序号 专利名 申请号 申请日 公开(公告)号 公开(公告)日 发明人
21 Method and System for Determining Particle Size Information US13979852 2012-01-13 US20130342684A1 2013-12-26 Heimo Keranen; Matti-Antero Okkonen
The invention concerns a method and system for determining particle size information of particles contained in a sample, the method comprising illuminating the particles with at least three light sources placed on different locations, detecting light reflected from the particles using a detector capable of spatial resolution, and processing the output of the detector so as to determine the particle size information. According to the invention, the particles are illuminated simultaneously with the at least three light sources each operating at a different wavelength channel, and the wavelength channels are simultaneously detected at the detector. The invention reduces the need for sample preparation, among other benefits.
22 PARTICLE MONITOR SYSTEM AND SUBSTRATE PROCESSING APPARATUS US13111520 2011-05-19 US20110216322A1 2011-09-08 Tsuyoshi MORIYA; Takashi ENOMOTO
A particle monitor system that can detect fine particles in a substrate processing apparatus. The substrate processing apparatus has a chamber in which a substrate is housed and subjected to processing, a dry pump that exhausts gas out of the chamber, and a bypass line that communicates the chamber and the dry pump together. The particle monitor system has a laser light oscillator that irradiates laser light toward a space in which the particles may be present, and a laser power measurement device that is disposed on an optical path of the laser light having passed through the space and measures the energy of the laser light.
23 Systems for measuring backscattered light using rotating mirror US12211918 2008-09-17 US07920262B2 2011-04-05 Gorden W. Videen; Karri Olavi Muinonen
A system for measuring backscattered light from a sample is given. Light is output from a light source towards a rotating mirror, and then reflected by the rotating mirror towards the sample. The sample reflects backscattered light back towards the rotating mirror, which, having moved during the time it took for the light to propagate from the mirror to the sample and back, reflects the backscattered light to a detector located at a physical separation from the light source. The detected backscattered light may be analyzed to determine various properties of the sample.
24 Method and apparatus to characterize pressurized liquid sample US15407157 2017-01-16 US20180202967A1 2018-07-19 Hung-Te Hsieh
A method for measuring the physical properties of a drug formulation suspended in a pressurized liquid propellant and a system to enable such measurements is disclosed. Drug formulations suspended in pressurized liquid propellant used in Pressurized Metered Dose Inhalers (pMDIs) are propelled in their native liquid state into an analytical instrument with a measurement cell capable of withstanding the pressure required to retain the sample in liquid form by employing a device to rapidly release the contents of the pMDI canister into the measurement instrument wherein the sample's electrophoretic mobility and size may be determined by MP-PALS or other techniques. A series of valves permits the maintenance of the high pressure in the system. Once the measurements are made, the pressurized liquid is allowed to pass to waste or another analytical instrument by opening an exit valve.
25 MULTIPLE BEAM AND CONVERGENT LIGHT ILLUMINATION CROSSED-BEAM IMAGING US15552263 2016-02-17 US20180045634A1 2018-02-15 William D. BACHALO; Gregory A. PAYNE; Khalid IBRAHIM; Fidrich Michael J.
Methods and apparatuses to image particles are described. A plurality of illuminating light beams propagating on multiple optical paths through a particle field are generated. The plurality of illuminating light beams converge at a measurement volume. A shadow image of a particle passing through a portion of the measurement volume at a focal plane of a digital camera is imaged. Shadow images of other particles in the particle field are removed using the plurality of illuminating light beams.
26 SYSTEMS AND METHODS FOR ISOLATING CONDENSATE IN A CONDENSATION PARTICLE COUNTER US15611497 2017-06-01 US20170350801A1 2017-12-07 Brian KNOLLENBERG; Stephen PAVONE; Cliff KETCHAM; Rebecca THOMPSON
The systems and methods provided herein relate generally to the prevention of migration of condensate in a condensation particle counter between components designed to handle condensate (e.g. saturator, condenser, condensate reservoir) and components which may be damaged by the condensate (e.g. detection and flow control devices).
27 PARTICLE CHARACTERIZATION US15507155 2015-09-07 US20170276585A1 2017-09-28 Jason Cecil William CORBETT
A particle characterization apparatus is disclosed comprising: a sample cell for holding a sample, a light source for producing a light beam for illuminating the sample in the sample cell, thereby producing scattered light by the interaction of the light beam with the sample; a focussing lens for focussing the light beam within the sample; and a detector for detecting the backscattered light along a detection optical path that intersects the focussed light beam within the sample. The intersection of the light beam and the detection optical path in the sample define a detection region. The apparatus comprises an optical arrangement for varying the volume of the detection region.
28 MASK INSPECTION DEVICE AND METHOD THEREOF US15346430 2016-11-08 US20170131218A1 2017-05-11 CHIH-CHIANG CHANG
Provided herein is a mask inspection device, including an inspection base, a shift platform, a rotating platform, a bearing platform, a laser ranging module, a vertical shift module, a processing module, and an image capturing module. A mask, which is carried and held by the bearing platform, includes a dust-proof film, each region of which is measured by the laser ranging module for generating a distance measuring signal; each distance measuring signal is utilized to control the movement of the vertical shift module, such that image capturing module can take an inspection image of that region. Based on the distance measuring signals and inspection images, height information of the dust-proof film and inspection information can be acquired. Also provided herein is a method applicable to said mask inspection device.
29 APPARATUS FOR MEASURING PARTICLE SIZE DISTRIBUTION BY LIGHT SCATTERING US14345089 2012-09-11 US20150116708A1 2015-04-30 David Spriggs
Apparatus for determining particle-size distribution of a sample by light-scattering includes a helium neon laser (102), a sample cell having cell windows (120, 122) and a focal plane detector (124). Detectors are also provided for detecting light scattered by a sample within or flowing through the sample cell. The apparatus includes a first (114) and second (116) folding mirrors arranged to fold the optical path from the laser to the sample cell so that the laser is vertically below the sample cell. The folding mirrors are mounted within a dust-proof housing (104), the entrance (106) and exit (108) components thereof being other optical components generally used within light- scattering apparatus. The entrance component is mounted such that its outward normal points downwards and the exit component is mounted substantially vertically so that these components do not accumulate dust. The invention allows the laser of a light-scattering apparatus to be positioned vertically below a sample cell of the apparatus without the accumulation of dust on optical components, which tends to degrade performance.
30 DEVICE AND METHOD FOR MEASURING SCATTERING OF RADIATION US12865432 2009-02-02 US20120080611A1 2012-04-05 Robert Jones; Roger Fane Sewell; Paul D. Ryder; Matthew J. Hayes; Edwin C. Carter
A photometric device for investigating a sample, comprises an array of radiation sources that are spaced apart from one another, and which are operable to generate radiation that differs from that generated by the other radiation sources in the array. The device includes a lens arrangement for focusing the radiation at a region of space where a sample may be located for example by means of a sample holder, and at least one detector for receiving radiation from the region of space. Preferably, a number of detectors are employed that are spaced apart from one another, and especially about an axis of the device, so that one radiation detector can detect radiation transmitted by the sample and the other detectors can detect radiation scattered by it. The radiation sources may be time division multiplexed so that in each time slot the detectors receive radiation originating from each radiation source. In an alternative embodiment, the radiation from the region of space may be transmitted to the sample via a beam homogeniser, for example an optical waveguide in the form of an optical fibre, which may be used to reduce or remove speckle where laser diodes are employed as the radiation sources. The device may be used to determine the particle size distribution of particles in a sample by a method employing Bayesian inference.
31 PARTICLE CHARACTERIZATION DEVICE US13121170 2009-09-25 US20110181869A1 2011-07-28 Tetsuji Yamaguchi; Tatsuo Igushi; Takuji Kurozumi
Provided is a particle characterization device that can ensure measurement accuracy even though light detecting means has a single configuration, and enables the number of optical elements to be decreased as much as possible to suppress cost increase and reduce the number of adjustment places, and the particle characterization device has an incident side polarizer and an incident side ¼ wavelength plate as an illumination optical system mechanism and, as a light receiving optical system mechanism, an exit side ¼ wavelength plate and an exit side polarizer that can be rotated to a plurality of angle positions around a cell, wherein light attenuating means that prevents a polarization state from being changed is provided on a light path, and a light attenuation rate by the light attenuating means is controlled such that a detected light intensity at each measurement position falls within a measurement range of light detecting means.
32 SYSTEMS FOR MEASURING BACKSCATTERED LIGHT USING FINITE SPEED OF LIGHT US12211918 2008-09-17 US20100067007A1 2010-03-18 GORDEN W. VIDEEN; Karri Olavi Muinonen
A system for measuring backscattered light from a sample is given. Light is output from a light source towards a rotating mirror, and then reflected by the rotating mirror towards the sample. The sample reflects backscattered light back towards the rotating mirror, which, having moved during the time it took for the light to propagate from the mirror to the sample and back, reflects the backscattered light to a detector located at a physical separation from the light source. The detected backscattered light may be analyzed to determine various properties of the sample.
33 PARTICLE MONITOR SYSTEM AND SUBSTRATE PROCESSING APPARATUS US12015156 2008-01-16 US20080212093A1 2008-09-04 Tsuyoshi Moriya; Takashi Enomoto
A particle monitor system that can detect fine particles in a substrate processing apparatus. The substrate processing apparatus has a chamber in which a substrate is housed and subjected to processing, a dry pump that exhausts gas out of the chamber, and a bypass line that communicates the chamber and the dry pump together. The particle monitor system has a laser light oscillator that irradiates laser light toward a space in which the particles may be present, and a laser power measurement device that is disposed on an optical path of the laser light having passed through the space and measures the energy of the laser light.
34 Device and method for measuring a particle flow in a fluid US890999 1997-07-10 US5815265A 1998-09-29 Leander Molter; Friedrich Munzinger
For simplifying the optical measurement of a particle flow in a fluid and in particular for eliminating errors, in a device for measuring a particle flow in a fluid with at least one illumination system having a diaphragm and at least one receiver system having a diaphragm, the invention provides for a diaphragm (6a, 11a) to have an aperture (6, 11) with an edge (6b, 11b) constructed convexly towards the interior of the diaphragm aperture (6, 11). According to a method, the particle flow is illuminated and/or observed through a diaphragm aperture with an edge constructed convexly towards its interior and the maximum intensity of the particle flying through a first optical measuring range is measured and account is only taken of the particle if the intensity on flowing through a second measuring range exceeds a specific minimum percentage of the maximum intensity measured for this particle.
35 粒子分析装置 JP2016081321 2016-10-21 JPWO2017069260A1 2018-09-06 河野 誠
粒子分析装置(1)は、測定セル(2)と測定部(10)とを備える。粒子分析装置(1)は更に、泳動部を備える。泳動部は、磁石(3a、3b)と、電極(4a、4b、4c)と、電源(5)と、レーザー光源(6)とを含む。泳動部は、磁気泳動法、誘電泳動法、電磁泳動法、及び光泳動法のうちの少なくとも2つの手法により、測定セル(2)に注入された媒体に含まれる粒子を泳動させる。測定部(10)は、粒子の物理量の測定、及び、粒子の泳動速度の測定を行う。
36 粒子サイズ検出のためのレーザセンサ JP2017563290 2016-08-01 JP2018523106A 2018-08-16 ファン デル リー アレクサンダー マーク; ヘルミッグ ホアキム ウィルヘルム; スプライト ヨハネス ヘンドリクス マリア
本発明は、粒子サイズ検出のためのレーザセンサモジュールを説明している。レーザセンサモジュール100は、少なくとも1つの第1のレーザ110と、少なくとも1つの第1の検出器120と、少なくとも1つの電気駆動部130と、少なくとも1つの評価器140と、を有する。第1のレーザ110は、少なくとも1つの電気駆動部130によって供給される信号に応答して第1のレーザ光を放射するように構成される。少なくとも1つの第1の検出器120は、第1のレーザ110の第1のレーザキャビティ内の光波の第1の自己混合干渉信号30を決定するように構成される。第1の自己混合干渉信号30は、第1のレーザ光の少なくとも一部を受ける粒子によって反射される第1のレーザキャビティに再入射する第1の反射レーザ光によって引き起こされる。評価器140は、第1の自己混合干渉信号30により粒子と第1のレーザ110との間の第1の相対距離を決定するとともに、第1の自己混合干渉信号30により第1の振幅情報を決定することによって、粒子のサイズを決定するように構成される。また、本発明は、粒子サイズを決定するための対応する方法にも関する。
37 粒子サイズ検出のためのレーザセンサ JP2017563290 2016-08-01 JP6356366B1 2018-07-11 ファン デル リー アレクサンダー マーク; ヘルミッグ ホアキム ウィルヘルム; スプライト ヨハネス ヘンドリクス マリア
本発明は、粒子サイズ検出のためのレーザセンサモジュールを説明している。レーザセンサモジュール100は、少なくとも1つの第1のレーザ110と、少なくとも1つの第1の検出器120と、少なくとも1つの電気駆動部130と、少なくとも1つの評価器140と、を有する。第1のレーザ110は、少なくとも1つの電気駆動部130によって供給される信号に応答して第1のレーザ光を放射するように構成される。少なくとも1つの第1の検出器120は、第1のレーザ110の第1のレーザキャビティ内の光波の第1の自己混合干渉信号30を決定するように構成される。第1の自己混合干渉信号30は、第1のレーザ光の少なくとも一部を受ける粒子によって反射される第1のレーザキャビティに再入射する第1の反射レーザ光によって引き起こされる。評価器140は、第1の自己混合干渉信号30により粒子と第1のレーザ110との間の第1の相対距離を決定するとともに、第1の自己混合干渉信号30により第1の振幅情報を決定することによって、粒子のサイズを決定するように構成される。また、本発明は、粒子サイズを決定するための対応する方法にも関する。
38 暗環境同時観察培養装置 JP2017516241 2015-05-01 JP6256963B2 2018-01-10 宮下 光良
39 粒子特性評価方法及び装置 JP2017512715 2015-09-07 JP2017530347A 2017-10-12 ジェイソン セシル ウィリアム コルベット
試料(150)を保持するための試料セル(110)と、試料セル(110)内の試料(150)を照射するための光ビーム(106)を発生し、それにより光ビーム(106)の試料(150)との相互作用により散乱光を発生する光源(302)と、試料(150)内の光ビーム(106)を集束させるための焦点レンズ(130)と、試料(150)内の集束した光ビーム(106)と交差する検出光路(108)に沿った後方散乱光を検出するための検出器(306)と、を備える粒子特性評価装置(300)が開示される。光ビーム(106)と試料内の検出光路(108)との交点は検出領域(120)を形成する。前記装置は検出領域(120)のボリュームを変えるための光学配置を備える。
40 Detector for granular substance in slurry JP35489092 1992-12-18 JPH0674891A 1994-03-18 ROORANSU BII KIRUHAMU
PURPOSE: To identify granular substances in a slurry moving through a channel and to decide whether the granular substances are present as single bodies or as a group. CONSTITUTION: The detector comprises a plurality of fusion bundled optical fibers 22 having one end part 58 extending through the radial port 28 in a channel 12 and abutting on a slurry 16 moving through the channel. An optically tapered body 56 has such focal length as only the thin layer of the slurry contiguous to one end part of the optical fibers can be focused and observed and it is tapered from the second opposite end part 60 of the optical fibers to the first end part thereof so that the image of a granular substance can be magnified at each second end part. The detector further comprises a light source 68 for illuminating at least the thin layer of the slurry contiguous to one end part of each optical fiber, and a video camera 276 for observing the image of a granular substance in the thin layer from the second opposite end part of each optical fiber.
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