序号 | 专利名 | 申请号 | 申请日 | 公开(公告)号 | 公开(公告)日 | 发明人 |
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121 | Combined accelerometer and gyroscope system | EP07445046.1 | 2007-12-18 | EP2017576B8 | 2012-03-21 | Sung, Sang Kyung; Lee, Young Jae; Kang, Tae Sam |
A present invention relates to a combined accelerometer and gyroscope system including a combined accelerometer and gyroscope for maintaining vibration of a mass body at a constant amplitude using an applied drive voltage, and detecting vibration signals in directions of an acceleration axis and an angular velocity axis. An acceleration signal obtainment unit obtains the vibration signal in the direction of the acceleration axis. An amplitude control unit outputs an acceleration control signal using the vibration signal. An acceleration driving input unit receives a voltage signal from the amplitude control unit and applies the voltage signal to the combined accelerometer and gyroscope. An angular velocity signal obtainment unit obtains the vibration signal in the direction of the angular velocity axis. A force balance control unit outputs an angular velocity control signal using the vibration signal received from the angular velocity signal obtainment unit. An angular velocity driving input unit receives a voltage signal received from the force balance control unit and applies the voltage signal to the combined accelerometer and gyroscope. | ||||||
122 | Combined sensor and its fabrication method | EP06018553.5 | 2006-09-05 | EP1762823A3 | 2009-09-02 | Akashi, Teruhisa, c/o Hitachi, Ltd.; Okada, Ryoji, c/o Hitachi, Ltd.; Hayashi, Masahide, c/o Hitachi, Ltd.; Suzuki, Kengo, c/o Hitachi, Ltd. |
A sensor structure using vibrating sensor elements (1a, 1b, 1c, 1d) which can detect an angular rate and accelerations in two axes at the same time is provided. 2 sets of vibration units (1a, 1b; 1c, 1d) which vibrate in out-of-phase mode (tunning-fork vibration) and include four vibrating sensor elements of the approximately same shape supported on a substrate in a vibratile state are provided and the vibrating sensor elements are disposed so that vibration axes of the vibration units cross each other at right angles. Each of the vibrating sensor elements includes a pair of detection units (3a, 3b, 3c, 3d) and adjustment units (4a, 4b, 4c, 4d) for adjusting a vibration frequency. The vibrating sensor elements constitute a combined sensor having supporting structure for supporting the vibrating sensor elements independently so that the vibrating sensor elements do not interfere with each other. |
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123 | MICRO-MACHINED MULTI-SENSOR PROVIDING 1-AXIS OF ACCELERATION SENSING AND 2-AXES OF ANGULAR RATE SENSING | EP04750818 | 2004-04-27 | EP1618392A4 | 2009-07-01 | GEEN JOHN A |
A micro-machined multi-sensor that provides 1-axis of acceleration sensing and 2-axes of angular rate sensing. The multi-sensor includes a plurality of accelerometers, each including a mass anchored to and suspended over a substrate by a plurality of flexures. Each accelerometer further includes acceleration sense electrode structures disposed along lateral and longitudinal axes of the respective mass. The multi-sensor includes a fork member coupling the masses to allow relative antiphase movement, and to resist in phase movement, of the masses, and a drive electrode structure for rotationally vibrating the masses in antiphase. The multi-sensor provides electrically independent acceleration sense signals along the lateral and longitudinal axes of the respective masses, which are added and/or subtracted to obtain 1-axis of acceleration sensing and 2-axes of angular rate sensing. | ||||||
124 | Combined accelerometer and gyroscope system | EP07445046.1 | 2007-12-18 | EP2017576A2 | 2009-01-21 | Sung, Sang Kyung; Lee, Young Jae; Kang, Tae Sam |
A present invention relates to a combined accelerometer and gyroscope system including a combined accelerometer and gyroscope for maintaining vibration of a mass body at a constant amplitude using an applied drive voltage, and detecting vibration signals in directions of an acceleration axis and an angular velocity axis. An acceleration signal obtainment unit obtains the vibration signal in the direction of the acceleration axis. An amplitude control unit outputs an acceleration control signal using the vibration signal. An acceleration driving input unit receives a voltage signal from the amplitude control unit and applies the voltage signal to the combined accelerometer and gyroscope. An angular velocity signal obtainment unit obtains the vibration signal in the direction of the angular velocity axis. A force balance control unit outputs an angular velocity control signal using the vibration signal received from the angular velocity signal obtainment unit. An angular velocity driving input unit receives a voltage signal received from the force balance control unit and applies the voltage signal to the combined accelerometer and gyroscope. |
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125 | Dual mode mems sensor | EP07119630.7 | 2007-10-30 | EP1918723A2 | 2008-05-07 | Platt, William P.; Henrickson, Jens |
A system and method for determining acceleration along a motor axis of a MEMS gyroscope includes a processor. The processor includes a notch filter to remove a sinusoid from an instantaneous voltage from a motor pick up of the MEMS gyroscope. A memory bus allows random access to data stored in a processor readable memory. A processor-readable memory in operative engagement with the memory bus allows access to the processor-readable memory containing data. The data includes a model relating at least one instantaneous voltage in a remaining instantaneous voltage to an acceleration of a proof mass along the motor axis. Instructions to the processor include a routine to compare the at least one instantaneous voltage in the model to the remaining instantaneous voltage. |
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126 | Angular velocity and acceleration sensor | EP00123136.4 | 2000-10-25 | EP1096226B1 | 2006-12-06 | Konaka, Yoshihiro, A170 Intellectual Property Dept |
An external-force detecting sensor (1) includes a sensor unit (2) for commonly detecting angular velocity and acceleration; an angular-velocity/acceleration mix signal outputting unit (24) for outputting an angular-velocity/acceleration mix signal comprised of an angular-velocity component in accordance with the magnitude of angular velocity and an acceleration component in accordance with the magnitude of acceleration that are detected by the sensor unit; and a signal separating unit (27,30) for separating and extracting the angular-velocity component and the acceleration component from the angular velocity/acceleration mix signal to output as an angular-velocity signal and an acceleration signal. |
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127 | ACCELERATION DETECTION TYPE GYRO DEVICE | EP01906216 | 2001-02-22 | EP1275934A4 | 2006-06-28 | KARASAWA SATOSHI; MURAKOSHI TAKAO; FUKATSU KEISUKE |
An acceleration-detecting type gyro apparatus of an electrostatic supporting type, in which displacements of a gyro rotor are actively made zero is proposed. The acceleration-detecting type gyro apparatus includes: a gyro case; a gyro rotor which is supported within the gyro case by electrostatic supporting forces such that the gyro rotor is not in contact with the gyro case; electrostatic supporting electrodes for generating the electrostatic supporting forces; a rotor drive system for rotating the gyro rotor around the spin axis at high speed; a displacement-detection system for detecting displacements of the gyro rotor; and a restraining system having a feedback loop for correcting control voltages applied to the electrostatic supporting electrodes so that displacements of the gyro rotor become zero, the gyro rotor is annular-shaped, and the electrostatic supporting electrodes are disposed in a manner of surrounding the gyro rotor. |
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128 | PENDULOUS OSCILLATING GYROSCOPIC ACCELEROMETER | EP95929386.1 | 1995-08-04 | EP0784797B1 | 2002-03-27 | Sapuppo, Michele S. |
A pendulous oscillating gyroscopic accelerometer (10) comprising an unbalanced pendulous mass (28), pivotable on an output axis, that is oscillated about a reference axis transverse to the output axis. The pendulous mass (28) is also oscillated about an input axis transverse to the reference axis using a control servo loop (40), and the acceleration force along the input axis is determined from at least one of those oscillations. | ||||||
129 | VORRICHTUNG UND VERFAHREN ZUR BESTIMMUNG VON FREQUENZ UND AMPLITUDE EINER SCHWINGENDEN STRUKTUR, INSBESONDERE ZUR MESSUNG VON BESCHLEUNIGUNGEN ODER DREHRATEN | EP00947781.1 | 2000-06-06 | EP1102996A1 | 2001-05-30 | SCHALK, Josef; SASSEN, Stefan; FICKER, Wilhelm; LENTNER, Konrad |
The invention relates to a device for determining frequency and/or amplitude of an oscillating structure that is especially used in measuring acceleration or rotational rates. Said device has a movable element (2) that can be excited to produce an oscillation. A pair of position sensors (10, 11) is used for determining the deflection of the movable element (2), whereby the position sensors (10, 11) are disposed in such a way that their measured values mutually exceed or fall short of each other during a half-wave of the oscillation. A comparator is used for comparing the measured values of both position sensors (10, 11), on the basis of which a threshold value (Us) is determined for the half-wave of the oscillation. A time measuring device is used for determining the duration during which the measured value of one of the two position sensors (10, 11) exceeds or falls short of the threshold value (Us). The position sensors (10, 11) can be, for instance, capacitances whose electrodes are disposed stepwise. The amplitude of the oscillation is determined independently of any possible parallel displacement of the movable element (2) so that no further disruption of measuring results occurs. | ||||||
130 | PENDULOUS OSCILLATING GYROSCOPIC ACCELEROMETER | EP95929386.0 | 1995-08-04 | EP0784797A1 | 1997-07-23 | Sapuppo, Michele S. |
A pendulous oscillating gyroscopic accelerometer (10) comprising an unbalanced pendulous mass (28), pivotable on an output axis, that is oscillated about a reference axis transverse to the output axis. The pendulous mass (28) is also oscillated about an input axis transverse to the reference axis using a control servo loop (40), and the acceleration force along the input axis is determined from at least one of those oscillations. | ||||||
131 | Inertial sensors | EP91304327.9 | 1991-05-14 | EP0461761B1 | 1994-06-22 | Varnham, M.P., British Aerospace Public Ltd. Co.; Norris, T.S., British Aerospace Public Ltd., Co.; Hodgins, D., British Aerospace Public Ltd., Co.; Thomas, H.D., British Aerospace Public Ltd., Co. |
132 | METHOD AND SYSTEM FOR ESTIMATING MULTIPLE MODES OF MOTION | PCT/US2014063199 | 2014-10-30 | WO2015066348A3 | 2015-11-19 | ELHOUSHI MOSTAFA; GEORGY JACQUES; NOURELDIN ABOELMAGD |
A method and system for determining the mode of motion or conveyance of a device, the device being within a platform (e.g., a person, vehicle, or vessel of any type). The device can be strapped or non-strapped to the platform, and where non-strapped, the mobility of the device may be constrained or unconstrained within the platform and the device may be moved or tilted to any orientation within the platform, without degradation in performance of determining the mode of motion. This method can utilize measurements (readings) from sensors in the device (such as for example, accelerometers, gyroscopes, etc.) whether in the presence or in the absence of navigational information updates (such as, for example, Global Navigation Satellite System (GNSS) or WiFi positioning). The present method and system may be used in any one or both of two different phases, a model building phase or a model utilization phase. | ||||||
133 | DEVICE AND METHOD FOR DETECTING ROAD ACCIDENTS, DRIVING STYLES AND FOR FINDING VEHICLES | PCT/IT2013000098 | 2013-04-04 | WO2013150558A8 | 2013-12-19 | SBIANCHI FABIO; ZUCO GIUSEPPE; AMENDOLAGINE MARCO |
A device (1), to be installed on board vehicles, designed for automatic detection of road accidents and of the modalities with which a vehicle is driven and for storage of the data detected, comprises: first means (2), designed to measure the six components of acceleration (ax, ay, az, alphax, alphay, alphaz) of said vehicles; and second means (4) for processing and storing the data supplied by said first means (2); wherein said accidents are detected when the combination of said six components of acceleration (ax, ay, az, alphax, alphay, alphaz), or their resultant, present characteristics of value and progression that are not compatible with the technical characteristics of said vehicles. | ||||||
134 | COMBINED MEMS ACCELEROMETER AND GYROSCOPE | PCT/IB2008002798 | 2008-10-20 | WO2009050578A3 | 2009-06-04 | RAMAN JOHAN; ROMBOUTS PIETER |
A MEMS structure for a combined gyroscope and accelerometer unit (100) based on in-plane vibratory movements comprises a proof mass (101) and comb-drives (102) operable to cause the proof mass (101) to resonate in the x-direction, commonly referred to as the primary mode. Under the influence of a rotation Oz around the z- axis, a Coriolis force acting in the y-direction results. This excites the secondary (or sense) mode. A set of parallel-plate capacitors 103 are provided to enable position readout along the secondary axis. In addition to the above, the comb-drive capacitors (102) of the primary mode can also be used for readout of position along the primary axis, and the parallel-plate capacitors (103) for actuation along the secondary axis. This can be achieved either by time-multiplexing these capacitors (102, 103) or by providing separate sets of capacitors (102, 103) for sensing and actuation along each axis. The unit can operate in separate S? force-feedback loops with respect to both axes. This force-feedback approach is already known for readout of the secondary mode of MEMS gyroscopes. It has not previously been applied to the primary mode of a gyroscope for the measurement of a component of acceleration. | ||||||
135 | MICRO-MACHINED MULTI-SENSOR PROVIDING 1-AXIS OF ACCELERATION SENSING AND 2-AXES OF ANGULAR RATE SENSING | PCT/US2004013111 | 2004-04-27 | WO2004097432B1 | 2005-05-19 | GEEN JOHN A |
A micro-machined multi-sensor that provides 1-axis of acceleration sensing and 2-axes of angular rate sensing. The multi-sensor includes a plurality of accelerometers, each including a mass anchored to and suspended over a substrate by a plurality of flexures. Each accelerometer further includes acceleration sense electrode structures disposed along lateral and longitudinal axes of the respective mass. The multi-sensor includes a fork member coupling the masses to allow relative antiphase movement, and to resist in phase movement, of the masses, and a drive electrode structure for rotationally vibrating the masses in antiphase. The multi-sensor provides electrically independent acceleration sense signals along the lateral and longitudinal axes of the respective masses, which are added and/or subtracted to obtain 1-axis of acceleration sensing and 2-axes of angular rate sensing. | ||||||
136 | OPTOMECHANICAL SENSOR FOR ACCELEROMETRY AND GYROSCOPY | EP14870402.6 | 2014-11-19 | EP3080617B1 | 2018-12-26 | HUTCHISON, David N.; HECK, John |
Embodiments of the present disclosure are directed towards a micro-electromechanical system (MEMS) sensing device, including a laser arrangement configured to generate a light beam, a first waveguide configured to receive and output a first portion of the light beam, and a second waveguide having a section that is evanescently coupled to the first waveguide and configured to receive and output a second portion of the light beam. The section of the second waveguide is configured to be movable substantially parallel to the first waveguide, wherein a movement of the section of the second waveguide may be caused by an inertial change applied to the sensing device. The movement of the section may cause a detectable change in light intensity between the first and second portions of the light beam. Based on the detected change, the inertial change may be determined. Other embodiments may be described and/or claimed. | ||||||
137 | Dispositif micro/nano capteur inertiel multiaxial de mouvements | EP12198466.0 | 2012-12-20 | EP2607907B1 | 2018-11-28 | Walther, Arnaud |
138 | INERTIAL AND PRESSURE SENSORS ON SINGLE CHIP | EP14834662.0 | 2014-07-31 | EP3030875B1 | 2018-05-23 | FEYH, Ando; O'BRIEN, Gary |
In one embodiment, the process flow for a capacitive pressures sensor is combined with the process flow for an inertial sensor. In this way, an inertial sensor is realized within the membrane layer of the pressure sensor. The device layer is simultaneously used as z-axis electrode for out-of-plane sensing in the inertial sensor, and/or as the wiring layer for the inertial sensor. The membrane layer (or cap layer) of the pressure sensor process flow is used to define the inertial sensor sensing structures. Insulating nitride plugs in the membrane layer are used to electrically decouple the various sensing structures for a multi-axis inertial sensor, allowing for fully differential sensing. | ||||||
139 | HIGH PRECISION TRAJECTORY AND SPEED SENSOR AND MEASURING METHOD | EP16726651.9 | 2016-04-28 | EP3289367A1 | 2018-03-07 | FASEL, Benedikt; AMINIAN, Kamiar |
A method for contactlessly determining an exact passage of an athlete at points placed along a track in sports, wherein the method comprises gearing the athlete with a wearable magnetometer sensor unit, whereby the magnetometer sensor unit is equipped with at least a magnetic sensor, a processing unit, and a storage medium; placing at each point at least a permanent magnet in proximity of a track surface of the track. When the athlete moves along the track, the method further comprises recording at the magnetic sensor a signal; detecting for each permanent magnet a disturbance of a local magnetic field generated by the permanent magnet in the recorded signal and measuring the disturbance; mapping of the measured disturbance to a movement speed of the athlete and a distance of the athlete to the magnet corresponding to the local magnetic field; and correcting the movement speed and the distance for a time offset between the magnet passage of an athlete's center of mass and the magnetometer sensor unit. | ||||||
140 | OPTOMECHANICAL SENSOR FOR ACCELEROMETRY AND GYROSCOPY | EP14870402 | 2014-11-19 | EP3080617A4 | 2017-10-25 | HUTCHISON DAVID N; HECK JOHN |
Embodiments of the present disclosure are directed towards a micro-electromechanical system (MEMS) sensing device, including a laser arrangement configured to generate a light beam, a first waveguide configured to receive and output a first portion of the light beam, and a second waveguide having a section that is evanescently coupled to the first waveguide and configured to receive and output a second portion of the light beam. The section of the second waveguide is configured to be movable substantially parallel to the first waveguide, wherein a movement of the section of the second waveguide may be caused by an inertial change applied to the sensing device. The movement of the section may cause a detectable change in light intensity between the first and second portions of the light beam. Based on the detected change, the inertial change may be determined. Other embodiments may be described and/or claimed. |