专利汇可以提供Thin film solar battery专利检索,专利查询,专利分析的服务。并且PURPOSE: To enhance the conversion efficiency, by forming a silicon thin film constituting a solar battery with the mixed phase of polycrystalline and amorphous phases.
CONSTITUTION: A lower electrode 2 is set on a substrate 1 with the columnar or acicular polycrystalline silicon film 3 formed thereon. Next, the film 3 is termination treated to be changed into an amorphous silicon 4 terminated in the neighborhood of the field of crystal grains in the film 3. Subsequently, a transparent electrode 5 is formed. When the film 3 is formed of the mixed phase of polycrystalline and amorphous phases containing 50% or more at the volume ratio of the columnar or acicular grain with the diameter of the bottom surface thereof which does not exceed 1μm and the lower bound of the height thereof which is 50nm, the high conversion efficiency is obtained.
COPYRIGHT: (C)1982,JPO&Japio,下面是Thin film solar battery专利的具体信息内容。
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