Dry-etching device for pyroelectric material
专利汇可以提供Dry-etching device for pyroelectric material专利检索，专利查询，专利分析的服务。并且PURPOSE: To reduce the instantaneous temperature changes of a pyroelectric material and convey the pyroelectric material easily by providing several protrusions on a tray on which a pyroelectric material substrate of a sample to be etched is put or on a substrate electrode so that the pyroelectric material substrate may come into point-contact with them.
CONSTITUTION: A tray 16 provided with protrusions 15 is put one a substrate electrode 2, and a pyroelectric material substrate 8 being a sample to be etched is put on the tray 16 through the medium of the protrusions 15. Though the pyroelectric material 12 is polarized electrically through the pyroelectric effect produced with the heat by a physical-chemical reaction of a reaction gas plasma, the protrusions 15 on the tray 16 or electrode 2 prevent the electrostatic attraction. This reduces the instantaneous temperature changes of the material 12, and makes it possible to convey the material 12 easily.
COPYRIGHT: (C)1989,JPO&Japio，下面是Dry-etching device for pyroelectric material专利的具体信息内容。
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6 热电元件
