Electrical conductor having a high resistance to electromigration专利检索-迁移性农用化学品和农药专利检索查询-专利查询网

Electrical conductor having a high resistance to electromigration

阅读：177发布：2021-12-19

专利汇可以提供Electrical conductor having a high resistance to electromigration专利检索，专利查询，专利分析的服务。并且This disclosure is directed to an improved semiconductor device, electrical conductor, thin film conductor, and fabrication methods therefor. An aluminum-aluminum oxide alloy conductor is disclosed which has a high resistance to electromigration and hence, a conductor lifetime greater by at least a factor of 10 than unalloyed aluminum conductors. Semiconductor devices utilizing this aluminum alloy in the thin film conductive stripes interconnecting different conductivity regions or devices located in the semiconductor substrate are significantly improved and more reliable.，下面是Electrical conductor having a high resistance to electromigration专利的具体信息内容。

权利要求

1. AN ELECTRICAL CONDUCTOR COMPRISING AN ALUMINUM ALLOY HAVING A HIGH RESISTANCE TO ELECTROMIGRATION, SAID ALUMINUM ALLOY BEING COMPOSED OF ALUMINUM AND ALUMINUM OXIDE, SAID ALUMINUM OXIDE IS IN THE RANGE FROM ABOUT 0.01 PERCENT TO ABOUT 5 PERCENT OF SAID ALUMINUM ALLOY.

2. An electron current carrying thin film conductive stripe comprising an aluminum alloy layer having a high resistance to electromigration, said aluminum alloy layer being composed of aluminum and aluminum oxide, said aluminum oxide is in the range of from about 0.01 percent to about 17 percent of said aluminum alloy, said stripe having a thickness in the range of from about several hundred Angstroms to about 20,000 Angstroms.

3. A thin film conductive stripe in accordance with claim 2 wherein said aluminum oxide is in the range of from about 0.5 percent to about 14 percent of said aluminum alloy.

4. A thin film conductive stripe in accordance with claim 3 wherein said aluminum oxide is in the range from about 6 to about 8 percent of said aluminum alloy.

5. A thin film conductive stripe in accordance with claim 2 wherein said stripe having a width in the range of from about 0.1 mils to about 2 mils.

6. A thin film conductive stripe in accordance with claim 5 wherein said stripe having a width in the range of from about 0.2 mils to about 0.4 mils.

7. A thin film conductive stripe in accordance with claim 2 wherein said stripe having a thickness in the range of from about 5,000 Angstroms to about 15,000 Angstroms.

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