BLOCK COPOLYMER |
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申请号 | US15514967 | 申请日 | 2015-09-30 | 公开(公告)号 | US20170226260A1 | 公开(公告)日 | 2017-08-10 |
申请人 | LG Chem, Ltd.; | 发明人 | Mi Sook Lee; Jung Keun Kim; Se Jin Ku; No Jin Park; Je Gwon Lee; Eun Young Choi; Sung Soo Yoon; Hyung Ju Ryu; | ||||
摘要 | The present application provides a block copolymer and uses thereof. The block copolymer of the present application exhibits an excellent self-assembling property or phase separation property, can be provided with a variety of required functions without constraint and, especially, etching selectivity can be secured, making the block copolymer effectively applicable to such uses as pattern formation. | ||||||
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说明书全文 |