| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 141 | System and Method for Gas Flow Verification | US12104438 | 2008-04-17 | US20080195332A1 | 2008-08-14 | Vernon Wong; Richard J. Meinecke |
| A gas flow rate verification apparatus is provided for shared use in a multiple tool semiconductor processing platform. The gas flow rate verification apparatus is defined to measure a pressure rate of rise and temperature within a test volume for determination of a corresponding gas flow rate. The apparatus includes first and second volumes, wherein the second volume is larger than the first volume. The apparatus also includes first and second pressure measurement devices, wherein the second pressure measurement device is capable of measuring higher pressures. Based on the target gas flow rate to be measured, either the first or second volume can be selected as the test volume, and either the first or second pressure measurement device can be selected to measure the pressure in the test volume. Configurability of the apparatus enables accurate measurement of gas flow rates over a broad range and in an time efficient manner. | ||||||
| 142 | Check valve module for flow meters | US11154141 | 2005-06-16 | US07191666B2 | 2007-03-20 | Earl H. Parris; Timothy L. Greenfield; Andrew S. Weaver |
| The present invention relates to an apparatus and method for improved check valve technology used in flow meters, particularly compound/combo meters. The improved check valve technology may be comprised in a single piece module that (1) can easily be removed from the meter without disturbing the metering module, (2) has few or no complicated rollers and pins that require calibration, (3) requires little or no special training to remove, (4) does not require the meter repairperson to move relatively heavy objects, (5) comprises a seal as part of the check valve assembly simplifying seal inspection, seal removal and seal replacement; and (6) is secured in its housing using only external fasteners. The check valve module may be used for upgrading meters installed at customer sites, for upgrading used meters returned for repairs, and for simplifying new meter production. | ||||||
| 143 | System and method for measuring flow | US11012750 | 2004-12-15 | US07150201B2 | 2006-12-19 | Stuart A. Tison; Shiliang Lu |
| One embodiment of the present invention can comprise a primary flow measurement system, a secondary flow measurement system in fluid communication with the primary flow measurement system and a control coupled to the primary flow measurement system and the secondary flow measurement system. The controller can comprise a processor and a memory accessible by the processor. The processor can execute computer instructions stored on the memory to calculate a flow rate using the primary flow measurement system, in a first mode of operation, and calculate the flow rate using the secondary flow measurement system, in a second mode of operation. The computer instructions can be further executable to switch between the first mode of operation and the second mode of operation based on a predefined parameter. | ||||||
| 144 | System and method for monitoring and/or controlling a flow of a media | US11240469 | 2005-10-03 | US20060105682A1 | 2006-05-18 | John Bowman |
| Some embodiments of the invention relate to a system and method for enhanced monitoring and/or controlling a flow of a media. For example, the flow of the media may be controlled and/or monitored over an enhanced range of flow rates; control over the flow of the media may be highly linear; the flow of an aggressive media may be controlled and/or monitored; or, other advantages may be provided. | ||||||
| 145 | Gas mass flow metering valve | US739405 | 1996-10-29 | US6065492A | 2000-05-23 | Lorenzo Bergamini |
| A gas flow control valve which enables mass flow to be measured using a flow straightener in a valve entry duct, a tube for lengthening the entry duct into the valve, a valve element exit port with suitably radiused edges and a flow stabilizer in the valve exit duct. Upstream and downstream pressure taps are positioned immediately upstream of the flow straightener and downstream of the flow stabilizer respectively. This enables the flow rate to be controlled not by the formulas traditionally used for valve dimensioning, but by formulas derived from more accurate formulas used for calculating mass flow with standard members of a fixed restriction type. | ||||||
| 146 | High void fraction multi-phase fluid flow meter | US705573 | 1996-08-29 | US5741977A | 1998-04-21 | Joram Agar; David Farchi |
| A high void fraction multi-phase fluid flow meter and method, wherein a first fluid flow path including a multi-phase flow measuring device disposed in series with a liquid flow restrictor is provided in parallel with a second fluid flow path including a gas flow measuring device. The presence of liquid flow in the flow meter is detected. When liquid flow is detected, a valve in the second fluid flow path operates to cut off fluid flow through the second fluid flow path. Otherwise the valve in the second fluid flow path operates to divert gas flow through the second fluid flow path. Alternatively, a negative pressure differential is produced across the second fluid flow path when liquid flow is present, by passing the incoming liquid flow through a jet pump nozzle, to prevent liquid flow into the second fluid flow path. A check valve is then disposed in the second fluid flow path to prevent backflow from the output of the multi-flow measuring device into the second fluid flow path. A computer outputs an indication of the liquid flow, typically oil flow and water flow, through the multi-phase flow meter, and the combined total amount of gas flow through the two flow meters. | ||||||
| 147 | Full range-high accuracy air flow sensing device | US578779 | 1995-12-26 | US5665923A | 1997-09-09 | Winfield LeRoy Kelley |
| An air flow sensing device comprised of rotatable spaced dampers, shafts to rotate the dampers, a counter-weight attached to a shaft biasing the dampers to a closed position with respect to air flow and pressure sensor means to determine the velocity of the air passing between and around the dampers when the dampers are in a closed position. | ||||||
| 148 | Delivery of aerosol medications for inspiration | US636958 | 1996-04-24 | US5655516A | 1997-08-12 | David E. Goodman; Reid M. Rubsamen |
| Apparatus and methods for delivering an amount of aerosolized medicine for inspiration by a patient in response to the occurrence of appropriate delivery point or points in the patient's detected breath flow. The aerosol medication may be administered as one or more pulses having a pulse width, shape, and frequency that will maximize the respirable fraction of the aerosolized compound being administered. The delivery point or points may be predetermined or determined from a prior inspiratory flow for depositing the selected medication at one or more desired locations in the patient's airway. Determined delivery points are recursively lowered for each inspiratory flow that does not satisfy one of the predetermined and previously lowered threshold. Changes in the patient's breath flow patterns during the course of an aerosolized medication inspiration therapy program may be detected and used to adjust the controlled amount of medication to be delivered in a given administration and/or to inform the patient of the patient's condition or change in condition. The device also may contain a library of administration protocols or operating parameters for different medications and a means for identifying from the canister the medicinal contents of the canister for customizing operation of the apparatus. | ||||||
| 149 | High void fraction multi-phase fluid flow meter | US305344 | 1994-09-13 | US5589642A | 1996-12-31 | Joram Agar; David Farchi |
| A high void fraction multi-phase fluid flow meter and method, wherein a first fluid flow path including a multi-phase flow measuring device disposed in series with a liquid flow restrictor is provided in parallel with a second fluid flow path including a gas flow measuring device. The presence of liquid flow in the flow meter is detected. When liquid flow is detected, a valve in the second fluid flow path operates to cut off fluid flow through the second fluid flow path. Otherwise the valve in the second fluid flow path operates to divert gas flow through the second fluid flow path. Alternatively, a negative pressure differential is produced across the second fluid flow path when liquid flow is present, by passing the incoming liquid flow through a jet pump nozzle, to prevent liquid flow into the second fluid flow path. A check valve is then disposed in the second fluid flow path to prevent backflow from the output of the multi-flow measuring device into the second fluid flow path. A computer outputs an indication of the liquid flow, typically oil flow and water flow, through the multi-phase flow meter, and the combined total amount of gas flow through the two flow meters. | ||||||
| 150 | Automatic aerosol medication delivery system and methods | US2507 | 1993-01-29 | US5394866A | 1995-03-07 | Carl Ritson; Reid M. Rubsamen |
| A portable, battery powered, hand-held system for releasing a controlled dose of aerosol medication for inhalation by a patient including a durable body and a medication cassette inserted in the durable body. The cassette includes a housing for containing a canister of medication, bears an identification code, and permits the canister to be manually depressed to release a dose, e.g., a metered dose, when out of the durable body. The durable body includes an actuator mechanism for engaging an inserted cassette and its canister, and an actuator release mechanism for controlling the actuator mechanism to depress the canister for a selected period of time to release the desired dose of medication and then the release the canister. The actuator mechanism, includes a compression spring for depressing the canister and a torsion spring for reloading the compression spring. The torsion spring is reloaded by rotating the cassette from an open position for delivering aerosol to a closed position. The actuator release mechanism includes a motor and trigger pin assembly that controls the release of the compression spring and the torsion spring, and, hence, the time that the canister is depressed. | ||||||
| 151 | Wide-range laminar flowmeter | US940144 | 1992-09-03 | US5297427A | 1994-03-29 | Ali Shambayati |
| An adjustable laminar flowmeter is disclosed for use in fluid flow measurement. The flowmeter comprises a plurality of paths, at least one of which has at least one dimension which is adjustable by means of an adjustment mechanism. A measuring device is located in operative relation with at least one of said paths to measure a characteristic of the flow through that path. By maintaining laminar flow, the ratio of fluid flow through the paths is linear for a wide range of flows. This allows for a simple straight-line approximation of the flow for a wide range of flow. Also, the full scale flow rate through the device is user adjustable. The symmetrical design of the flowmeter enables bi-directional flow measurement. | ||||||
| 152 | Device to measure and/or control flow-through and/or quantity of heat | US497089 | 1990-03-21 | US5153823A | 1992-10-06 | Peter Ries; Paul Nauer; Wolfgang Huber |
| A device for measuring or controlling a property of a flow medium comprises a conduit which carries a flow medium. A choke element located in the conduit has a first open operating position and a second closed operating position. A driver drives the choke element from one operating position to the other. A pressure sensor measures the difference in pressure before and after the choke element in said conduit. A processor responsive to the pressure difference calculates a flow or thermal property of the flow medium. The processor comprises an input for receiving a continuous control signal which indicates a desired value of a flow or thermal property of the flow medium and a converter for converting the continuous control signal into a pulse-pause signal for controlling the driver. | ||||||
| 153 | Method and apparatus for accurately measuring volume of gas flowing as a result of differential pressure | US610742 | 1984-05-16 | US4646940A | 1987-03-03 | Robert A. Kramer; Terrance P. Rusk; David W. Salmons |
| A method of accurately measuring volume of gas flowing through a conduit as a result of differential pressure of the gas within the conduit is disclosed. The method comprises determining flow of the gas through the conduit, and terminating flow of the gas through the conduit when the differential pressure is a preselected value. The gas flow and the resulting determination of gas volume are preferably referenced to standard temperature and pressure. Also disclosed is an apparatus for effecting the method. | ||||||
| 154 | Wide range flow meter | US54278366 | 1966-04-15 | US3410138A | 1968-11-12 | LYNCH EDMOND B |
| 155 | Variable sensitivity measuring apparatus | US30848752 | 1952-09-08 | US2941147A | 1960-06-14 | MCKINLAY JR DONALD |
| 156 | Flow meter | US49357343 | 1943-07-05 | US2445854A | 1948-07-27 | KEYWORTH JAMES C |
| 157 | Wide range orifice meter installation | US55273231 | 1931-07-23 | US2020432A | 1935-11-12 | PARKER WALTER H |
| 158 | 가스 공급 장치용 유량 제어기의 교정 방법 및 유량 계측 방법 | KR1020127030272 | 2011-06-28 | KR101492460B1 | 2015-02-11 | 나가세마사아키; 이케다노부카즈; 사와다요헤이; 히라이토오루; 모리사키카즈유키; 니시노코지; 도히료스케 |
| 빌드업(또는 ROR)법에 의한 유량 제어기의 유량 교정을 보다 신속하고 또한 고정밀도로 행할 수 있도록 함과 아울러 교정에 사용하는 교정 유닛의 소형화를 도모한다.
본 발명은 복수 종류의 가스를 각 유량 제어기를 통해서 스위칭 가능하게 가스 사용 개소로 공급하는 가스 공급 장치에 있어서, 가스 공급 장치의 가스 공급로(L)에 내용적(V)인 빌드업 탱크(BT)와 탱크(BT)의 입구측 개폐 밸브(V 1 ) 및 출구측 개폐 밸브(V 2 )와 탱크(BT) 내 가스의 가스 압력 검출(Pd) 및 가스 온도 검출기(Td)로 이루어지는 유량 제어기 교정 유닛(5)을 분기 형상으로 연결함과 아울러 상기 교정 유닛(5)의 출구측 개폐 밸브(V 2 )를 진공 배기 장치에 접속하고, 우선 유량 제어 장치의 각 유량 제어기의 출구측 개폐 밸브(V 01 ~V 0n ) 및 가스 사용 개소의 입구 밸브 개폐(V 0 )를 폐쇄함과 아울러 교정 유닛(5)의 출구측 개폐 밸브(V 2 ) 및 입구측 개폐 밸브(V 1 )를 개방하고, 이어서 피교정 유량 제어기의 출구측 개폐 밸브만을 개방하여 설정 유량의 가스를 교정 유닛(5)으로 유입시켜서 탱크 내 가스 압력 및 가스 온도가 안정된 시각(t 0 )에 있어서 제 1회의 탱크 내의 가스 온도(T 0 ) 및 가스 압력(P 0 )을 계측하고, 그 후 교정 유닛(5)의 출구측 개폐 밸브(V 2 )를 폐쇄하여 탱크(BT) 내로의 가스의 빌드업을 행하고, 시각(t 1 )에 있어서 입구측 개폐 밸브(V 1 )를 폐쇄함과 아울러 상기 입구측 개폐 밸브(V 1 )의 폐쇄 후의 시각(t 2 )에 있어서 제 2회의 가스 온도(T 2 ) 및 가스 압력(P 2 )을 계측하고, 각 계측값으로부터 가스 유량(Q)을 Q=(22.4V/R·Δt)×(P 2 /T 2 -P 0 /T 0 )[단, V는 탱크(BT)의 내용적, R은 가스 정수, Δt는 빌드업 시각(t 1 -t 0 )임]로 해서 연산하고, 설정 가스 유량과 연산 가스 유량(Q)의 대비에 의해 유량 교정을 행한다. |
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| 159 | 가스 공급 장치용 유량 제어기의 교정 방법 및 유량 계측 방법 | KR1020127030272 | 2011-06-28 | KR1020130031260A | 2013-03-28 | 나가세마사아키; 이케다노부카즈; 사와다요헤이; 히라이토오루; 모리사키카즈유키; 니시노코지; 도히료스케 |
| 피교정 유량 제어기의 출구측 개폐 밸브만을 개방하여 설정 유량의 가스를 교정 유닛(5)으로 유입시켜서 탱크 내 가스 압력 및 가스 온도가 안정된 시각(t
0 )에 있어서 제 1회의 탱크 내의 가스 온도(T
0 ) 및 가스 압력(P
0 )을 계측하고, 그 후 교정 유닛(5)의 출구측 개폐 밸브(V
2 )를 폐쇄하여 탱크(BT) 내로의 가스의 빌드업을 행하고, 시각(t
1 )에 있어서 입구측 개폐 밸브(V
1 )를 폐쇄함과 아울러 상기 입구측 개폐 밸브(V
1 )의 폐쇄 후의 시각(t
2 )에 있어서 제 2회의 가스 온도(T
2 ) 및 가스 압력(P
2 )을 계측하고, 각 계측값으로부터 가스 유량(Q)을 Q=(22.4V/R·Δt)×(P
2 /T
2 -P
0 /T
0 )[단, V는 탱크(BT)의 내용적, R은 가스 정수, Δt는 빌드업 시각(t
1 -t
0 )임]로 해서 연산하고, 설정 가스 유량과 연산 가스 유량(Q)의 대비에 의해 유량 교정을 행한다.
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| 160 | 압력식 유량 제어 장치를 이용한 유체의 비연속식 유량 스위칭 제어 방법 | KR1020107021851 | 2009-03-10 | KR101162546B1 | 2012-07-05 | 오미타다히로; 니시노코우지; 도히료우스케; 나가세마사아키; 스기타카츠유키; 히라타카오루; 히로세타카시; 시노하라츠토무; 이케다노부카즈; 요시다토시히데; 타나카히사시 |
| 본 발명은 압력식 유량 제어 장치의 컨트롤 밸브의 하류측과 유체 공급용 관로 사이의 유체 통로를 두개 이상의 병렬상의 유체 통로로 함과 아울러 상기 각 병렬상의 유체 통로에 유체 유량 특성이 다른 오리피스를 각기 개재시키고, 제 1 유량 영역의 유체의 유량 제어에는 한쪽의 오리피스에 상기 제 1 유량 영역의 유체를 유통시키고, 또한 제 2 유량 영역의 유체의 유량 제어에는 적어도 다른쪽의 오리피스에 상기 제 2 유량 영역의 유체를 유통시키도록 한 유량 레인지 가변형 압력식 유량 제어 장치를 이용한 유체의 유량 제어 방법에 있어서, 상기 소유량의 제 1 유량 영역의 유체의 최대 제어 유량이 상기 대유량의 제 2 유량 영역의 최대 제어 유량의 10%보다 작아지도록 상기 각 오리피스의 유량 특성을 선정하고, 소정의 유량 제어 오차 내에서 유량 제어가 가능한 제 1 유량 영역에 있어서의 최소 유량을 낮춘다.
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