DEVICE AND METHOD FOR CONTROLLING TEMPERATURE OF LOW-TEMPERATURE PUMP |
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| 申请号 | US15746526 | 申请日 | 2016-04-14 | 公开(公告)号 | US20180216610A1 | 公开(公告)日 | 2018-08-02 |
| 申请人 | Korea Aerospace Research Institute; | 发明人 | Hyok Jin CHO; Hee Jun SEO; Sung Wook PARK; Guee Won MOON; | ||||
| 摘要 | Provided is a cryopump enabling the maintaining of a preset temperature during a preset time, even when turned off. The cryopump may comprise: a displacer which adjusts outside temperature by compressing or expanding a refrigerant existing therein; a thermal conduction part which transfers heat outside the cryopump to the refrigerant; and a thermal conduction buffer part which, if the displacer is turned off, absorbs the heat outside that is transferred to the refrigerant, and uses same as energy for changing a phase. | ||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
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