Multi-beam electron beam scanner utilizing a modulation plate for modulating each of the beams independently
专利汇可以提供Multi-beam electron beam scanner utilizing a modulation plate for modulating each of the beams independently专利检索，专利查询，专利分析的服务。并且A plurality of flat coded dynode members are sandwiched between an electron emitting cathode in the form of flat plate and a flat target plate. Each dynode member has a plurality of apertures formed therein which are aligned with corresponding apertures on all of the other dynodes, each such set of aligned apertures forming an electron beam channel. The dynodes also each have a pair of separate conductive finger patterns, the finest of such finger patterns defining an elemental scanning area of the target plate. The finger patterns and number of dynodes utilized are chosen so as to provide a predetermined number of simultaneous scanning beams. A modulation grid having apertures therein corresponding to the apertures on the dynode and having separate portions covering the areas encompassed by each of the scanning beams is placed between the cathode and target to control the energization of the beams.，下面是Multi-beam electron beam scanner utilizing a modulation plate for modulating each of the beams independently专利的具体信息内容。
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