METHOD OF FABRICATING DEVICES INCORPORATING MICROELECTROMECHANICAL SYSTEMS USING AT LEAST ONE UV CURABLE TAPE
专利汇可以提供METHOD OF FABRICATING DEVICES INCORPORATING MICROELECTROMECHANICAL SYSTEMS USING AT LEAST ONE UV CURABLE TAPE专利检索，专利查询，专利分析的服务。并且A method of fabricating devices incorporating microelectromechanical systems (MEMS) using a UV curable tape includes providing a substrate (14) with a MEMS layer (18) arranged on one side (12) of the substrate (14). A further layer (10) is applied to the side (12) of the substrate (14). At least one operation is performed on the substrate (14) from a side (22) of the substrate (14) opposed to the side (12) having the MEMS layer (18). A holding tape (38) is applied to the side (22) of the substrate. At least one operation is then performed on the further layer (10) to define individual chips (20). Each chip (20) is composed of a part of the substrate (24), at least one part of the MEMS layer (18) and a part of the further layer (10). Individual chips (20) are then able to be released from the tape (38) by exposing the tape (38) to UV light.，下面是METHOD OF FABRICATING DEVICES INCORPORATING MICROELECTROMECHANICAL SYSTEMS USING AT LEAST ONE UV CURABLE TAPE专利的具体信息内容。
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