序号 | 专利名 | 申请号 | 申请日 | 公开(公告)号 | 公开(公告)日 | 发明人 |
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21 | 결상 광학계 및 촬상 장치 | KR1020120090091 | 2012-08-17 | KR1020130066490A | 2013-06-20 | 푸나쿠라지로 |
PURPOSE: An optical imaging system is provided to construct a small optical system with sufficient far-infrared transmittance using low cost materials. CONSTITUTION: An optical imaging system(10) is equipped with a transmitting optical element(11) and a reflecting optical element(13). The transmitting optical element is placed nearest to a subject among the optical elements included in the optical imaging system and made of a material transmitting far-infrared rays. The reflecting optical element is equipped with a surface reflecting surface(S3), reflects the light incident from the transmitting optical element, and focuses the light on an image sensor(17). The surface reflecting surface is formed in the shape of a free-curved surface. | ||||||
22 | 조리개 변경 장치 | KR1020117011730 | 2003-12-18 | KR101179286B1 | 2012-09-03 | 비크헤르만; 빌마르쿠스; 비숍토마스; 콴임-분패트릭; 뉴옌우이-리엠; 크살터슈테판; 뮐바이어미카엘 |
본 발명은 광학 이미지 형성 장치, 특히 반도체 구성소자를 제조하기 위한 EUVL 영역에서의 마이크로리토그래피용 대물렌즈(1)에 관한 것이며, 상기 장치는 하나의 빔 경로(2), 복수의 광학 소자(3), 및 조절 가능한 조리개 개구 형태를 갖는 조리개 장치(7)를 구비한다. 조리개 장치는 각각의 경우 고정된 형태를 갖는 복수의 상이한 조리개 개구(6)를 구비한 조리개 저장기(7a, 7b)를 가지며, 조리개 장치 빔 경로(2) 내로 도입될 수 있다.
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23 | 조리개 변경 장치 | KR1020127019652 | 2003-12-18 | KR1020120089779A | 2012-08-13 | 비크헤르만; 빌마르쿠스; 비숍토마스; 콴임-분패트릭; 뉴옌우이-리엠; 크살터슈테판; 뮐바이어미카엘 |
본 발명은 광학 이미지 형성 장치, 특히 반도체 구성소자를 제조하기 위한 EUVL 영역에서의 마이크로리토그래피용 대물렌즈(1)에 관한 것이며, 상기 장치는 하나의 빔 경로(2), 복수의 광학 소자(3), 및 조절 가능한 조리개 개구 형태를 갖는 조리개 장치(7)를 구비한다. 조리개 장치는 각각의 경우 고정된 형태를 갖는 복수의 상이한 조리개 개구(6)를 구비한 조리개 저장기(7a, 7b)를 가지며, 조리개 장치 빔 경로(2) 내로 도입될 수 있다.
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24 | 조리개 변경 장치 | KR1020067010273 | 2003-12-18 | KR1020060088904A | 2006-08-07 | 비크헤르만; 빌마르쿠스; 비숍토마스; 콴임-분패트릭; 뉴옌우이-리엠; 크살터슈테판; 뮐바이어미카엘 |
The invention relates to an optical imaging device in particular an objective (1) for microlithography in the field of EUVL for producing semiconductor components, having a beam path (2), a plurality of optical elements (3) and a diaphragm device (7) with an adjustable diaphragm opening shape. The diaphragm device has a diaphragm store (7a, 7b) with a plurality of different diaphragm openings (6) with fixed shapes in each case, which can be introduced into the beam path (2). | ||||||
25 | 평면거울과 곡면거울 (오목거울 혹은 포물면 거울 혹은오목거울과 포물면 거울이 결합된 곡면거울)을 결합하여정립상을 구현하는 곡평면 거울 | KR1020040010960 | 2004-02-19 | KR1020050082406A | 2005-08-23 | 양덕봉 |
본 정립상 곡평면거울 발명은 평면거울과, 오목거울 혹은 포물면거울( 이하 오목거울 및 포물면거울을 총칭하여 곡면거울로 칭함)을 결합하여 제작된 것으로서 평면거울과 곡면거울의 반사 법칙을 한꺼번에 활용하여 평면거울의 단점인 좌우 방향 도립상(주:관찰자의 시각으로 볼 경우에 도립된 상 임) 현상을 배제하고 좌우방향 정립상(주:관찰자의 시각으로 볼 경우에는 정립된 상 임)을 얻기 위한 거울이다. 본 거울은 상하 방향으로는 평면 거울이고 좌우 방향으로는 오목거울, 혹은 포물면거울으로서 상하방향은 정립상, 좌우방향도 정립상(주: 관찰자의 시각으로 정립상)을 만들어낸다. 거울의 크기에 따라 색수차로 인한 상의 흐려짐(Aberration)을 방지하고 명확한 상을 얻기 위하여 거울 좌우 가장자리에 가장자리 가리개(COVER)를 설치하여 보다 선명한 상을 만든다. | ||||||
26 | TARGETED DELIVERY OF IMAGING PROBES FOR IN VIVO CELLULAR IMAGING | PCT/US2009049023 | 2009-06-29 | WO2009158698A3 | 2010-04-29 | KAO JOSEPH P Y; BURKS SCOTT R; ROSEN GERALD R |
The present invention relates to imaging probes comprising immunoliposomes that encapsulate self-quenching concentrations of stable free radicals or high-relaxivity contrast agents, such as nitroxides or trityl radicals, wherein the immunoliposomes comprise a targeting ligand, positioned on the surface of the immunoliposomes and having affinity for targeted tissue. | ||||||
27 | IMAGE ROTATOR | PCT/US2006015181 | 2006-04-20 | WO2006116142A3 | 2006-12-21 | ERICKSON DAVID L; GUPTA ANURAG; LERNER SCOTT A |
One embodiment of an image rotator (22) includes an image reversion structure (46) that rotates an image by a predetermined number of degrees, and securement structure (40) adapted to removably secure the image reversion structure on a projector. | ||||||
28 | TARGETED DELIVERY OF IMAGING PROBES FOR IN VIVO CELLULAR IMAGING | PCT/US2009049023 | 2009-06-29 | WO2009158698A2 | 2009-12-30 | KAO JOSEPH P Y; BURKS SCOTT R; ROSEN GERALD R |
The present invention relates to imaging probes comprising immunoliposomes that encapsulate self-quenching concentrations of stable free radicals or high-relaxivity contrast agents, such as nitroxides or trityl radicals, wherein the immunoliposomes comprise a targeting ligand, positioned on the surface of the immunoliposomes and having affinity for targeted tissue. | ||||||
29 | INDIRECT VISION SYSTEM ENABLING BLIND SPOTS TO BE MINIMIZED WITHOUT DISTORTING THE FORMED IMAGE | PCT/FR2005051095 | 2005-12-16 | WO2006064166A8 | 2007-10-04 | COUERY AURELIE; PAYEN CORINNE |
The invention concerns a rear-view system for a motor vehicle comprising a catadioptric assembly of at least one external or internal rearview mirror (6) including a non-planar mirror (6) and at least one diopter (9) forming part of a side window (5) of the vehicle or integrated thereto, said mirror and said diopter being configured and designed such that the image of the object restored by the mirror-diopter assembly is not substantially deformed and such that the blind spot or zone not covered by said system is minimized. | ||||||
30 | IMAGING OPTICAL SYSTEM AND PROJECTION EXPOSURE INSTALLATION FOR MICRO-LITHOGRAPHY WITH AN IMAGING OPTICAL SYSTEM OF THIS TYPE | EP08802769.3 | 2008-10-02 | EP2203787A1 | 2010-07-07 | MANN, Hans-Jürgen |
An imaging optical system (7) comprises a plurality of mirrors (Ml to M8), which image an object field (4) in an object plane (5) into an image field (8) in an image plane (9). At least one of the mirrors (M6, M7, M8) is obscured, and thus has a through-opening (21) for imaging light (15) to pass through. The fourth-last mirror (M5) in the light path before the image field (8) is not obscured and provides, with an outer edge (22) of the optically effective reflection surface thereof, a central shadowing in a pupil plane (17) of the imaging optical system (7). The distance between the fourth-last mirror (M5) and the last mirror (M8) is at least 10 % of the distance between the object field (4) and the image field (8). An intermediate image plane (23), which is closest to the image plane (9), is arranged between the last mirror (M8) and the image plane (9). The imaging optical system (7) has a numerical aperture of 0.9. These measures, not all of which must be effected simultaneously, lead to an imaging optical system with improved imaging properties and/or reduced production costs. | ||||||
31 | SYSTEME DE VISION INDIRECT PERMETTANT DE MINIMISER LES ANGLES MORTS SANS DISTORSION DE L'IMAGE FORMEE | EP05825566.2 | 2005-12-16 | EP1827907B1 | 2008-09-10 | COUERY, Aurélie; PAYEN, Corinne |
The invention concerns a rear-view system for a motor vehicle comprising a catadioptric assembly of at least one external or internal rearview mirror (6) including a non-planar mirror (6) and at least one diopter (9) forming part of a side window (5) of the vehicle or integrated thereto, said mirror and said diopter being configured and designed such that the image of the object restored by the mirror-diopter assembly is not substantially deformed and such that the blind spot or zone not covered by said system is minimized. | ||||||
32 | SYSTEME DE VISION INDIRECT PERMETTANT DE MINIMISER LES ANGLES MORTS SANS DISTORSION DE L'IMAGE FORMEE | EP05825566.2 | 2005-12-16 | EP1827907A1 | 2007-09-05 | COUERY, Aurélie; PAYEN, Corinne |
The invention concerns a rear-view system for a motor vehicle comprising a catadioptric assembly of at least one external or internal rearview mirror (6) including a non-planar mirror (6) and at least one diopter (9) forming part of a side window (5) of the vehicle or integrated thereto, said mirror and said diopter being configured and designed such that the image of the object restored by the mirror-diopter assembly is not substantially deformed and such that the blind spot or zone not covered by said system is minimized. | ||||||
33 | OPTICAL ARRANGEMENTS FOR HEAD MOUNTED DISPLAYS | EP03819156.5 | 2003-12-12 | EP1692559A1 | 2006-08-23 | DOMJAN, László; SZARVAS, Gábor; MIKE, Szabolcs |
A head mounted display is disclosed that utilizes a single video display screen to transport images to both eyes. The image of this display screen is focused in order to reduce the splitting volume and then split by a plurality of reflective surfaces located near the focal point of the image. | ||||||
34 | DIAPHRAGM CHANGING DEVICE | EP03782453.9 | 2003-12-18 | EP1678558A1 | 2006-07-12 | BIEG, Hermann; WILL, Marcus; BISCHOFF, Thomas; KWAN, Yim-Bun, Patrick; NGUYEN, Uy-Liem; XALTER, Stefan; MÜHLBEYER, Michael |
The invention relates to an optical imaging device, in particular an objective 1 for microlithography in the field of EUVL for producing semiconductor components, having a beam path 2, a plurality of optical elements 3 and a diaphragm device 7 with an adjustable diaphragm opening shape. The diaphragm device has a diaphragm store 7a, 7b with a plurality of different diaphragm openings 6 with fixed shapes in each case, which can be introduced into the beam path 2. | ||||||
35 | Imaging sensor having multiple fields of view and utilizing all-reflective optics | EP97109246.5 | 1997-06-07 | EP0814356B1 | 2005-03-30 | Baker, George F.; Cook, Lacy G. |
36 | Vorrichtung zum Bündeln der Strahlung einer Lichtquelle | EP01119485.9 | 2001-08-14 | EP1189089A3 | 2004-03-17 | Antoni, Martin; Melzer, Frank; Seifert, Andreas; Singer, Wolfgang |
Eine Vorrichtung zum Bündeln der Strahlung einer Lichtquelle (2), insbesondere einer Laser-Plasmaquelle, weist einen Kollektorspiegel (1), der das Licht der Lichtquelle (2) in einem zweiten Fokus virtuell oder reell sammelt, insbesondere für die Halbleiter-Lithographie mit EUV-Strahlung, und eine Weiterleitung und nachfolgende Strahlformung in einem Beleuchtungssystem (6) auf. Der Kollektorspiegel (1) ist derart in z-Richtung (optische Achse) verschiebbar und derart ausgelegt und/oder gelagert, daß bei Temperaturänderungen die Lage des zweiten Fokus unverändert bleibt. |
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37 | APPARATUS AND METHOD FOR VIEWING AND INSPECTING A CIRCUMFERENTIAL SURFACE AREA OF AN OBJECT | EP98956274.9 | 1998-10-28 | EP1027590A1 | 2000-08-16 | MEHROTRA, Yogesh; PIKE, John, Nazarian; KAPLAN, Herbert |
An apparatus (10) and method are provided for viewing of a surface area of a three-dimensional object (D) and for inspecting the surface area for flaws or imperfection. A receiving lens (12) defines an optical axis (14) extending through the object for generating a direct image of a front surface section of the object. A first mirror (16) is spaced a first predetermined distance (L1) from an origin (0) on another side of the object relative to the receiving lens (12) for generating a first mirror image of a first rear surface of the object. A second mirror (18) is spaced a second predetermined distance (L2) from the origin (0) on another side of the optical axis (14) relative to the first mirror, for generating a second mirror image of a second rear surface section of the object. The first and second predetermined distances (L1, L2) and the angles of incidence of the mirrors are each selected to simultaneously generate at least three spatially distinct, non-vignetting images forming a 360° view of the surface area. | ||||||
38 | Imaging sensor having multiple fields of view and utilizing all-reflective optics | EP97109246 | 1997-06-07 | EP0814356A3 | 1998-09-23 | BAKER GEORGE F; COOK LACY G |
An imaging sensor (20) has multiple fields of view of the same scene that may be selected by the user for viewing through mechanical movements. The imaging and selection are accomplished entirely with reflective optical components (mirrors) and without the use of any refractive optical components (lenses). A movable field-shifting mirror (50) selects between a direct view and a modified-field-of-view image of the scene. The modified-view image is accomplished using a multi-mirror afocal telescope (32). Additional field-shifting mirrors (56) may be used to select other fields of view and reference sources, as desired, or between various detectors. | ||||||
39 | IMAGE ROTATION DEVICE | EP92921724.8 | 1992-10-06 | EP0694177B1 | 1998-08-19 | SUDARSHAN, E., C., George; HULET, Randall, G. |
40 | Imaging sensor having multiple fields of view and utilizing all-reflective optics | EP97109246 | 1997-06-07 | EP0814356A2 | 1997-12-29 | BAKER GEORGE F; COOK LACY G |
An imaging sensor (20) has multiple fields of view of the same scene that may be selected by the user for viewing through mechanical movements. The imaging and selection are accomplished entirely with reflective optical components (mirrors) and without the use of any refractive optical components (lenses). A movable field-shifting mirror (50) selects between a direct view and a modified-field-of-view image of the scene. The modified-view image is accomplished using a multi-mirror afocal telescope (32). Additional field-shifting mirrors (56) may be used to select other fields of view and reference sources, as desired, or between various detectors. |