| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 1 | 垂直机电存储器件及其制造方法 | CN200710139012.2 | 2007-07-20 | CN101123256A | 2008-02-13 | 尹恩贞; 李成泳; 金旻相; 金成玟 |
| 本发明提供了一种存储器件及形成存储器件的方法，该器件包括：基底；第一电极，在相对于基底的垂直方向上延伸；第二电极，在相对于基底的垂直方向上延伸，第二电极通过电极间隙与第一电极分隔开。第三电极设置成在电极间隙中沿着垂直方向延伸，第三电极通过第一间隙与第一电极分隔开，第三电极通过第二间隙与第二电极分隔开，第三电极可弹性地变形，使得第三电极偏斜以穿过第一间隙在第一弯曲位置与第一电极电连接，穿过第二间隙在第二弯曲位置与第二电极电连接，并在静止位置与第一电极和第二电极隔离。 | ||||||
| 2 | 基于微机电系统装置的薄膜致动器及其方法 | CN200480032949.4 | 2004-09-09 | CN1910109A | 2007-02-07 | 乔基姆·奥伯哈默; 戈兰·施泰姆 |
| 本发明公开了一种微机电系统(MEMS)装置，其适合于从DC应用(如切换电信号线)到RF应用(如可调电容器和开关)的应用范围。在本发明的一个实施例中，该装置包括以固定距离彼此隔开的底部基板和顶部基板。设置在基板之间的是柔性S形薄膜，该薄膜具有一电极或可导电的电极层，其一端与顶部基板连接，另一端与底部基板接触。一导电触点单元与薄膜致动器的底面连接，用于在开关处于闭合位置时使信号短路。当将电压施加到薄膜和底部基板上的电极层之间时，薄膜因静电力而以起伏的波状运动偏斜，使得触点单元移动到与信号线接触。当将电压施加到薄膜致动器和顶部基板上的电极层之间时可以主动地打开该装置，从而使触点单元向上移动而不与信号线接触。该MEMS切换装置可以应用于开关矩阵板，以自动地切换电话线或应用于可调电容器型式的RF应用。 | ||||||
| 3 | 一种基于体硅材料的外力驱动MEMS开关及其制作方法 | CN201510453804.1 | 2015-07-29 | CN104992879A | 2015-10-21 | 韩磊; 高晓峰 |
| 本发明提供了一种基于体硅材料的外力驱动MEMS开关及其制作方法，该外力驱动MEMS开关包括衬底（5）、设置在衬底上的微带线的信号线（1）、设置在衬底下的微带线的地（2）、开关动端（3）、开关静端（4）；当该外力驱动MEMS开关处于不工作状态时，开关动端（3）与开关静端（4）接触，整个微带传输线呈现导通状态，此时微波信号可以几乎不产生损耗地通过该外力驱动MEMS开关；当该外力驱动MEMS开关处于工作状态时，开关动端（3）通过探针的外力作用被压下而与开关静端（4）不接触，此时微波信号的通路被切断，同时微波信号可以从探针处被引出用于信号测量。同时，我们设计出了用于制造这种基于体硅材料的外力驱动MEMS开关的具体工艺。 | ||||||
| 4 | Micro-electromechanical device and module and method of manufacturing same | US10561854 | 2004-06-23 | US08018307B2 | 2011-09-13 | Jozef Thomas Martinus Van Beek; Peter Gerard Steeneken |
| The MEMS element of the invention has a first, a second and an intermediate third electrode. It is given an increased dynamic range in that the switchable capacitor constituted by the second and the third electrode is provided in the signal path between input and output, and that the switchable capacitor constituted by the first and third electrode is provided between the signal path and ground. The MEMS element of the invention is very suitable for integration in a network of passive components. | ||||||
| 5 | Latching zip-mode actuated mono wafer MEMS switch method | US12152130 | 2008-05-08 | US07977137B1 | 2011-07-12 | John L. Ebel; Rebecca Cortez; Kevin D. Leedy; Richard E. Strawser |
| A process for making a latching zip-mode actuated mono wafer MEMS switch especially suited to capacitance coupled signal switching of microwave radio frequency signals is disclosed. The single wafer fabrication process used for the switch employs sacrificial layers and liquid removal of these layers in order to also provide needed permanent physical protection for an ultra fragile switch moving arm member. Latched operation of the achieved MEMS switch without use of conventional holding electrodes or magnetic fields is also achieved. Fabrication of a single MEMS switch is disclosed however large or small arrays may be achieved. A liquid removal based fabrication process is disclosed. | ||||||
| 6 | FILM ACTUATOR BASED MEMS DEVICE AND METHOD | EP04769980.6 | 2004-09-09 | EP1663849A1 | 2006-06-07 | Oberhammer, Joachim; Stemme, G Ran |
| The present invention discloses a Micro-Electro-Mechanical systems (MEMS) device suitable for use in a range of applications from DC, such as switching electrical signal lines, to RF applications such as tunable capacitors and switches. In an embodiment of the invention, the device comprises a bottom substrate and a top substrate separated at a fixed distance from each other. Disposed between the substrates is a flexible S-shaped membrane having an electrode or an electrically conducting electrode layer with one end attached to the top substrate and the other end in contact with the bottom substrate. An electrically conducting contact block is attached to the underside of the membrane actuator for short circuiting a signal line when the switch is in the closed position. When a voltage is applied between the membrane and an electrode layer on the bottom substrate, the membrane is induced by electrostatic force to deflect in a rolling wave-like motion such that the contact block is displaced into contact with the signal line. The device can be actively opened when a voltage is applied between the membrane actuator and a electrode layer on the top substrate causing the contact block to displace upward breaking contact with the signal line. The MEMS switching device is applicable for use in a switch matrix board for automatically switching telephone lines or in RF applications in the form of a tunable capacitor. | ||||||
| 7 | MICRO-ELECTROMECHANICAL DEVICE AND MODULE AND METHOD OF MANUFACTURING SAME | EP04737143.0 | 2004-06-23 | EP1642311A2 | 2006-04-05 | VAN BEEK, Jozef, T., M.; STEENEKEN, Peter, G. |
| The MEMS element of the invention has a first, a second and an intermediate third electrode. It is given an increased dynamic range in that the switchable capacitor constituted by the second and the third electrode is provided in the signal path between input and output, and that the switchable capacitor constituted by the first and third electrode is provided between the signal path and ground. The MEMS element of the invention is very suitable for integration in a network of passive components. | ||||||
| 8 | Non-tensioned carbon nanotube switch design and process for making same | US11142725 | 2005-05-31 | US07928521B1 | 2011-04-19 | Peter A. Burke; Thomas Rueckes; Claude L. Bertin |
| The invention comprises a carbon nanotube switch suitable for use in an integrated circuit structure and capable of being moved from a first position in a first plane in the switch to a second position in a second plane in the switch using approximately the same energy as required to move the switch from the second position back to the first position. The switch comprises a flexible carbon nanotube strip secured clamped at one end in a first plane in a switching chamber, and secured or clamped, at the opposite end of the carbon nanotube, in a second plane in the switching chamber, which is parallel to the first plane but spaced therefrom, to permit the central portion of the carbon nanotube strip to move in the chamber between a first position in the first plane and in electrical contact with one or more first electrodes and a second position in the second plane and in electrical contact with one or more second electrodes. | ||||||
| 9 | Vertical electromechanical memory devices and methods of manufacturing the same | US11788011 | 2007-04-18 | US20080035928A1 | 2008-02-14 | Eunjung Yun; Sung-Young Lee; Min-sang Kim; Sungmin Kim |
| In a memory device and a method of forming a memory device, the device comprises a substrate, a first electrode extending in a vertical direction relative to the substrate, and a second electrode extending in a vertical direction relative to the substrate, the second electrode being spaced apart from the first electrode by a vertical gap. A third electrode is provided that extends in a vertical direction in the electrode gap, the third electrode being spaced apart from the first electrode by a first gap and the third electrode being spaced apart from the second electrode by a second gap, the third electrode being elastically deformable such that the third electrode deflects to be electrically coupled with the first electrode through the first gap in a first bent position and to be electrically coupled with the second electrode through the second gap in a second bent position, and to be isolated from the first electrode and the second electrode in a rest position. | ||||||
| 10 | Electrostatically actuated microswitch | US09876409 | 2001-06-07 | US20020190267A1 | 2002-12-19 | Janet K. Robertson |
| The present invention is directed to a micro electromechanical system (MEMS) relay having a movable actuator member part that moves laterally in a wafer surface recess into contact with a power terminal. In a preferred embodiment, the movable actuator member is a planar single body comprised of two flat intersecting flexible nullSnull shaped portions when seen in plan view. A power terminal makes contact with the middle part of one nullSnull, where it intersects with the other nullSnull. A pair of electrostatic electrodes are located at each end of the one nullSnull, to respectively move the middle part of that nullSnull into and away from contact with a power terminal in the recess. The other nullSnull serves as a flexible connection to the middle part of the other nullSnull. Means are provided to electrically isolate the ends of the first nullS from its middle part. | ||||||
| 11 | ELECTROSTATIC ACTUATOR | EP05804329.0 | 2005-11-28 | EP1955342B1 | 2011-03-23 | KOTILAINEN, Sami; FABIAN, Jan-Henning; STRÜMPLER, Ralf |
| An actuator comprising a movable electrode (10) and a static electrode (40). This actuator is actuateable using an electrical potential difference that is applied between the movable electrode (10) and the static electrode (40). The actuator comprises static bridge contacts (20, 30) with conductive surfaces (21, 31), and a contact area (15) with a conductive surface (16) facing said bridge contacts (20, 30) located on the movable electrode (10). Wherein an electrically conductive contact is established between the bridge contacts (20, 30), when the movable electrode (10) contacts the static electrode (40). The movable electrode (10, 11, 12, 13) comprises at least two elements (11, 12, 13), a first element (11) and a second element (12). The second element (12) is movable with respect to the first element (11). | ||||||
| 12 | ELECTROSTATIC ACTUATOR | EP05804329.0 | 2005-11-28 | EP1955342A1 | 2008-08-13 | KOTILAINEN, Sami; JAN-HENNING, Fabian; STRÜMPLER, Ralf |
| An actuator comprising a movable electrode (10) and a static electrode (40). This actuator is actuateable using an electrical potential difference that is applied between the movable electrode (10) and the static electrode (40). The actuator comprises static bridge contacts (20, 30) with conductive surfaces (21, 31), and a contact area (15) with a conductive surface (16) facing said bridge contacts (20, 30) located on the movable electrode (10). Wherein an electrically conductive contact is established between the bridge contacts (20, 30), when the movable electrode (10) contacts the static electrode (40). The movable electrode (10, 11, 12, 13) comprises at least two elements (11, 12, 13), a first element (11) and a second element (12). The second element (12) is movable with respect to the first element (11). | ||||||
| 13 | Electrical device having movable electrode | US14220356 | 2014-03-20 | US08901709B2 | 2014-12-02 | Takeaki Shimanouchi; Osamu Toyoda; Satoshi Ueda |
| A movable electric device includes: a first and second fixed electrodes formed on a support substrate, and having opposing electrode surfaces which are substantially perpendicular to the surface of the support substrate, and define a cavity therebetween; a movable member having a movable electrode having a first end disposed near the first fixed electrode and a second end disposed near the second fixed electrode, and bent spring member continuing from at least one of the first and second ends of the movable electrode, and including part which is bent in thickness direction of the movable electrode; and first and second anchors disposed on the support substrate and supporting the movable member at its opposite ends. | ||||||
| 14 | ELECTRICAL DEVICE HAVING MOVABLE ELECTRODE | US14220356 | 2014-03-20 | US20140203403A1 | 2014-07-24 | Takeaki Shimanouchi; Osamu Toyoda; Satoshi Ueda |
| A movable electric device includes: a first and second fixed electrodes formed on a support substrate, and having opposing electrode surfaces which are substantially perpendicular to the surface of the support substrate, and define a cavity therebetween; a movable member having a movable electrode having a first end disposed near the first fixed electrode and a second end disposed near the second fixed electrode, and bent spring member continuing from at least one of the first and second ends of the movable electrode, and including part which is bent in thickness direction of the movable electrode; and first and second anchors disposed on the support substrate and supporting the movable member at its opposite ends. | ||||||
| 15 | Latching zip-mode actuated mono wafer MEMS switch | US12152129 | 2008-05-08 | US07960804B1 | 2011-06-14 | John L. Ebel; Rebecca Cortez; Kevin D. Leedy; Richard E. Strawser |
| A latching zip-mode actuated mono wafer MEMS switch especially suited to capacitance coupled signal switching of microwave radio frequency signals is disclosed. The single wafer fabrication process used for the switch employs sacrificial layers and liquid removal of these layers in order to also provide needed permanent physical protection for an ultra fragile switch moving arm member. Latched operation of the achieved MEMS switch without use of conventional holding electrodes or magnetic fields is also achieved. Fabrication of a single MEMS switch is disclosed however large or small arrays may be achieved. | ||||||
| 16 | ELECTROSTATIC ACTUATOR | US12128150 | 2008-05-28 | US20080223700A1 | 2008-09-18 | Sami Kotilainen; Jan-Henning Fabian; Ralf Struempler |
| An actuator comprising a movable electrode and a static electrode is disclosed. An exemplary actuator is actuateable using an electrical potential difference that is applied between the movable electrode and the static electrode. The actuator comprises static bridge contacts with conductive surfaces, and a contact area with a conductive surface facing said bridge contacts located on the movable electrode. An electrically conductive contact is established between the bridge contacts, when the movable electrode contacts the static electrode. The movable electrode comprises at least two elements, a first element and a second element. The second element is movable with respect to the first element. | ||||||
| 17 | Apparatus comprising an array of switches and display | US11485539 | 2006-07-11 | US20070046214A1 | 2007-03-01 | Nicholas Pasch |
| A class of electromechanical switch cell is disclosed that has improved switching speed and tolerance to array non-planarity, among other advantages. In one embodiment, the switch cell can include a movable foil that is anchored to the structure, but is not under tension in the unbiased state. In another embodiment, a flexible foil may be mechanically biased so that a portion of the foil is positioned proximate to a reference substrate. | ||||||
| 18 | Micro-electromechanical device and module and method of manufacturing same | US10561854 | 2004-06-23 | US20060146472A1 | 2006-07-06 | Jozef Thomas Van Beek; Peter Steeneken |
| The MEMS element of the invention has a first, a second and an intermediate third electrode. It is given an increased dynamic range in that the switchable capacitor constituted by the second and the third electrode is provided in the signal path between input and output, and that the switchable capacitor constituted by the first and third electrode is provided between the signal path and ground. The MEMS element of the invention is very suitable for integration in a network of passive components. | ||||||
| 19 | 可動電極を有する電気機器 | JP2013539409 | 2011-10-19 | JP5821967B2 | 2015-11-24 | 島内 岳明; 豊田 治; 上田 知史 |
| 20 | 可動電極を有する電気機器 | JP2013539409 | 2011-10-19 | JPWO2013057759A1 | 2015-04-02 | 島内 岳明; 岳明 島内; 豊田 治; 治 豊田; 上田 知史; 知史 上田 |
| 【課題】熱膨張による可動電極の変位を抑制できる可動電気機器を提供する。【解決手段】可動電気機器は、支持基板と、支持基板上に形成され、支持基板の表面に対して略垂直な対向電極面を有し、対向電極面間にキャビティを画定する第1及び第2の固定電極と、第1端が第1の固定電極に近接配置され、第2端が第2の固定電極に近接配置される可動電極と、可動電極の第1端、第2端の少なくとも一方に連続し、可動電極の厚さ方向に屈曲する部分を含む屈曲バネ部とを有する可動部と、支持基板上に配置され、可動部の両端を支持する第1、第2のアンカと、を有する。 | ||||||
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