METHOD AND SYSTEM TO CONTROL MOVEMENT OF A BODY FOR NANO-SCALE MANUFACTURING |
申请号 |
PCT/US2005/018862
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申请日 |
2005-05-27 |
公开(公告)号 |
WO2005119395A2 |
公开(公告)日 |
2005-12-15 |
申请人 |
MOLECULAR IMPRINTS, INC.;
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发明人 |
CHOI, Byung-Jin;
SREENIVASAN, Sidlgata V.;
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摘要 |
The present invention is directed towards a method and system of controlling movement of a body coupled to an actuation system that features translating movement of the body in a plane extending by imparting angular motion in the actuation system with respect to two spaced-apart axes. Specifically, rotational motion is generated in two spaced-apart planes, one of which extending parallel to the plane in which the body translates. This facilitates proper orientation of body with respect to a surface spaced-apart therefrom. |
权利要求 |
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说明书全文 |
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