序号 专利名 申请号 申请日 公开(公告)号 公开(公告)日 发明人
61 Focusing device for radiation from optical source JP2004284176 2004-09-29 JP2005109502A 2005-04-21 ANTONI MARTIN; MELZER FRANK; SEIFERT ANDREAS; SINGER WOLFGANG
PROBLEM TO BE SOLVED: To provide a focusing device for a radiation from an optical source, and to provide an illumination system. SOLUTION: The focusing device for a radiation from an optical source (2), in particular from a laser plasma source, comprises a collector mirror (1) for collecting light from the optical source to a second focal point under the condition of a virtual image or real image and is used, in particular, for a microlithography using EUV radiation, and a routing unit and a downstream beam structure in an illumination system. The collector mirror is displaced in the z-direction (optical axis) and can be designed and/or provided so that the position of the second focal point will not change, even if the temperatures changes. COPYRIGHT: (C)2005,JPO&NCIPI
62 Image rotator JP50701693 1992-10-06 JP3282101B2 2002-05-13 シー ジョージ スダーシャン、イー; ジー ヒューレット、ランドール
63 Secondary image forming type finder JP31162197 1997-10-29 JPH11133298A 1999-05-21 MIHARA SHINICHI
PROBLEM TO BE SOLVED: To shorten entire length and to fold an optical axis at an appropriate position so as to reduce an occupation space by including the optical axis of a relay optical system in a plane nearly perpendicular to the optical axis of an objective optical system by a mirror by folding the optical axis. SOLUTION: The optical axis of the relay optical system is included in the plane nearly perpendicular to the optical axis of the objective optical system by the mirror by folding the optical axis. This finder includes the 1st mirror M1 for turning back the optical axis AXCL of a 1st coil condenser lens CL1 and the 2nd mirror M2 for turning back the optical axis AXR of a relay lens system RL. The optical axis AXR of the relay lens system RL is on the plane perpendicular to the optical axis of the objective optical system. After the light outgoing from the objective optical system and branched with a photographing system is bent in a direction at a right angle to the optical axis direction of the objective optical system once, it is bent in the 2nd condenser lens system CL2 and made to go in a direction in parallel with the optical axis direction of the objective optical system. COPYRIGHT: (C)1999,JPO
64 Binocular lens-barrel for stereoscopic microscope JP8861295 1995-03-23 JPH0843740A 1996-02-16 KURISUTEIAN RIYUUKE; UBUE FURII
PURPOSE: To obtain constitution suitable to an observer in human engineering by arranging two roof prisms on the exit face of a direction turning prism in a prism element group so as to be positionally deviated from the optical axes of partial optical paths. CONSTITUTION: This binocular lens-barrel having at least one optical direction turning element arranged in common to two partial optical paths so as to be optionally rotated around a rotational axis and at least one optical image inverting element is provided with a prism element group constituted of a direction turning prism 3 and two roof prisms 4a, 4b to be optical image inverting elements are arranged on the exit face of the prism 3 so as to be positionally deviated from the optical axis 11a, 11b of the two partial optical paths. Thereby an interval between two optical axes of the partial optical paths can be extended after passing the optical elements, space for turning the elements can be correspondingly and more widely utilized and the adjustment of an interval between pupils by a rotatable deflected diamond prism can remarkably easily be executed.
65 Laser beam for the ray guiding optical device JP29628087 1987-11-26 JPH087317B2 1996-01-29 ヴォルフラム・ゴリシュ
66 Wide-field exposure optical system JP4734292 1992-03-04 JPH05249379A 1993-09-28 OKUMURA TOSHIKI; YOSHINO TOSHIKAZU; SATO TAKUJI
PURPOSE: To provide a refraction optical system which is advantageous to the machining precision and holding precision of a reflecting surface as the wide-field exposure optical system which has a wide field and projects an image with high resolving power. CONSTITUTION: The wide-field exposure optical system which projects an image of an object by scanning it to specific scanning width consists of a lighting part which lights the object in an arcuate area, a reflection and refraction optical system which has aberrations compensated in an arcuate area centering on the optical axis and forms the image of the object lighted arcuately by the lighting part on an image plane, photodetection members which are arranged at the object to be projected and on the image plane, and a driving device which relatively moves the lighting part and reflection and refraction projection part; and the reflection and refraction optical system consists of two convex lens groups f1, f2, and f3 and one concave mirror f4. COPYRIGHT: (C)1993,JPO&Japio
67 Thermal video system JP2812392 1992-02-14 JPH05241108A 1993-09-21 BURAIAN FUREDERITSUKU SUMISU; GUREN MATSUKUFUAASON KASUBAATO
PURPOSE: To provide a thermal video system which can select the optimum azimuth and focal distance with respect to the resolution without changing the bias condition of a sprite detector and incorporates an anamorphic optical system and the detector and in which the variable elevation focal distance can provide multiple visual fields. CONSTITUTION: The thermal video system is provided with a scanning means 1 which scans a necessary scene and an anamorphic optical system 3 which focuses the scanned scene 2 on a sprite detector 4 and the optical system 3 is provided with a pair of prisms 17 and 19 arranged between a parallelizing element 15 and focusing element 2, with one or both of the prisms 17 and 19 being attached pivotally to the system 3 so that the anamorphic factor and, accordingly, the focal distance of the system 3 can be changed. COPYRIGHT: (C)1993,JPO
68 JPH04507307A - JP51219890 1990-08-21 JPH04507307A 1992-12-17
69 JPH0359568B2 - JP12856082 1982-07-23 JPH0359568B2 1991-09-11 KONO MICHIO; INE HIDEKI; SUZUKI AKYOSHI
70 Real-image type finder for eye level and waist level JP5529389 1989-03-08 JPH02234139A 1990-09-17 INAHATA TATSUO
PURPOSE: To view a photographic image plane range with an excellent visual field rate, excellent image formation performance, and excellent diopters, to obtain a bright image, and to eliminate a double image by splitting luminous flux which is made incident from an objective so that the split light beams are made incident on a 1st ocular and a 2nd ocular, respectively. CONSTITUTION: An optical path splitting means which splits light in an eye-level direction and a waist-level direction is provided on an optional reflecting surface or transmitting surface of a prism such as a Porro prism 20, a mirror such as a Porro mirror, or an optical device with similar functions which is arranged between an objective system 15 and an ocular system 17. Consequently, light does not passes the same surfaces plural times and the reflecting surface is not doubled either; and only one objective system is required. Consequently, the photographic image plane range is viewed with the excellent photographic image plane range, excellent image formation performance, and excellent diopters, a bright image is obtained, and no double image is generated; and a visual field mask is easily set, the size is small, and the number of parts even for a zoom finder is small while no parallax is generated. COPYRIGHT: (C)1990,JPO&Japio
71 Device for projecting light on surface JP4196989 1989-02-23 JPH02140792A 1990-05-30 GUREAMU RESURII RAITO; MAAKU DEMUSUTAA
PURPOSE: To reduce the size of a space required between a light source and a surface to be irradiated for required elargement by providing a mirror means returning reflected light from a beam splitting means performing the partial reflection and partial transmission of an incident light beam and a louver means transmitting the light within the limited range of an incident angle. CONSTITUTION: This device is provided with the mirror means 4 returning the reflected light from the beam splitting means 2 performing the partial reflection and the partial transmission of the incident light beam, and the louver means 3 transmitting the light within the limited range of the incident angle. In this case, the means 3 absorbs the light having the incident angle in terms of a normal with respect to the means 2 in a range other that the previously specified limited range, so that the influence of a secondary video produced by the unnecessary light beam from the means 2 is reduced by the means 3. The thickness of an entire display unit is further reduced by the reflection of the incident light beam by means of a mirror before the incident light beam enters the beam splitter. COPYRIGHT: (C)1990,JPO
72 Real image type finder optical system JP27138587 1987-10-27 JPH01113736A 1989-05-02 NAKAYAMA HIROKI; ITO YOSHIAKI
PURPOSE:To make the visual field of a finder easy to see and to facilitate the positioning adjustment of a visual field frame by arranging a half mirror between a Porro prism and an eyepiece lens and arranging a plate having an information display body like the visual field frame on an optical axis different from the finder optical axis through the half mirror. CONSTITUTION:The finder image is formed on a first image forming face 16 in the vicinity of the incidence face of a Porro prism 15 through an objective lens 11 and a field lens 13 and is inverted to an erect image by the Porro prism 15 and is observed through an eyepiece lens 12. A plate 17 having an information display body 1 like a visual field frame is arranged in a position optically equivalent to the first image forming face 16 by the half mirror 2 and the visual field frame 1 on the plate 17 is observed together with the finder image through the half mirror 2 and an eyepiece lens 18. The objective lens 11 has a power varying lens part consisting of two lenses, and the focal length of the objective lens 11 is changed to change the angle of view controlled by the visual field frame 1 having fixed size.
73 Image pickup optical device JP26542586 1986-11-07 JPS62117479A 1987-05-28 CHIYAARUZU JIYOFUREI TOMURIN; RICHIYAADO JIYOOJI BINGUHAMU
74 JPS6045411B2 - JP15076375 1975-12-19 JPS6045411B2 1985-10-09 ABURAHAMU GURENEBEKU
75 JPS597081B2 - JP8532473 1973-07-28 JPS597081B2 1984-02-16 DOI RYOICHI; KISHIKAWA TOSHIRO; YAMADA HIROSHI
76 Optical system for detection JP12856082 1982-07-23 JPS5919320A 1984-01-31 KOUNO MICHIO; INE HIDEKI; SUZUKI AKIYOSHI
PURPOSE: To properly maintain the image-formation characteristics of the titled optical system and image-formation characteristics of a pupil by a method wherein an optical compensating device, with which the length of optical path will substantially be maintained even when the position between optical elements makes a change, is arranged in the optical path on a image-formation optical system. CONSTITUTION: The optical system is composed of an object plane 0, an image- formation plane I, an objective lens L 10 and an image-formation lens L 11. The relative position of said two lenses is to be changeable and the distance l of both lenses are also to be changeable. An optical path converter C consists of a mirror M 5, moving mirrors M 6 and M 7, a fixed mirror M 8 and a field stop D. Pertaining to the change Δl of the distance l, the mirrors M 6 and M 7 are moved as far as to Δl/2 to the direction shown by an arrow. At this time, as the length of optical path is extended as far as to Δl, the length of optical path is maintained constant in spite of the variation of interval l. COPYRIGHT: (C)1984,JPO&Japio
77 Light irradiating device JP8661282 1982-05-24 JPS58203410A 1983-11-26 WAKABAYASHI AKIO
PURPOSE:To reduce the number of reflective mirrors required for changing the optical path in a device when an object irradiating part is rotated and turned upward and downward, by detecting the deviation of an incident light to control the rotation of a movable plane mirror. CONSTITUTION:A plane mirror 34 reflects a light incident vertically from below toward the center point of the surface of a movable plane mirror 37 at an angle alpha to the horizontal line without being affected by turning of a turning shaft 6. An attaching angle theta of the perpendicular of the movable plane mirror 37 to the incident light is adjusted in accordance with upward and downward turning of an object irradiating part 10, and the light is made incident to the movable plane mirror 37 so that the reflected light coincides with the axial line of the object irradiating part 10. In this case, when the angle of elevation of the object irradiating part 10 to the horizontal line is denoted as beta and the angle of the perpendicular of the movable plane mirror 37 to the incident light is denoted as theta, the movable plane mirror 37 is so adjusted that the angle of incidence and the angle of reflection to the perpendicular of the movable plane mirror 37 are equal to each other, and theta=alpha+beta/2 is obtained. The object irradiating part 10 is indicated by solid lines when it is in the horizontal position, and it is indicated by two- dot broken lines when it is in the vertical position. When the object irradiating part 10 is turned at the angle beta, the rotation quantity of the perpendicular of the movable plane mirror 37 is beta/2, and therefore, the angular speed of elevation is decelerated to 1/2 to rotate the movable plane mirror 37 in the same direction.
78 Mirror of symmetrical video mechanism JP5636082 1982-04-05 JPS58173709A 1983-10-12 YOSHIDA YUKINDO
PURPOSE:To reflect a video symmetrically on a mirror surface by placing a sheet of mirror on a straight line and bending the video surface at a right angle or roughly a right angle to the inner side. CONSTITUTION:The entire body 1 of a plane mirror is bent at a right angle by a folding line 2 and is constituted of bent mirrors 3, 4. Two sheets of the mirrors 3, 4 are bent roughly at 90 deg. but there may be 1-2 deg. error. The video that reflects on such plane mirror 1 is such that the right hand 5 appears like the right hand on the surface of the mirror 3 and the left hand like the left hand on the surface of the mirror 4. Therefore if the right hand is moved, the right hand viewed on the left side of the mirror surface moves and if the left hand is moved, the hand viewed on the right side of the mirror surface moves.
79 Video rotation preventing device JP19488981 1981-12-03 JPS5895705A 1983-06-07 SAKATA FUMIO
PURPOSE:To constitute a titled device so that a video by rotation of a reflector is not rotated easily, by combining a picture inverting device, when observing the whole circumference without rotating a camera. CONSTITUTION:An optical path is inverted up and down by a picture inverting device 2, and as for a target T as indicated with an arrow, an arrow image T' in the upper direction is obtained by a TV camera 4. In relation of a position where a reflector 1 has been rotated by 180 deg., the inverting device 2 is rotated by 90 deg., and the optical path is inverted as to the right and left, is not inverted up and down, travels straight, and becomes an upward arrow T' in the TV camera image pickup tube 4. That is to say, in case when the reflector has been rotated by 2theta to Y2 from the axis Y, the picture inverting device 2 is rotated by theta. Also, the up-and-down axis Y of the picture inverting device 2 is always inclined by theta against both the axis Y and the axis Y2 , therefore, the target T on the aixs Y2 is always inverted by the picture inverting device 2 and is positioned on the axis Y.
80 JPS56501857A - JP50037980 1980-01-04 JPS56501857A 1981-12-17
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