Method and apparatus for forming coating film in vacuum
专利汇可以提供Method and apparatus for forming coating film in vacuum专利检索，专利查询，专利分析的服务。并且PURPOSE: To prepare a laminate having multi-layered coating films, suitable for magnetic recording tape, thin-film solar cell, etc., without wrinkle, by applying different evaporation substances closely to one surface of the polymer substrate, and exposing the reverse surface of the substrate to glow discharge atmosphere.
CONSTITUTION: A double-layered coating film composed of different materials, e.g. a non-magnetizable material and a ferromagnetic material, is deposited continuously to one surface of a polymer substrate 11, e.g. a polymide film (3.5W11μ thick), travelling around one evaporation drum 10, by using the evaporation source 19 in the lower-right chamber 8 and composed of a water-cooled copper hearth 20 containing the non-magnetizable material 21 and an electron gun 22, and the evaporation source 23 in the lower-left chamber 9 and composed of a water-cooled copper hearth 24 containing the ferromagnetic material 25 and an electron gun 26. The wrinkling of the substrate is suppressed by exposing the undeposited side of the substrate 11 to glow discharge atmosphere generated by the glow discharge means 16 or 15 depending to the travelling direction of the substrate 11 (A direction or B direction), and the substrate is wound to the winding axis 13 or 12.
COPYRIGHT: (C)1982,JPO&Japio，下面是Method and apparatus for forming coating film in vacuum专利的具体信息内容。
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