| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 1 | 用于在基板上制造金属层的方法和器件 | CN201210157001.8 | 2012-05-18 | CN102789966A | 2012-11-21 | 哈利勒·哈希尼; 汉斯-约阿希姆·舒尔茨 |
| 本发明涉及用于在基板上制造金属层的方法和器件。具体地，本发明提供了一种在半导体基板上制造金属层的方法。通过沉积金属颗粒在半导体基板上制造金属层。该金属颗粒包括由第一金属材料制成的核和包围该核的壳。该壳由抗氧化的第二金属材料制成。本发明还涉及一种用于制造半导体基板中的通孔的方法以及制造半导体芯片的方法。本发明还涉及一种半导体器件，其包括包含第一电极的半导体芯片；和施加于该半导体芯片的第一电极的金属颗粒。 | ||||||
| 2 | 等离子体处理装置用的部件和部件的制造方法 | CN201510578768.1 | 2015-09-11 | CN105428195A | 2016-03-23 | 长山将之; 三桥康至; 虻川志向; 永井正也; 金泽义典; 仁矢铁也 |
| 本发明的课题在于抑制从氟化钇制的喷镀被膜产生微粒。本发明的解决方法在于提供一种在等离子体处理装置内被暴露于等离子体中的部件。该部件具有基材和被膜。基材例如为铝制或铝合金制。可以在基材的表面形成耐酸铝膜。被膜通过在包括基材或设置于该基材上的层的基底的表面上喷镀氟化钇而形成。该部件的被膜内的气孔率为4％以下，该被膜的表面的算术平均粗糙度(Ra)为4.5μm以下。 | ||||||
| 3 | 制造护罩可磨耗涂层的方法 | CN201510314679.6 | 2015-06-10 | CN105220103A | 2016-01-06 | D.M.利普金; L.S.勒布朗; J.L.马戈利斯; N.E.安托利诺 |
| 本发明涉及制造护罩可磨耗涂层的方法。且具体而言，涉及平衡高流路稠度、低叶片末梢磨损、和使用中的良好耐久性的明显矛盾需求的制造具有可磨耗涂层的涡轮护罩的方法。该方法包括获得护罩基底。该方法可包括在护罩基底上获得涂层系统。该方法包括在涂层系统的表面上形成可磨耗涂层，以便形成基本上平滑的流路表面。形成可磨耗涂层包括形成相对密实的支架和在相对密实的可磨耗支架之间的相对多孔的填充物区域。该方法还可包括加工可磨耗，以便实现基本上平滑的流路表面，该基本上平滑的流路表面包括被相对密实、高耐久性的包围相围绕的相对多孔的可磨耗相。 | ||||||
| 4 | Method for Producing a Metal Layer on a Substrate and Device | US13110653 | 2011-05-18 | US20120292773A1 | 2012-11-22 | Khalil Hosseini; Hans-Joachim Schulze |
| A method produces a metal layer on a semiconductor substrate. A metal layer is produced on the semiconductor substrate by depositing metal particles. The metal particles include cores made of a first metal material and shells surrounding the cores. The shells are made of a second metal material that is resistant to oxidation. | ||||||
| 5 | Micro-channel coating deposition system and method for using the same | US13627158 | 2012-09-26 | US08974859B2 | 2015-03-10 | Ronald Scott Bunker |
| Methods of pressure coating a target surface of an article comprising one or more grooves formed in an outer surface of an article include fluidly connecting a pressure masker comprising a pressurized masking fluid to one or more coolant supply holes on a first side of the article. The one or more coolant supply holes in fluidic communication with the one or more grooves. Passing the pressurized masking fluid through the one or more grooves from the first side to a second side comprising the target surface at a pressure less than the coating pressure of the coating material, and, coating the target surface with the coating material to allow the coating material to bridge over the one or more grooves and form one or more micro-channels. The pressurized masking fluid passing through the one or more grooves prevents the coating material from permanently altering a cross sectional area of the one or more grooves along its length. | ||||||
| 6 | MICRO-CHANNEL COATING DEPOSITION SYSTEM AND METHOD FOR USING THE SAME | US13627158 | 2012-09-26 | US20140220253A1 | 2014-08-07 | Ronald Scott Bunker |
| Methods of pressure coating a target surface of an article comprising one or more grooves formed in an outer surface of an article include fluidly connecting a pressure masker comprising a pressurized masking fluid to one or more coolant supply holes on a first side of the article. The one or more coolant supply holes in fluidic communication with the one or more grooves. Passing the pressurized masking fluid through the one or more grooves from the first side to a second side comprising the target surface at a pressure less than the coating pressure of the coating material, and, coating the target surface with the coating material to allow the coating material to bridge over the one or more grooves and form one or more micro-channels. The pressurized masking fluid passing through the one or more grooves prevents the coating material from permanently altering a cross sectional area of the one or more grooves along its length. | ||||||
| 7 | Method for producing a metal layer on a substrate and device | US13110653 | 2011-05-18 | US08912047B2 | 2014-12-16 | Khalil Hosseini; Hans-Joachim Schulze |
| A method produces a metal layer on a semiconductor substrate. A metal layer is produced on the semiconductor substrate by depositing metal particles. The metal particles include cores made of a first metal material and shells surrounding the cores. The shells are made of a second metal material that is resistant to oxidation. | ||||||
| 8 | METHODS OF MANUFACTURING A SHROUD ABRADABLE COATING | EP15171057.1 | 2015-06-08 | EP2955243A2 | 2015-12-16 | Lipkin, Don Mark; Leblanc, Luc Stephane; Margolies, Joshua Lee; Antolino, Nicholas Edward |
Methods (200,300,400,500) of manufacturing turbine shrouds (10) with an abradable coating (14) that balance the apparently contradictory requirements of high flowpath solidity, low blade tip wear, and good durability in service. The methods include obtaining a shroud substrate (12). The methods may include obtaining a coating system on the shroud substrate. The methods include forming an abradable coating (14) on a surface of the coating system so as to form a substantially smooth flowpath surface. Forming the abradable coating includes forming a relatively dense scaffold (16) and relatively porous filler regions (18) in-between the relatively dense abradable scaffold. The methods may also include machining the abradable so as to achieve a substantially smooth flowpath surface comprising a relatively porous abradable phase surrounded by a relatively dense, high-durability corrale phase.
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| 9 | METHODS OF MANUFACTURING A SHROUD ABRADABLE COATING | EP15171057.1 | 2015-06-08 | EP2955243A3 | 2016-01-06 | Lipkin, Don Mark; Leblanc, Luc Stephane; Margolies, Joshua Lee; Antolino, Nicholas Edward |
Methods (200,300,400,500) of manufacturing turbine shrouds (10) with an abradable coating (14) that balance the apparently contradictory requirements of high flowpath solidity, low blade tip wear, and good durability in service. The methods include obtaining a shroud substrate (12). The methods may include obtaining a coating system on the shroud substrate. The methods include forming an abradable coating (14) on a surface of the coating system so as to form a substantially smooth flowpath surface. Forming the abradable coating includes forming a relatively dense scaffold (16) and relatively porous filler regions (18) in-between the relatively dense abradable scaffold. The methods may also include machining the abradable so as to achieve a substantially smooth flowpath surface comprising a relatively porous abradable phase surrounded by a relatively dense, high-durability corrale phase.
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| 10 | プラズマ処理装置用の部品、及び部品の製造方法 | JP2015129940 | 2015-06-29 | JP2016065302A | 2016-04-28 | 長山 将之; 三橋 康至; 虻川 志向; 永井 正也; 金澤 義典; 仁矢 鉄也 |
| 【課題】フッ化イットリウム製の溶射皮膜からのパーティクルの発生を抑制する。 【解決手段】 プラズマ処理装置内においてプラズマに晒される部品が提供される。この部品は、基材、及び皮膜を有している。基材は、例えば、アルミニウム製、又は、アルミニウム合金製である。基材の表面にはアルマイト膜が形成されていてもよい。皮膜は、基材又は該基材上に設けられた層を含む下地の表面上にフッ化イットリウムの溶射によって形成されている。この部品の皮膜内の気孔率は4%以下であり、当該皮膜の表面の算術平均粗さ(Ra)は4.5μm以下である。 【選択図】図2 |
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| 11 | Micro channel coating deposition system and method of application of the same | JP2013196385 | 2013-09-24 | JP2014111933A | 2014-06-19 | BUNKER RONALD SCOTT |
| PROBLEM TO BE SOLVED: To perform pressure coating on a target surface, of an article, formed on an outer surface of the article and includes one or more grooves.SOLUTION: A pressure masker including a pressurized masking fluid is connected to one or more coolant supply holes at a first side of an article in a fluid-like manner. The coolant supply hole is fluid-communicated with a groove. The pressurized masking fluid is supplied from the first side through the groove to a second side including a target surface with pressure lower than coating pressure of a coating material, the target surface is coated with the coating material, and the groove is bridged by the coating material, thereby forming a micro channel. Since the pressurized masking fluid passes through the groove, the coating material is prevented from permanently changing a sectional area of the groove along the length thereof. | ||||||
| 12 | マイクロ・チャネル・コーティング堆積システムおよびその使用方法 | JP2013196385 | 2013-09-24 | JP6200740B2 | 2017-09-20 | ロナルド・スコット・バンカー |
| 13 | シュラウドアブレイダブル皮膜の製造方法 | JP2015114388 | 2015-06-05 | JP2016006321A | 2016-01-14 | ドン・マーク・リプキン; リュック・ステファン・ルブラン; ジョシュア・リー・マーゴリーズ; ニコラス・エドワード・アントリーノ |
| 【課題】高い流路中実度、低いブレード先端摩損及び供用時の高い耐久性という相反する要件についてバランスのとれたアブレイダブル皮膜を有するタービンシュラウド提供する。 【解決手段】シュラウド基材上の皮膜系を得ることを含み、実質的に平滑な流路表面を形成するように皮膜系の表面上にアブレイダブル皮膜を形成することを含む。アブレイダブル皮膜を形成するステップは、相対的に緻密な骨格と、相対的に緻密なアブレイダブル骨格間の相対的に多孔質の充填材領域とを形成することを含む。相対的に緻密な耐久性囲繞相で囲まれた相対的に多孔質のアブレイダブル相を含む実質的に平滑な流路表面が得られるようにアブレイダブル皮膜を機械加工することも含む。 【選択図】図3 |
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