrane layer formed over the first membrane layer in a region over one of the posts and/or a region over the conduction line such that the first membrane layer has a region where the second membrane layer is not formed adjacent to the region where the second membrane layer is formed. | ||||||
| 6 | MICRO ELECTROMECHANICAL SYSTEM (MEMS) SWITCH | US12102442 | 2008-04-14 | US20090114513A1 | 2009-05-07 | Chul-soo Kim; Byeoung-ju Ha; In-sang Song; Duck-hwan Kim; Yun-kwon Park; Jea-shik Shin |
| A Micro ElectroMechanical System (MEMS) switch is provided. The MEMS switch includes a ground, a moving unit moveable according to a driving signal, for connecting the input to the output or disconnecting the input from the output, and an electrode unit arranged in the configuration of a protrusion formed on a portion of the round, to induce a leakage signal generated between the input and the output to move toward the ground. | ||||||
| 7 | Switch with current potential control | US10624381 | 2003-07-22 | US06982616B2 | 2006-01-03 | Yoshito Nakanishi; Norisato Shimizu; Kunihiko Nakamura; Yasuyuki Naito |
| A switch comprises voltage applying means for providing direct current potentials to first to third beams arranged with a spacing slightly distant one from another, and electrodes for inputting/outputting signals to/from the beams. By controlling the direct current potential provided to the beam, an electrostatic force is caused to thereby change the beam positions and change a capacitance between the beams. By causing an electrostatic force between the first and second beams and moving the both beams, the first and second beams can be electrically coupled together at high speed. Also, an electrostatic force is caused on the third beam arranged facing to the first and second beams, to previously place it close to the first and second beams. When the electrostatic force is released from between the first and second beams, the second beam moves toward the third beam thereby releasing the first and second beams of an electric coupling. | ||||||
| 8 | Micro-relay and method of fabricating the same | US10634876 | 2003-08-06 | US20050280975A1 | 2005-12-22 | Hideki Iwata; Takashi Yuba; Hirofumi Saso |
| A micro-relay includes a first substrate having stationary contacts and a stationary electrode, a second substrate arranged so as to face the first substrate, and a movable plate arranged between the first and second substrates. The movable plate has a frame and a movable portion. The frame is sandwiched between the first and second substrates to realize a hermetical sealed structure. The movable portion has a movable electrode facing the stationary electrode, and a movable contact faces the stationary contacts. The movable portion moves between the first and second substrates due to electrostatic attraction that develops between the movable electrode and the stationary electrode. | ||||||
| 9 | Relay | US10028254 | 2001-12-20 | US06853273B2 | 2005-02-08 | James A. Freeman |
| Disclosed herein is a relay having a first circuit, a second circuit, a ground, an electro-magnetic actuator assembly, and an armature assembly. The armature assembly is movable between first and second positions with respect to the first and second circuits, and is controlled by the electro-magnetic actuator assembly. Movement of the armature assembly to its first position allows current to flow through the first circuit. Movement of the armature assembly to its second position couples the first circuit to the ground and allows current to flow through the second circuit. The ground may be embodied in an extension of the armature assembly that contacts the first circuit when the armature assembly moves to its second position, or the ground may be embodied in a biased conductor that is moved into contact with the first circuit when the armature assembly moves to its second position. | ||||||
| 10 | Micro relay of which movable contact remains separated from ground contact in non-operating state | US10878233 | 2004-06-29 | US20040239456A1 | 2004-12-02 | Hideki Iwata; Hirofumi Saso |
| A micro relay is provided including a movable contact, a stationary contact, and a ground contact opposed to the movable contact. In an operating state, the movable contact touches the ground contact when the movable contact separates from the stationary contact. In a non-operating state, the movable contact remains separated from the ground contact so that the movable contact does not stick to the ground contact. Since no parasitic capacitance is formed between the stationary contact and the movable contact, the isolation property of the micro relay is improved. | ||||||
| 11 | Micro relay of which movable contact remains separated from ground contact in non-operating state | US10305119 | 2002-11-27 | US20030155995A1 | 2003-08-21 | Hideki Iwata; Hirofumi Saso |
| A micro relay is provided including a movable contact, a stationary contact, and a ground contact opposed to the movable contact. In an operating state, the movable contact touches the ground contact when the movable contact separates from the stationary contact. In a non-operating state, the movable contact remains separated from the ground contact so that the movable contact does not stick to the ground contact. Since no parasitic capacitance is formed between the stationary contact and the movable contact, the isolation property of the micro relay is improved. | ||||||
| 12 | Shunted multiple throw MEMS RF switch | US09552030 | 2000-04-19 | US06570750B1 | 2003-05-27 | Mark C. Calcatera; Christopher D. Lesniak; Richard E. Strawser |
| A micromechanical electrical systems (MEMS) metallic micromachined multiple ported electrical switch receivable on the die of an integrated circuit and within the integrated circuit package for controlling radio frequency signal paths among a plurality of switch-enabled different path choices. The switch provides desirably small signal losses in both the switch open and switch closed conditions. The switch is primarily of the single pole multiple throw mechanical type with possible use as a single input pole, multiple output poles device and provision for grounding open nodes in the interest of limiting capacitance coupling across the switch in its open condition. Cantilever beam switch element suspension is included along with normally open and normally closed switch embodiments, electrostatic switch actuation and signal coupling through the closed switch by way of increased inter electrode capacitance coupling. Switch operation from direct current to a frequency above ten gigahertz is accommodated. | ||||||
| 13 | Micro-electro system (MEMS) switch | US418341 | 1999-10-14 | US6069540A | 2000-05-30 | John J. Berenz; George W. McIver; Alfred E. Lee |
| An RF switch formed as a micro electro-mechanical switch (MEMS) which can be configured in an array forming a micro electro-mechanical switch array (MEMSA). The MEMS is formed on a substrate. A pin, pivotally carried by the substrate defines a pivot point. A rigid beam or transmission line is generally centrally disposed on the pin forming a teeter-totter configuration. The use of a rigid beam and the configuration eliminates the torsional and bending forces of the beam which can reduce reliability. The switch is adapted to be monolithically integrated with other monolithic microwave integrated circuits (MMIC) for example from HBTs and HEMTs, by separating such MMICs from the switch by way of a suitable polymer layer, such as polyimide, enabling the switch to be monolithically integrated with other circuitry. In order to reduce insertion losses, the beam is formed from all metal, which improves the sensitivity of the switch and also allows the switch to be used in RF switching applications. By forming the beam from all metal, the switch will have lower insertion loss than other switches which use SiO2 or mix metal contacts. | ||||||
| 14 | Hermetically sealed electrostatic MEMS | EP03254928.9 | 2003-08-07 | EP1388875A2 | 2004-02-11 | Iwata, Hideki, c/o Fujitsu Component Limited; Yuba, Takashi, c/o Fujitsu Component Limited; Saso, Hirofumi, c/o Fujitsu Component Limited |
A micro-relay includes a first substrate (10) having stationary contacts and a stationary electrode, a second substrate (30) arranged so as to face the first substrate, and a movable plate (20) arranged between the first and second substrates. The movable plate has a frame (25) and a movable portion (21). The frame is sandwiched between the first and second substrates to realize a hermetical sealed structure. The movable portion has a movable electrode facing the stationary electrode, and a movable contact faces the stationary contacts. The movable portion moves between the first and second substrates due to electrostatic attraction that develops between the movable electrode and the stationary electrode. |
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| 15 | MEMS STRUCTURE WITH THICK MOVABLE MEMBRANE | US14977488 | 2015-12-21 | US20160181041A1 | 2016-06-23 | Anne-Sophie Rollier; Antoine Bonnabel; Karim Segueni |
| The present invention relates to a method of manufacturing an MEMS device that comprises the steps of forming a first membrane layer over a sacrificial base layer, forming a second membrane layer over the first membrane layer, wherein the second membrane layer comprises lateral recesses exposing lateral portions of the first membrane layer and forming stoppers to restrict movement of the first membrane layer. Moreover, it is provided MEMS device comprising a movable membrane comprising a first membrane layer and a second membrane layer formed over the first membrane layer, wherein the second membrane layer comprises lateral recesses exposing lateral portions of the first membrane layer. | ||||||
| 16 | MEMS SWITCHES AND FABRICATION METHODS | US14017646 | 2013-09-04 | US20140209442A1 | 2014-07-31 | Jeffrey P. Gambino; Stephen A. Mongeon |
| MEMS switches and methods of fabricating MEMS switches. The switch has a vertically oriented deflection electrode having a conductive layer supported by a supporting layer, at least one drive electrode, and a stationary electrode. An actuation voltage applied to the drive electrode causes the deflection electrode to deflect laterally and contact the stationary electrode, which closes the switch. The deflection electrode is restored to a vertical position when the actuation voltage is removed, thereby opening the switch. The method of fabricating the MEMS switch includes depositing a conductive layer on mandrels to define vertical electrodes and then releasing the deflection electrode by removing the mandrel and layer end sections. | ||||||
| 17 | Micro-relay and method of fabricating the same | US10634876 | 2003-08-06 | US07551048B2 | 2009-06-23 | Hideki Iwata; Takashi Yuba; Hirofumi Saso |
| A micro-relay includes a first substrate having stationary contacts and a stationary electrode, a second substrate arranged so as to face the first substrate, and a movable plate arranged between the first and second substrates. The movable plate has a frame and a movable portion. The frame is sandwiched between the first and second substrates to realize a hermetical sealed structure. The movable portion has a movable electrode facing the stationary electrode, and a movable contact faces the stationary contacts. The movable portion moves between the first and second substrates due to electrostatic attraction that develops between the movable electrode and the stationary electrode. | ||||||
| 18 | Switch | US11201541 | 2005-08-11 | US07209019B2 | 2007-04-24 | Yoshito Nakanishi; Norisato Shimizu; Kunihiko Nakamura; Yasuyuki Naito |
| A switch comprises voltage applying means for providing direct current potentials to first to third beams arranged with a spacing slightly distant one from another, and electrodes for inputting/outputting signals to/from the beams. By controlling the direct current potential provided to the beam, an electrostatic force is caused to thereby change the beam positions and change a capacitance between the beams. By causing an electrostatic force between the first and second beams and moving the both beams, the first and second beams can be electrically coupled together at high speed. Also, an electrostatic force is caused on the third beam arranged facing to the first and second beams, to previously place it close to the first and second beams. When the electrostatic force is released from between the first and second beams, the second beam moves toward the third beam thereby releasing the first and second beams of an electric coupling. | ||||||
| 19 | Micro-electromechanical device and module and method of manufacturing same | US10561854 | 2004-06-23 | US20060146472A1 | 2006-07-06 | Jozef Thomas Van Beek; Peter Steeneken |
| The MEMS element of the invention has a first, a second and an intermediate third electrode. It is given an increased dynamic range in that the switchable capacitor constituted by the second and the third electrode is provided in the signal path between input and output, and that the switchable capacitor constituted by the first and third electrode is provided between the signal path and ground. The MEMS element of the invention is very suitable for integration in a network of passive components. | ||||||
| 20 | Switch | US11201541 | 2005-08-11 | US20050270128A1 | 2005-12-08 | Yoshito Nakanishi; Norisato Shimizu; Kunihiko Nakamura; Yasuyuki Naito |
| A switch comprises voltage applying means for providing direct current potentials to first to third beams arranged with a spacing slightly distant one from another, and electrodes for inputting/outputting signals to/from the beams. By controlling the direct current potential provided to the beam, an electrostatic force is caused to thereby change the beam positions and change a capacitance between the beams. By causing an electrostatic force between the first and second beams and moving the both beams, the first and second beams can be electrically coupled together at high speed. Also, an electrostatic force is caused on the third beam arranged facing to the first and second beams, to previously place it close to the first and second beams. When the electrostatic force is released from between the first and second beams, the second beam moves toward the third beam thereby releasing the first and second beams of an electric coupling. | ||||||
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