专利汇可以提供Thin film solar battery专利检索,专利查询,专利分析的服务。并且PURPOSE:To improve the yield rate and performance of the a-Si solar battery, by providing a very thin insulating film on a transparent conductive film, thereby preventing the diffusion of a constituent element of the transparent conductive film into the a-Si. CONSTITUTION:Light is irradiated from the direction of an arrow B. A glass substrate 21 is washed by acetone, alcohol, and pure water by using ultrasonic waves. Thereafter SiO, SiO2, or Si3N4 is evaporated to the thickness of 50- 200Angstrom by an electron beam evaporating machine. The optimum film thicknesses are different depending on materials. As for SiO, the thickness is 80Angstrom , and as for SiO2 and Si3N4, it is 110Angstrom . The characteristics of the solar battery are not largely different even though two or three layers are used in addition to only one material. An a-Si layer 24 and a metal electrode 25 are provided on said transparent insulating film 23 by the conventional method, and the solar battery is completed.,下面是Thin film solar battery专利的具体信息内容。
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