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Additives to negative photoresists which increase the sensitivity thereof

阅读:108发布:2023-04-10

专利汇可以提供Additives to negative photoresists which increase the sensitivity thereof专利检索,专利查询,专利分析的服务。并且The use of a scanning electron beam to generate a pattern in a negative photoresist is known. Electron beam equipment can be made which is capable of scanning very quickly, but a standard negative photoresist such as partially cyclized cis-polyisoprene requires such a large flux of electrons for proper exposure that the scanning equipment must be operated at speeds substantially slower than the capability of the equipment. By adding 1,4diphenyl-1,3-butadiene which dissociates readily into free radicals to the photoresist, the sensitivity or speed of the photoresist is effectively increased. As a result, the electron beam can scan at a higher rate.,下面是Additives to negative photoresists which increase the sensitivity thereof专利的具体信息内容。

1. A PROCESS FOR GENERATING A PATTERN ON A SUBSTRATE COMPRISING: COATING SAID SUBSTRATE WITH A UNIFORM THIN FILM OF A COMPOSITION COMPRISING (A) A PARTIALLY CYCLIZED CIS-POLISOPRENE AND A SOLVENT THEREFOR, AND (B) 1,4-DIPHENYL-1,3-BUTADIENE, PRESENT IN AN AMOUNT RANGING FROM 0.1 TO 5% OF SAID PARTIALLY CYCLIZED CIS-POLYISOPRENE AND SOLVENT, EXPOSING AREAS OF SAID SUBSTRATE DESIRED TO BE PROTECTED TO SUFFICIENT ELECTRON BEAM RADIATION TO CROSSLINK AND INSOLUBILIZE THE THIN FILM ON SAID AREAS, DISSOLVING AND REMOVING THE AREAS OF SAID THIN FILM NOT RADIATED, AND ETCHING, PLATING OR OXIDIZING THE NOW-EXPOSED PORTIONS OF SAID SUBSTRATE.
2. The process as claimed in claim 1, wherein said 1,4-diphenyl-1,3-butadiene and said partially cyclized cis-polyisoprene are initially dissolved in said solvent, spread on said substrate and dried to drive off said solvent.
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