| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 1 | 双向电磁铁控制永磁悬浮及导向装置 | CN99117471.2 | 1999-12-24 | CN1257022A | 2000-06-21 | 刘尚举 |
| 本发明属于磁悬浮车的悬浮和导向装置,特别是一种可代替国外现有超导斥力式悬浮和常导吸力式悬浮的一种悬浮装置。主要技术特征是用永磁体悬浮车体及乘客重量并导向,用双向电磁铁及控制环节产生稳定力。因此节能。主要用于高低速磁悬浮车。 | ||||||
| 2 | 双定子静电稳定电磁悬浮微转动陀螺 | CN200610116291.6 | 2006-09-21 | CN100510629C | 2009-07-08 | 吴校生; 陈文元 |
| 一种双定子静电稳定电磁悬浮微转动陀螺，属于微机电系统技术领域。本发明包括：上基体、上定子、微转子、下定子、下基体、密封圈。微转子是一种导电圆环。上定子设在上基体上，并和上基体形成固定联接；下定子设在下基体上，并和下基体形成固定联接；在下基体的外缘设有密封圈，并和下基体形成固定联接；密封圈和上基体通过键合工艺形成固定联接，在上定子和下定子上，由外而内均依次分布有稳定悬浮线圈外圈、传感电极、联接线稳定悬浮线圈内圈、旋转线圈，下定子中央还设有防粘着柱。本发明中引入了静电电极结构，这种结构能增加微转子悬浮后的侧向刚度及整个微陀螺系统的抗冲击能力，推广微陀螺的应用范围。 | ||||||
| 3 | 双定子静电稳定电磁悬浮微转动陀螺 | CN200610116291.6 | 2006-09-21 | CN1920480A | 2007-02-28 | 吴校生; 陈文元 |
| 一种双定子静电稳定电磁悬浮微转动陀螺，属于微机电系统技术领域。本发明包括：上基体、上定子、微转子、下定子、下基体、密封圈。微转子是一种导电圆环。上定子设在上基体上，并和上基体形成固定联接；下定子设在下基体上，并和下基体形成固定联接；在下基体的外缘设有密封圈，并和下基体形成固定联接；密封圈和上基体通过键合工艺形成固定联接，在上定子和下定子上，由外而内均依次分布有稳定悬浮线圈外圈、传感电极、联接线稳定悬浮线圈内圈、旋转线圈，下定子中央还设有防粘着柱。本发明中引入了静电电极结构，这种结构能增加微转子悬浮后的侧向刚度及整个微陀螺系统的抗冲击能力，推广微陀螺的应用范围。 | ||||||
| 4 | 软磁吸悬高速旋转刚体微陀螺 | CN200510027336.8 | 2005-06-30 | CN1710384A | 2005-12-21 | 张卫平; 陈文元; 赵小林; 段永瑞 |
| 一种微机电系统领域的软磁吸悬高速旋转刚体微陀螺，包括：上定子结构层、高磁导率软磁转子、下定子结构层。上定子结构层中，轴向吸悬电磁铁对和轴向吸悬电感检测元件布置在上定子基板的表面的同一圆周上，线圈和带凸极的高磁导材料结构设置在上定子基板的表面上；下定子结构层中，在下定子基板设置径向吸悬电磁铁对，在每个径向吸悬电磁铁对之间设置径向吸悬电感检测元件，径向吸悬电磁铁对和径向吸悬电感检测元件设置在一个圆周上，在此圆周内侧，设置轴向吸悬组件，线圈和带凸极的高磁导材料结构设置在下定子基板的中心区域上，线圈设置在带凸极的高磁导材料结构上。本发明特别适合多层微细加工工艺，具有尺寸小，功耗小，实现容易的特点。 | ||||||
| 5 | 双向电磁铁控制永磁悬浮及导向装置 | CN99117471.2 | 1999-12-24 | CN1076677C | 2001-12-26 | 刘尚举 |
| 本发明属于磁悬浮车的悬浮和导向装置，特别是一种可代替国外现有超导斥力式悬浮和常导吸力式悬浮的一种悬浮装置。主要技术特征是用永磁体悬浮车体及乘客重量并导向，用双向电磁铁及控制环节产生稳定力。因此节能。主要用于高低速磁悬浮车。 | ||||||
| 6 | Procédé et dispositifs pour minimiser la puissance induite dans un produit plat conducteur maintenu électromagnétiquement sans contact | EP83400259.4 | 1983-02-07 | EP0087345A1 | 1983-08-31 | Bronner, Jean-Claude |
Il s'agit d'un procédé et de dispositifs de mise en oeuvre de ce procédé permettant de réduire, à son minimum, la puissance induite dans un produit (P) plat conducteur à l'arrêt ou en défilement, puissance liée à la création de forces électromagnétiques aux fins d'un maintien en position sans contact, notamment par guidage ou lévitation. Le dispositif comporte pour chaque zone dans laquelle on induit les forces électromagnétiques au moins une paire d'inducteurs (A et B), à plusieurs pôles, dont les surfaces polaires sont sensiblement parallèles au produit (P), les deux inducteurs (A, B) de la paire étant disposés de façon sensiblement symétrique par rapport à la surface de la zone correspondant à la position d'équilibre recherchée, les pôles se faisant face deux à deux de part et d'autre du produit étant maintenu à tout instant de même polarité, les flux les traversant étant sensiblement de même grandeur. Application à des produits (P) plats conducteurs maintenus électromagnétiquement sans contact. |
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| 7 | IMPROVEMENTS IN OR RELATING TO LEVITATION SYSTEMS | PCT/GB9600835 | 1996-04-04 | WO9631941A1 | 1996-10-10 | SHEARWOOD CHRISTOPHER; WILLIAMS CONNEL BRETT; YATES ROBERT BARRET; MELLOR PHILLIP HENRY |
| A levitation system which comprises: (a) a high conductivity body member having a greatest dimension of less than 1500 mu m; (b) means for producing a levitating force on the body member; and (c) a miniature system adapted for rotation which further comprises: means for subjecting the body member to a rotating magnetic field such that the body member is rotated in the applied field. | ||||||
| 8 | 磁気浮上移動装置 | JP2014015992 | 2014-01-30 | JP2015142495A | 2015-08-03 | 永田 昌稔 |
| 【課題】浮上機能の変化を極力抑制しつつ、磁気浮上機能と移動や旋回機能を実現することのできる磁気浮上移動装置を提供する。 【解決手段】非磁性でかつ良伝導性材料からなるベース2と、ベース上に配置される基台3と、基台に装着され、ベースに渦電流を発生させてその磁気的反発力を利用して基台を浮上させる浮上機構4とを備え、浮上機構が、ベースに対峙される2個一組とした二組の磁石5a・5a(5c・5d)と、これらの磁石を個々に回転させるモーター6a・6b(6c・6d)と、これらのモーターの回転数を個々に制御する制御ユニット7とからなり、各磁石が、その外形形状が円筒状に形成され、その円中心に回転軸線Lを有し、その外周面に、前記回転軸線回りにS極とN極とが交互に着磁させられてなり、前記各磁石の回転軸線が、前記ベースと平行に保持され、また、各組毎の一対の磁石が同一方向の回転となるように、かつ、一方の組の磁石と他方の組の磁石が逆方向の回転となるように回転制御するようになされている 【選択図】図1 |
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| 9 | Positioning device, and an exposure apparatus using the positioning device | JP2003123832 | 2003-04-28 | JP4227452B2 | 2009-02-18 | 伸茂 是永 |
| 10 | Element manufactured by lithograph arrangement, element production, and this method | JP2004156996 | 2004-05-27 | JP2005012996A | 2005-01-13 | HOL SVEN ANTOIN JOHAN; JOHAN CORNELIS COMPTER; LOOPSTRA ERIK ROELOF; VREUGDEWATER PATRICIA |
| <P>PROBLEM TO BE SOLVED: To provide a mobile apparatus at a low cost usable even in the vacuum, controlling a first/second part moved high accurately relating to each other, positioning a mask holder relating to a projected beam in a lithograph projector, and in a manner of positioning a wafer table relating to the projected beam. <P>SOLUTION: The mobile apparatus includes three-phase coil devices 1, 2, 3 of a first part, and a platen 7 of a second part. An AC current is supplied by a current supply 8 to the first/second coil devices 1, 2, 3. The platen 7 is arranged in a region where an induction field is generated when the current is supplied to the coil device. The coil device and the platen are arranged in such a manner that a magnetic field, generated in the platen when the current is allowed to flow in a coil, causes movement toward a first/second direction between the platen and the coil. <P>COPYRIGHT: (C)2005,JPO&NCIPI | ||||||
| 11 | Magnetic levitation actuator | JP14573193 | 1993-05-24 | JP3271372B2 | 2002-04-02 | 隆義 中尾; 憲昭 岩渕; 敏雄 松本; 信男 藤井 |
| 12 | JPH06504900A - | JP50084792 | 1991-10-28 | JPH06504900A | 1994-06-02 | |
| 13 | JPS5242964B1 - | JP8427869 | 1969-10-23 | JPS5242964B1 | 1977-10-27 | |
| 14 | Method of controlling propulsion and suspension of linear induction motors | US16394700 | 2019-04-25 | US10476408B1 | 2019-11-12 | Konstantin Hadziristic; Vladimir Viktorovich Kuptsov |
| The invention relates to a method of controlling simultaneously and independently both propulsion and levitation of one or a group of linear induction motors (LIMs). The method consists of a combination of two sub-methods: a current balancing sub-method and a regenerative levitation sub-method. | ||||||
| 15 | Magnetically lifted vehicles using hover engines | US15429918 | 2017-02-10 | US09744878B2 | 2017-08-29 | Robert William Melvin; D. Gregory Henderson; Shauna Moran; Victor Espinoza; Kyle O'Neil; Garrett Foshay |
| Electromechanical systems using magnetic fields to induce eddy currents and generate lift are described. Magnet configurations which can be employed in the systems are illustrated. The magnet configuration can be used to generate lift and/or thrust. Arrangements of hover engines, which can employ the magnet configurations, are described. Further, vehicles, which employ the hover engines and associated hover engines are described. | ||||||
| 16 | Three axis active magnetic levitation for inertial sensing systems | US10526140 | 2003-09-02 | US20050204817A1 | 2005-09-22 | Alexis Boletis; Francois Barrot; Roland Moser |
| The invention relates to an inertial sensor based on the magnetic levitation of an inertial mass comprising an active magnetic bearing unit arranged in such a way as to levitate the inertial mass and characterized by the fact that it furthermore comprises additional active magnetic bearings units arranged in such a way as to control the position of said inertial mass along three independent axis and to create, for any of said independent axis, restoring forces that can be oriented in any of the two directions of said independent axis. | ||||||
| 17 | Displacement apparatus, litographic apparatus, device manufacturing method, and device manufactured thereby | US10855962 | 2004-05-28 | US20050061626A1 | 2005-03-24 | Sven Hol; Johan Compter; Erik Loopstra; Patricia Vreugdewater |
| A displacement apparatus comprising a first part and a second part, which can be displaced relative to each other in first and second different directions. The apparatus being suitable for use in a lithographic apparatus for positioning the mask holder with respect to the projection beam and for positioning the wafer substrate table with respect to the patterned beam. The first part comprises a first and second coil system in which an alternating current is provided by a power supply. The second part comprises a conductive platen which is disposed in a zone in which a magnetic field is induced when power is supplied to the coil systems. The coil system and platen are arranged with respect to each other so that when currents are passed through the coils, a magnetic field induced in the platen causes displacement between the platen and the coils in the first and second different directions. | ||||||
| 18 | Alternating current magnetic levitation transport system | US53300 | 1993-04-26 | US5309049A | 1994-05-03 | Noriyuki Kawada; Shigeki Morii; Motomi Nakashima; Jin Yamada |
| An alternating current magnetic levitation transport system transporting a floating body made of conductive paramagnetic or nonmagnetic metallic material being levitated over alternating current electromagnets by making use of repulsion of an alternating electromagnetic field, comprises a tubular passage provided over the alternating current electromagnets which are spatially cut off from the outside wherein the floating body is levitated and transported. A cooling system made of a conjoined body of a thermoelectric cooling thermomodule and a liquid-cooled heat exchanger is provided in the transport system in contact with said tubular passage. This system can be favorably used in a clean environment where dust generation has to be avoided and the system can thereby provide more efficient transportation. | ||||||
| 19 | Method and apparatus for minimizing the power induced in a flat conducting product maintained in position electromagnetically without contact | US464952 | 1983-02-08 | US4518840A | 1985-05-21 | Jean-Claude Bronner |
| A method and apparatus for minimizing the power induced in a moving or stationary, flat, conducting product which is maintained in position without contact by electromagnetic forces. Inductors on each side of the product subject certain zones of the product to two alternating, essentially equivalent, opposing magnetic fluxes acting perpendicularly to surfaces of the product on opposite sides thereof so that, in each of the zones, with the product in a position of equilibrium, the component of magnetic flux of the resultant field perpendicular to each zone is minimal and the component parallel to each zone is at a maximum, due to the mutual deflection of the two fluxes. Each inductor has a plurality of poles and the opposing fluxes are produced by generating magnetic fields of like polarity in opposing poles of the inductors while generating, in adjacent poles of the inductors themselves, magnetic fields of opposite polarities. The inductors are of various overall configurations and are comprised of poles of various shapes depending upon the type of product involved. The magnitudes of the fluxes of each pair of inductors acting on the different zones may be regulated independently to obtain forces of different intensities in each of the corresponding zones of the product. | ||||||
| 20 | 磁気浮上移動装置 | JP2014016091 | 2014-01-30 | JP2015142501A | 2015-08-03 | 永田 昌稔 |
| 【課題】停止状態と移動状態とを繰り返し行なう場合においても、姿勢変化の少ない磁気浮上移動装置を提供する。 【解決手段】非磁性でかつ良伝導性材料からなるベース2と、ベース上に配置される基台3と、ベースに渦電流を発生させてその磁気的反発力を利用して基台を浮上させる浮上機構とを備え、浮上機構が、ベースに対峙される2個一組とした二組の磁石5a・5b(5c,5d)と、これらの磁石を個々に回転させるモーター6a・6b(6c,6d)と、モーターの回転数を個々に制御する制御ユニットと、磁石およびモーターの回転軸線Lのベースに対する傾斜角を設定する傾斜角設定機構とからなり、傾斜角設定機構が回転軸線をベースに対する垂直面と平行な面内で、ベースに対する垂線に対して対称となるように傾斜させ、制御ユニットが隣り合う磁石同士で逆方向の回転となるように回転制御する。 【選択図】図5 |
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