专利汇可以提供MULTI-DIMENSIONAL SCALABLE DISPLACEMENT ENABLED MICROELECTROMECHANICAL ACTUATOR STRUCTURES AND ARRAYS专利检索,专利查询,专利分析的服务。并且Microelectromechanical system (MEMS) structures and arrays that provide movement in one, two, and/or three dimensions in response to selective thermal actuation. Significant amounts of scalable displacement are provided. In one embodiment, pairs of thermal arched beams are operably interconnected and thermally actuated to create structures and arrays capable of moving in a plane parallel to the underlying substrate in one and/or two dimensions. One embodiment provides an arched beam operably connected to a crossbeam such that the medial portion arches and alters its separation from the crossbeam when thermally actuated. In another embodiment, at least one thermal arched beam is arched in a nonparallel direction with respect to the plane defined by the underlying substrate. In response to thermal actuation, the medial portion of the arched beam is arched to a greater degree than the end portions of the thermal arched beam, thereby altering the separation of the medial portion from the underlying substrate. One embodiment combines first and second thermal arched beams having medial portions arched in opposed nonparallel directions with respect to the plane defined by the underlying substrate by even greater amounts. In response to thermal actuation, the medial portions thereof arch in opposite nonparallel directions with respect to the underlying substrate, thereby altering the separation of the medial portions from the underlying substrate. Hybrid thermally actuated structures are provided that combine arrays capable of moving in-plane and out of plane, such that motion in all three dimensions may be achieved in response to selective thermal actuation.,下面是MULTI-DIMENSIONAL SCALABLE DISPLACEMENT ENABLED MICROELECTROMECHANICAL ACTUATOR STRUCTURES AND ARRAYS专利的具体信息内容。
标题 | 发布/更新时间 | 阅读量 |
---|---|---|
利用MEMS扫描和反射光的眼睛跟踪 | 2020-05-08 | 446 |
一种多烷基环戊烷润滑油组合物及其制备方法和应用 | 2020-05-08 | 618 |
用于全息重建的显示设备 | 2020-05-08 | 887 |
微机电系统传感器的气体检测方法、传感器及存储介质 | 2020-05-11 | 476 |
激光收发扫描器和共轴收发成像装置 | 2020-05-11 | 36 |
一种新型防射频干扰的微机电系统麦克风 | 2020-05-08 | 968 |
多层芯片基板及封装方法、多功能芯片封装方法及晶圆 | 2020-05-11 | 815 |
微机电系统惯性测量单元自动校准系统及其校准验证方法 | 2020-05-11 | 529 |
一种光刻处理方法 | 2020-05-08 | 704 |
空气过滤防护器 | 2020-05-11 | 844 |
高效检索全球专利专利汇是专利免费检索,专利查询,专利分析-国家发明专利查询检索分析平台,是提供专利分析,专利查询,专利检索等数据服务功能的知识产权数据服务商。
我们的产品包含105个国家的1.26亿组数据,免费查、免费专利分析。
专利汇分析报告产品可以对行业情报数据进行梳理分析,涉及维度包括行业专利基本状况分析、地域分析、技术分析、发明人分析、申请人分析、专利权人分析、失效分析、核心专利分析、法律分析、研发重点分析、企业专利处境分析、技术处境分析、专利寿命分析、企业定位分析、引证分析等超过60个分析角度,系统通过AI智能系统对图表进行解读,只需1分钟,一键生成行业专利分析报告。