Apparatus for vacuum coating
阅读：919发布：2023-02-16
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1. APPARATUS FOR APPLYING A COATING ON A SUBSTRATE THAT EVOLVES OCCLUDED GASES WHEN EXPOSED TO A VACUUM COMPRISING, A FIRST CHAMBER ADAPTED TO BE MAINTAINED AT A PRESSURE BETWEEN ABOUT 50 AND 500 MICRONS OF MERCURY ABSOLUTE AND A SECOND CHAMBER ADAPTED TO BE MAINTAINED AT LESS THAN ABOUT 1 MICRON OF MERCURY ABOSOLUTE, A WALL SEPARATING SAID FIRST AND SAID SECOND CHAMBERS FORMED TO DEFINE AN APERTURE THERETHROUGH PROVIDING COMMUNICATION BETWEEN SAID FIRST AND SECOND CHAMBERS, A SOURCE OF SUBSTRATE MATERIAL IN SAID FIRST CHAMBER, MEANS FOR PASSING SAID SUBSTRATE MATERIAL ACROSS SAID APERTURE, MEANS IN SAID SECOND CHAMBER FOR VAPORIZING AN EVAPORANT MATERIAL WHICH IS DEPOSITED UPON THE SUBSTRATE WHICH IS EXPOSED TO THE SECOND CHAMBER THROUGH SAID APERTURE, AND SEALING MEANS FOR MAINTAINING SAID SUBSTRATE IN SEALING RELATION TO THE LONGITUDINAL EDGE PORTIONS OF THE APERTURE INCLUDING PARALLEL SPACED GUIDE MEMBERS FORMING AN EXTENSION OF SAID WALL EXTENDING INTO SAID FIRST CHAMBER AND DISPOSED ADJACENT SAID LONGITUDINAL EDGE PORTIONS, SAID GUIDE MEMBERS HAVING SEALING SURFACES EXTENDING AWAY FROM SAID WALL AND INWARDLY OF THE APERTURE FOR ENGAGEMENT WITH THE SUBSTRATE MATERIAL, THEREBY MINIMIZING THE GAS LEAKAGE BETWEENSAID FIRST AND SECOND CHAMBERS.
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