Piezoelectric type acceleration sensor device
专利汇可以提供Piezoelectric type acceleration sensor device专利检索，专利查询，专利分析的服务。并且PURPOSE: To realize a small-sized sensor with good temperature characteristics by forming a detection part by sandwiching a filmy piezoelectric body between support plates and fixing the sensor only at the periphery of a pedestal so that the sensor is floated in a hollow package.
CONSTITUTION: The filmy piezoelectric body 25 is sandwiched between the support plates 26 to form the detection part 13, which is fixed on the measurement surface 24 of the pedestal 12; and a load body 14 which operates as an inertial mass part is fixed on the detection part 13 to constitute the sensor 11. Then a processing circuit board 18 is fitted on the opposite side from the measurement surface 24, only the peripheral part of the pedestal 12 is fixed to the fitting part 16 of the hollow package 15, and the fitting part 17 is fixed to a body to be measured while floated in the package 15. Consequently, the board 18 where an impedance exchanging circuit is mounted outputs a voltage without picking up an external noise while put in the package 15, the sensor device is reduced in size on the whole, and a little heat enters and exits from the device owing to external temperature variation; and an output by the pyroelectric effect of the piezoelectric body 25 is eliminated to obtain the excellent temperature characteristics.
COPYRIGHT: (C)1991,JPO&Japio，下面是Piezoelectric type acceleration sensor device专利的具体信息内容。
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6 热电元件
