序号 专利名 申请号 申请日 公开(公告)号 公开(公告)日 发明人
161 가스 플로우 검증 시스템 및 검증 방법 KR1020077023758 2006-03-15 KR1020070112859A 2007-11-27 웡버넌; 마이네케리차드제이
A gas flow rate verification apparatus is provided for shared use in a multiple tool semiconductor processing platform. The gas flow rate verification apparatus is defined to measure a pressure rate of rise and temperature within a test volume for determination of a corresponding gas flow rate. The apparatus includes first and second volumes, wherein the second volume is larger than the first volume. The apparatus also includes first and second pressure measurement devices, wherein the second pressure measurement device is capable of measuring higher pressures. Based on the target gas flow rate to be measured, either the first or second volume can be selected as the test volume, and either the first or second pressure measurement device can be selected to measure the pressure in the test volume. Configurability of the apparatus enables accurate measurement of gas flow rates over a broad range and in an time efficient manner.
162 MULTIPHASE FLOW METERS AND RELATED METHODS PCT/US2016030165 2016-04-29 WO2016176596A9 2017-02-23 XIE CHENG-GANG; GERMOND BAPTISTE; JOLIVET GUILLAUME
Multiphase flow meters and related methods are disclosed herein. An example apparatus includes an inlet manifold; an outlet manifold, first and second flow paths coupled between the inlet and outlet manifolds; and an analyzer to determine a flow rate of fluid flowing through the first and second flow paths based on a parameter of the fluid flowing through the first flow path.
163 DELIVERY OF AEROSOL MEDICATIONS FOR INSPIRATION PCT/US9201815 1992-03-03 WO9215353A3 1992-10-29 GOODMAN DAVID E; RUBSAMEN REID M
Apparatus (3130) and methods for delivering an amount of aerosolized medicine (3200) for inspiration by a patient in response to the occurrence of appropriate delivery point or points in the patient's detected breath flow. The aerosol medication may be administered as one or more pulses having a pulse width, shape, and frequency that will maximize the respirable fraction of the aerosolized compound being administered. The delivery point or points may be predetermined or determined from a prior inspiratory flow for depositing the selected medication at one or more desired locations in the patient's airway. Changes in the patient's breath flow patterns during the course of an aerosolized medication inspiration therapy program may be detected and used to adjust the controlled amount of medication to be delivered in a given administration and/or to inform the patient of the patient's condition or change in condition.
164 유량 측정 시스템 KR1020180015071 2018-02-07 KR1020180092288A 2018-08-17
유량측정시스템은, 지지부를구비하는수납선반과, 지지부에대하여용기를반송하는반송장치와, 지지부에지지된용기에정화기체를공급하는기체공급장치를구비한용기수납설비에있어서, 유량측정장치를사용하여정화기체의유량을측정한다. 반송장치와유량측정장치가통신가능한상태로전력선을통하여접속되어있다. 반송장치가유량측정장치를반송하여상기유량측정장치를대상지지부에탑재하고있는상태에서, 유량측정장치가정화기체의유량을측정한다.
165 유량 계측 장치, 유량 계측 방법, 및 컴퓨터 판독가능한 기록매체에 저장된 컴퓨터 프로그램 KR1020170177985 2017-12-22 KR101850988B1 2018-04-23 강재원; 고보성; 정종구; 정석제
본발명은유량계측장치, 유량계측방법, 및이러한유량계측방법을실행하기위하여컴퓨터판독가능한기록매체에저장된컴퓨터프로그램에관한것이다. 구체적으로본 발명의일 실시예에따르면, 수원과연결되어유체의유동로를제공하는수로상의일 지점에설치되어상기수로내에서흐르는상기유체의수위를측정하는제1 센서부; 상기수로의상기제1 센서부보다하류측지점에설치되어상기수로내에서흐르는상기유체의수위를측정하는제2 센서부; 및상기제1 센서부및 상기제2 센서부로부터상류측수위데이터및 하류측수위데이터를전송받고, 상기상류측수위데이터및 상기하류측수위데이터를기반으로상기수로에흐르는유체의유량을산출하는유량산출부를포함하는, 유량계측장치가제공될수 있다.
166 가스 플로우 검증 시스템 및 검증 방법 KR1020077023758 2006-03-15 KR101312986B1 2013-10-01 웡버넌; 마이네케리차드제이
가스 플로우 레이트 검증 장치는 다수의 툴 반도체 프로세싱 플랫폼에서 공유 사용으로 제공된다. 가스 플로우 레이트 검증 장치는 대응 가스 플로우 레이트를 결정하기 위해 테스트 볼륨내의 압력 상승 레이트와 온도를 측정하도록 정의된다. 이 장치는 제 1 볼륨과 제 2 볼륨을 포함하고, 제 2 볼륨은 제 1 볼륨보다 크다. 또한, 이 장치는 제 1 압력 측정 디바이스와 제 2 압력 측정 디바이스를 포함하고, 제 2 압력 측정 디바이스는 더 높은 압력을 측정할 수 있다. 측정되어질 타겟 가스 플로우 레이트에 기초하여, 제 1 볼륨과 제 2 볼륨 중 어느 하나가 테스트 볼륨으로서 선택될 수 있고, 제 1 압력 측정 디바이스 또는 제 2 압력 측정 디바이스 중 어느 하나는 테스트 볼륨의 압력을 측정하도록 선택될 수 있다. 이 장치의 구성은 시효율적인 방식으로, 넓은 범위의 가스 플로의 레이트를 정확하게 측정할 수 있다. 가스 플로우 레이트, 검증, 압력 측정 디바이스, 테스트 볼륨
167 압력식 유량 제어 장치를 이용한 유체의 비연속식 유량 스위칭 제어 방법 KR1020107021851 2009-03-10 KR1020100114943A 2010-10-26 오미타다히로; 니시노코우지; 도히료우스케; 나가세마사아키; 스기타카츠유키; 히라타카오루; 히로세타카시; 시노하라츠토무; 이케다노부카즈; 요시다토시히데; 타나카히사시
본 발명은 압력식 유량 제어 장치의 컨트롤 밸브의 하류측과 유체 공급용 관로 사이의 유체 통로를 두개 이상의 병렬상의 유체 통로로 함과 아울러 상기 각 병렬상의 유체 통로에 유체 유량 특성이 다른 오리피스를 각기 개재시키고, 제 1 유량 영역의 유체의 유량 제어에는 한쪽의 오리피스에 상기 제 1 유량 영역의 유체를 유통시키고, 또한 제 2 유량 영역의 유체의 유량 제어에는 적어도 다른쪽의 오리피스에 상기 제 2 유량 영역의 유체를 유통시키도록 한 유량 레인지 가변형 압력식 유량 제어 장치를 이용한 유체의 유량 제어 방법에 있어서, 상기 소유량의 제 1 유량 영역의 유체의 최대 제어 유량이 상기 대유량의 제 2 유량 영역의 최대 제어 유량의 10%보다 작아지도록 상기 각 오리피스의 유량 특성을 선정하고, 소정의 유량 제어 오차 내에서 유량 제어가 가능한 제 1 유량 영역에 있어서의 최소 유량을 낮춘다.
168 유량 레인지 가변형 유량 제어 장치 KR1020077019468 2006-06-22 KR1020070110499A 2007-11-19 오미다다히로; 사이토마사히토; 히노쇼이치; 시마즈츠요시; 미우라카즈유키; 니시노코우지; 나가세마사아키; 스기타카츠유키; 히라타카오루; 도히료우스케; 히로세타카시; 시노하라츠토무; 이케다노부카즈; 이마이토모카즈; 요시다토시히데; 타나카히사시
A pressure type flow control device enabling a reduction in size and an installation cost by accurately controlling the flow of a fluid in a wide flow range. Specifically, the flow of the fluid flowing in an orifice (8) is calculated as Qc = KP1 (K is a proportionality factor) or Qc = KP2m(P1-P2)n (K is a proportionality factor and m and n are constants) by using a pressure P1 on the upstream side of the orifice and a pressure P2 on the downstream side of the orifice. A fluid passage between the downstream side of the control valve of the flow control device and a fluid feed pipe is formed of at least two or more fluid passages positioned parallel with each other. Orifices with different fluid flow characteristics are interposed in the fluid passages positioned parallel with each other. For the control of the fluid in a small flow area, the fluid in the small flow area is allowed to flow to one orifice. For the control of the flow in the large flow area, the fluid in the large flow area is allowed to flow to the other orifice by switching the fluid passages.
169 METHOD OF ASSESSING AND CONDITION MONITORING OF FLUID CONDUITS AND APPARATUS THEREFOR PCT/GB2012052827 2012-11-14 WO2013072685A2 2013-05-23 MACKENZIE HUGH; VARDY ALAN
A method of and apparatus for assessing the condition of a fluid conduit. The method comprises providing a measurement apparatus comprising a measurement region in fluid communication with the fluid conduit. The measurement apparatus is operable to measure at least one of pressure and flowrate in the measurement region. A pressure surge is effected or generated to propagate in the fluid conduit, and at least one of a pressure response or a flowrate response from the fluid conduit is measured. From a pressure data set and a flowrate data set, a data set representative of the cross sectional area along the fluid conduit is determined. This enables average or over all area profiles along long fluid pipelines to be deduced.
170 INVERSE VENTURI METER WITH INSERT CAPABILITY PCT/US2010054694 2010-10-29 WO2011056727A3 2011-09-01 FRANCO JUAN P; LAD KANTI D
An insert meter can be run into an inverse venturi on wireline and make use of the existing pressure taps to allow accurate measurement of reduced flow rates that could not be accurately measured with the inverse venturi meter. The insert meter has seals and can lock into position with peripheral sealing to direct the new and lower flow rate into the throat of the insert meter that is preferably a standard venturi. The venturi devices can be in meter or eductor service and located downhole, subsea or on the surface.
171 DIFFERENTIAL PRESSURE FLOW METER, EXHAUST GAS ANALYSIS DEVICE AND FLOW RATE MEASUREMENT METHOD EP17184563.9 2017-08-02 EP3333550A1 2018-06-13 FUKAMI, Shun

In order to make highly accurate flow rate measurements over a broad range, the present invention provides a differential pressure flow meter 2 that detects differential pressures in a fluid body flowing along a flow path, and calculates a flow rate of the fluid body from those differential pressures, and that includes at least two differential pressure detecting portions 22 and 23 that have mutually different measurement ranges.

172 BIOLOGICAL FLUID FLOW CONTROL APPARATUS AND METHOD EP15200457.8 2015-12-16 EP3034113B1 2018-04-11 PATEL, Amit J.; PLANAS, Samantha M.; HIGGINSON, Kathleen M.; THILL, Melissa A.; MOORE, Courtney
Apparatus, system and method are provided for controlling flow through a biological fluid processing device. Pressure of fluid flow through a flow path is monitored and flow rate in the flow path is increased or decreased based on sensed pressure levels for selected periods of time. This has particular application in controlling flow in an infusion or return flow path of an apheresis device that separates whole blood into one or more blood components.
173 MULTIPHASE FLOW METERS AND RELATED METHODS EP16722013.6 2016-04-29 EP3289319A1 2018-03-07 XIE, Cheng-Gang; GERMOND, Baptiste; JOLIVET, Guillaume
Multiphase flow meters and related methods are disclosed herein. An example apparatus includes an inlet manifold; an outlet manifold, first and second flow paths coupled between the inlet and outlet manifolds; and an analyzer to determine a flow rate of fluid flowing through the first and second flow paths based on a parameter of the fluid flowing through the first flow path.
174 COMPOUND FLOW MEASUREMENT PROBE WITH AN EXTENDED MEASUREMENT RANGE EP15767026.6 2015-09-10 EP3201573A1 2017-08-09 MESNARD, David, Russell; STROM, Gregory, Robert; KENYON, Nathaniel, Kirk
A flow measurement probe (300) includes an elongate probe having an averaging pitot tube (302) with a plurality of upstream and downstream openings (303) arranged along a length of the elongate probe, and a thermal flow measurement sensor (304) coupled to the elongate probe. A method of measuring fluid flow rate in a process includes calculating a flow rate of the fluid using differential pressure in upstream and downstream openings (303) of an averaging pitot tube (302) in an elongate probe when the differential pressure is at least a defined measurement threshold, and calculating the flow rate of the fluid with a thermal mass flow sensor (304) coupled to the flow measurement probe (300) when the differential pressure is less than the defined measurement threshold.
175 Klappe zur Anordnung in einem Strömungskanal einer klimatechnischen Anlage EP12182807.3 2012-09-03 EP2669592A1 2013-12-04 Schicks, Heike; Sadkowski, Manfred

Die Erfindung betrifft eine Klappe zur Anordnung in einem Strömungskanal einer klimatechnischen Anlage, wobei die Klappe zwei Klappenflächen aufweist und drehbar um eine Schwenkachse gelagert ist und wobei eine Vorrichtung mit zumindest zwei Messstellen zur Bestimmung des Volumenstroms eines gasförmigen, in dem Strömungskanal strömenden Mediums vorgesehen ist. Um eine Klappe, beispielsweise für einen Volumenstromregler, anzugeben, die auch bei sehr geringen Volumenströmen einen hohen Differenzdruck bestimmen lässt und damit eine hinreichende Regelgenauigkeit ermöglicht, soll die Klappe auf ihren beiden Klappenflächen jeweils zumindest eine Hohlkammer aufweisen, wobei jede Hohlkammer mit zumindest einer Ausnehmung, vorzugsweise mit einer Vielzahl an nach Art einer Perforation ausgebildeten Ausnehmungen, versehen ist, und wobei die eine Messstelle mit der einen Hohlkammer und die andere Messstelle mit der anderen Hohlkammer verbunden sind.

176 FLOWMETER EP09718159 2009-03-02 EP2249132A4 2012-01-04 MIYATA HAJIME; KAMON KENICHI; ITOU YOUICHI; BESSYO DAISUKE; IWAMOTO RYUJI
Detecting a leak, or the like, with high accuracy on the basis of pressure and a flow volume acquired during use of fluid is made possible. A volume of gas flowing through a flow path 102 is measured by a flow volume measurement unit 106, and pressure is measured by a pressure measurement unit 108. Measured flow data and measured pressure data are input to an analysis unit 112, to thus analyze following of a pressure change by a flow volume change. An amount of flow volume change responsive to an amount of pressure change of a predetermined level or more is classified into a plurality of ranges by means of a predetermined threshold value, and a following flow value change is determined on the basis of determination conditions of the respective ranges of amounts of flow volume changes.
177 FLOWMETER EP09718159.8 2009-03-02 EP2249132A1 2010-11-10 MIYATA, Hajime; KAMON, Kenichi; ITOU, Youichi; BESSYO, Daisuke; IWAMOTO, Ryuji

Detecting a leak, or the like, with high accuracy on the basis of pressure and a flow volume acquired during use of fluid is made possible.

A volume of gas flowing through a flow path 102 is measured by a flow volume measurement unit 106, and pressure is measured by a pressure measurement unit 108. Measured flow data and measured pressure data are input to an analysis unit 112, to thus analyze following of a pressure change by a flow volume change. An amount of flow volume change responsive to an amount of pressure change of a predetermined level or more is classified into a plurality of ranges by means of a predetermined threshold value, and a following flow value change is determined on the basis of determination conditions of the respective ranges of amounts of flow volume changes.

178 TRIPLE REDUNDANCY VORTEX FLOWMETER SYSTEM EP08827847.8 2008-08-22 EP2188597A1 2010-05-26 MATTAR, Wade; DES ROSIERS, Harry William
A system includes a first shedder that is at least partially disposed in a fluid conduit and that generates vortices within the fluid conduit, a first flow sensor system that is responsive to the vortices generated by the first shedder and a second flow sensor system that is responsive to the vortices generated by the first shedder. The system further includes a second shedder that is at least partially disposed in the fluid conduit, that generates vortices within the fluid conduit, and that is separated from the first shedder by a distance. A third flow sensor system is responsive to the vortices generated by the second shedder.
179 VARIABLE FLOW RANGE TYPE FLOW CONTROL DEVICE EP06767569.4 2006-06-22 EP1901154A1 2008-03-19 OHMI, Tadahiro; SAITO, Masahito; HINO, Shoichi; SHIMAZU, Tsuyoshi, c/o Tokyo Electron AT Ltd.; MIURA, Kazuyuki, c/o Tokyo Electron AT Ltd.; NISHINO, Kouji, c/o Fujikin Incorporated; NAGASE, Masaaki, c/o Fujikin Incorporated; SUGITA, Katsuyuki, c/o Fujikin Incorporated; HIRATA, Kaoru, c/o Fujikin Incorporated; DOHI, Ryousuke, c/o Fujikin Incorporated; HIROSE, Takashi, c/o Fujikin Incorporated; SHINOHARA, Tsutomu, c/o Fujikin Incorporated; IKEDA, Nobukazu, c/o Fujikin Incorporated; IMAI, Tomokazu, c/o Fujikin Incorporated; YOSHIDA, Toshihide, c/o Fujikin Incorporated; TANAKA, Hisashi, c/o Fujikin Incorporated

It is so made that a flow rate control apparatus can be downsized and its installation costs can be reduced by achieving accurate flow rate control of a fluid over a wider flow quantity range with one set of flow rate control apparatus.

Specifically, with a pressure type flow rate control apparatus wherein a flow rate of a fluid passing through an orifice 8 is computed as Qc=KP1 (where K is a proportionality constant), or as Qc=KP2m (P1 - P2)n (where K is a proportionality constant, m and n constants), by using an orifice upstream side pressure P1 and/or an orifice downstream side pressure P2, a fluid passage between the downstream side of a control valve and a fluid supply pipe of said pressure type flow rate control apparatus are made to be more than at least 2 fluid passages in parallel, wherein orifices having different flow rate characteristics are provided with the afore-mentioned fluid passages arranged in parallel, the afore-mentioned fluid in a small floe quantity range is made to flow to one orifice for the flow control of the fluid in the small flow quantity range, while the afore-mentioned fluid in a large flow quantity range is made to flow to the other orifice for the flow control of the fluid in the large flow quantity range.

180 Exhaust gas sampling method using a flow rate detector with variable Venturi EP99305474.1 1999-07-09 EP0971211B1 2007-11-28 Hanashiro, Noriyuki, c/o Honda Giken Kogyo KK; Shibata, Atsushi, c/o Honda Giken Kogyo KK; Yanagihara, Shigeru, c/o KK Tsukasa Sokken; Yamawaki, Shuta, c/o KK Tsukasa Sokken
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