专利汇可以提供Machine for cleaning semiconductive wafers专利检索,专利查询,专利分析的服务。并且An automatic production machine useful in the fabrication of integrated circuits for coating semiconductive wafers and microelectric substrates with photosensitive films. The machine is provided with a multi-deck spinner including a motor-driven turntable having a vertical stack of vacuum chucks mounted thereabove. The chucks are supported one above the other and are cantilevered from two parallel pipes extending upwardly from the rim of the turntable. Each chuck serves as a deck for supporting a wafer to be coated by centrifugal action. One pipe functions as a vacuum line manifold communicating with a pattern of grooves formed on the upper face of each chuck to hold the wafer thereto. The other pipe functions as a treatment line manifold to supply gas or a cleaning solvent to a port on the undersurface of each chuck, whereby the gas or solvent is dispensed onto the exposed surface of the wafer on the chuck therebelow.,下面是Machine for cleaning semiconductive wafers专利的具体信息内容。
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