Semiconductor memory and manufacture thereof
专利汇可以提供Semiconductor memory and manufacture thereof专利检索，专利查询，专利分析的服务。并且PURPOSE:To increase the density and the capacity of a semiconductor memory by separating between groove-shaped capacities by semiconductor substrate containing high density impurity, storing information charge at capacity electrode side to suppress a leakage current and to reduce a software error rate due to alpha-particles. CONSTITUTION:A thin P-type silicon film layer 102 containing 10 -10 atoms/cm is formed by an epitaxially growing technique on a P-type silicon substrate 101 containing 10 atoms/cm or more of impurity density. After thus formed, the thin P-type silicon film layer is selectively thermally oxidized to form an insulating element separating region 103. Higher density impurity is abnormally diffused in the film layer under the region 103 than the substrate 101 by this thermal oxidation to contain high density impurity in a thin P-type silicon film layer 104 under the insulating element separating regin. After thus formed, grooves extending in the substrate 101 are formed in a desired region except the region 103, dielectric films 105 are deposited on the side walls of the grooves, and a capacity electrode 106 is formed of a polysilicon or a high melting point metal containing effective impurity in the attitude for burying the grooves.，下面是Semiconductor memory and manufacture thereof专利的具体信息内容。
| 标题 | 发布/更新时间 | 阅读量 |
|---|---|---|
| 一种地热自动调节控温装置 | 2020-05-19 | 365 |
| 用于评价地热富水地质异常体的方法及装置 | 2020-05-26 | 117 |
| 一种基于重磁界面反演的大地热流估计方法 | 2020-05-11 | 188 |
| 一种用干冰钻井液辅助破岩的钻井方法 | 2020-05-25 | 150 |
| 基于正逆循环深浅层地热建筑冷热电耦合系统及实现方法 | 2020-05-16 | 671 |
| 一种能源管理控制系统 | 2020-06-10 | 297 |
| 一种构造圈闭型弱开放式层状岩溶热储地热田找矿方法 | 2020-05-14 | 138 |
| 超高温钻孔轨迹测斜测温控制系统及方法、测斜测温仪 | 2020-05-17 | 565 |
| 一种用于地热资源勘探的多功能组合测井仪 | 2020-05-12 | 589 |
| 换热井 | 2020-05-11 | 675 |
高效检索全球专利专利汇是专利免费检索,专利查询,专利分析-国家发明专利查询检索分析平台，是提供专利分析，专利查询，专利检索等数据服务功能的知识产权数据服务商。
我们的产品包含105个国家的1.26亿组数据，免费查、免费专利分析。
专利汇分析报告产品可以对行业情报数据进行梳理分析，涉及维度包括行业专利基本状况分析、地域分析、技术分析、发明人分析、申请人分析、专利权人分析、失效分析、核心专利分析、法律分析、研发重点分析、企业专利处境分析、技术处境分析、专利寿命分析、企业定位分析、引证分析等超过60个分析角度，系统通过AI智能系统对图表进行解读，只需1分钟，一键生成行业专利分析报告。
