专利汇可以提供Pattern generator apparatus专利检索,专利查询,专利分析的服务。并且Pattern generator apparatus is disclosed, comprising a printing light source, a predetermined pattern, an optical lens system including a zoom lens and a reduction lens, and a sensitive surface. The magnification of the optical lens system is made variable and the pattern is formed on the sensitive surface while being reduced. This apparatus also provides a focal position detecting device comprising first and second half mirrors which are disposed between the zoom lens and the reducing lens of the optical lens system. In operation, a focusing pattern projected from a light source is reflected and refracted by the first half mirror to be focused into an image on the sensitive surface, and the reflected light from the sensitive surface is reflected and refracted by the second half mirror to be condensed onto a measuring element. The focal position detecting device further includes a printing light source which is lighted when the projected pattern is brought in focus. The optical reducing lens exposure system and an electron beam exposure system are used in combination to provide for enhanced resolution and shortened time of exposure.,下面是Pattern generator apparatus专利的具体信息内容。
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