Exposure control apparatus for an electron microscope专利检索-电子束曝光微电子学专利检索查询-专利查询网

Exposure control apparatus for an electron microscope

阅读：271发布：2023-04-23

专利汇可以提供Exposure control apparatus for an electron microscope专利检索，专利查询，专利分析的服务。并且Apparatus for indicating and/or controlling the exposure time of photographic material exposed to the electron beam of an electron microscope includes an electron impermeable, insulated conductive screen which may be positioned to intercept a part at least of the electron beam. The current flowing to the screen may be measured to indicate required exposure time. Alternatively the voltage across a resistor in the current path may be stored and integrated to yield a signal for indicating that exposure should be terminated. The signal may be used to produce termination of exposure.，下面是Exposure control apparatus for an electron microscope专利的具体信息内容。

权利要求

1. Exposure indicating apparatus for an electron microscope photographically recording the image and measuring the level of energy received by the photosensitive plate to determine the optimum time of exposure of the plate comprising a metallic screen insulated from earth and pivotally mounted around an axis between a position intercepting the entire electron beam in the image plane and closing the photographic chamber and an inoperative position passing the entire electron beam, a resistance connected to said screen and measuring means connected across said resistance measuring the current received by said screen and flowing through said resistance, the electrical connection between said screen and said resistance being a long conductor wire under tension disposed in the pivotal axis of said screen.

2. Apparatus in accordance with claim 1 wherein said responsive means includes an amplifier with a high input impedance, to the input of which said potential is applied, means for storing the amplifier output signal and for applying the stored signal to a voltage/time converter, and wherein a device for bringing the screen into its inoperative position simultaneously initiates the exposure of the sensitized plate and operates the operation of the voltage/time converter, and means responsive to the output signal of the voltage/time converter for causing the exposure of the sensitized plate to be terminated.

3. Apparatus in accordance with claim 2, wherein the voltage/time converter comprises an integrator for integrating the output signal of the amplifier with respect to time, a voltage comparator arranged to compare the integrator output and with a fixed and adjustable voltage, and indicating or control means arranged to be actuated by the output signal from the voltage comparator.

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Exposure control apparatus for an electron microscope

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