Heat treating apparatus
专利汇可以提供Heat treating apparatus专利检索，专利查询，专利分析的服务。并且PURPOSE: To detect the temperature of a filmlike heat generator and to accurately control the temperature by measuring the thermal electromotive force of a heat generating plate.
CONSTITUTION: A heat generating plate 1 is formed in a square-shaped flat plate state of heat conductor having electric insulation made of ceramics such as alumina or the like. One side face of the plate 1 is covered wholly with a thin conductive film 2 of chromum or the like by depositing to be integrated. Electrodes A3, B4 made of copper for generating thermal electromotive force are provided in combination with chromum on the opposite sides of the film 2, and wired to a power source 5. Before a semiconductor wafer 16 is placed on the plate 1, the film 2 is so electrified beforehand by the power source 5 through the electrodes A3, B4 that the temperature of the plate 1 becomes desired heat treating temperature thereby to heat plate 1. Thus, thermal electromotive force is generated between the film 2 and the electrodes A3, B4 by thermoelectric effect. This force is fed back to the power source 5 through a linearizer 14 to accurately control the temperature.
COPYRIGHT: (C)1990,JPO&Japio，下面是Heat treating apparatus专利的具体信息内容。
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6 热电元件
