Magnetically confined ion getter pump having combined coupling flange and pole piece structure
阅读：440发布：2020-11-19
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1. A GETTER ION MAGNETICALLY CONFINED GLOW DISCHARGE PUMP APPARATUS INCLUDING; MEANS FORMING A HOLLOW VACUUM ENVELOPE; MEANS FORMING AN ANODE STRUCTURE DISPOSED WITHIN SAID ENVELOPE; MEANS FORMING A CATHODE STRUCTURE DISPOSED WITHIN SAID ENVELOPE AND INCLUDING PORTIONS TO BE BOMBARDED BY POSITIVE IONS TO CAUSE SPUTTERING OF CATHODE MATERIAL FOR GETTERING GAS WITHIN SAID ENVELOPE AND BEING SPACED FROM SAID ANODE STRUCTURE ON OPPOSITE SIDES OF SAID ANODE STRUCTURE WITH SAID ANODE STRUCTURE DISPOSED THEREBETWEEN; MEANS FORMING A MAGNETIC STRUCTURE DISPOSED ON OPPOSITE SIDES OF SAID ANODE STRUCTURE FOR APPLYING A MAGNETIC FIELD WHICH THREADS THROUGH SAID ENVELOPE, SAID ANODE, AND SAID SPACED CATHODE PORTIONS; MEANS FOR PARTITIONING SAID ANODE STRUCTURE INTO A PLURALITY OF GLOW DISCHARGE PASSAGEWAYS DISTRIBUTED TRANSVERSELY TO THE DIRECTION OF THE MAGNETIC FIELD THREADING THROUGH SAID ANODE AND SERVING TO ENHANCE THE GLOW DISCHARGES THROUGH SAID PASSAGEWAYS; MEANS FORMING A COUPLING FLANGE AT ONE END OF SAID ENVELOPE FOR COUPLING THE PUMP TO APPARATUS TO BE EVACUATED, AND WHEREIN SAID COUPLING FLANGE IS OF MAGNETIC MATERIAL FORMING A PORTION OF SAID MAGNETIC STRUCTURE OF THE PUMP APPARATUS, WHEREBY THE OVERALL SIZE OF THE PUMP IS REDUCED COMPARED TO SIMILAR PUMPS HAVING SEPARATE FLANGE AND MAGNETIC STRUCTURE PORTIONS.
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