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| 申请号 | JP5593477 | 申请日 | 1977-05-17 | 公开(公告)号 | JPS53141650A | 公开(公告)日 | 1978-12-09 |
| 申请人 | Yokogawa Hokushin Electric Corp; | 发明人 | NISHIHARA TADASHI; | ||||
| 摘要 | PURPOSE: To prevent the generation of errors and stabilize operation by sensing the displacements of first, second beams displacing in correspondence to set value signal and measuring value signal as movements of first, second flexers via cruciform springs. COPYRIGHT: (C)1978,JPO&Japio |
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