Carbon slider boat apparatus for liquid phase epitaxial growth
专利汇可以提供Carbon slider boat apparatus for liquid phase epitaxial growth专利检索，专利查询，专利分析的服务。并且PURPOSE:To maintain P pressure for a longer duration of time, to prevent exfoliation of P from a substrate and to obtain good reproducibility, by covering the adjoining portion of the substrate for growth of the III-V groups of semiconductors with a cover of superior interceptivity against gases until just prior to growth. CONSTITUTION:In a boat 1 a cover 6 made of quartz glass is mounted so that the hole 13 supports a table 12. In a hole 14 of the table 12 an InP substrate 17 is put. In a hole 15 of the table 12 InP fine chips are put. Then a cover 7 made of quartz glass is mounted to a slider 2, and solutions 41, 42 for growth are contained in pits 31, 32. After cleaning the adjacent portions of the table 12 by H2, the slider 2 is moved to the left while the covers 6, 7 are stacked, pressed 10, sealed and heated. Much of P is exfoliated from InP in the hole 14 and because of the seal made by the covers 6, 7 the partial pressure reaches higher than the exfoliation pressure of the substrate 17, resulting in the prevention of thermal damage on the substrate. Thus the slide is moved to the left so that the substrate 17 may contact the solutions 41, 42 successively. This causes no thermal damages on the main surface of the substrate 17, and because of fewer residues of In a uniform epitaxial growth layer can be formed.，下面是Carbon slider boat apparatus for liquid phase epitaxial growth专利的具体信息内容。
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