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Glass plate having precise pattern on its surface and method for manufacturing the same

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专利汇可以提供Glass plate having precise pattern on its surface and method for manufacturing the same专利检索,专利查询,专利分析的服务。并且PURPOSE: To manufacture a glass plate having a firmly bonded metallic film with a checkered pattern on its surface, by depositing a metallic film to one surface of a large-sized glass plate by vacuum evaporation, applying a desired checkered pattern to the metallic film using a photoetching technique, and etching the metallic film.
CONSTITUTION: A metallic film of Cr, Ti, stainless steel, etc. having a thickness of about 500W1,000Å is applied to the surface of a polished glass plate having flat and clean surface by vacuum evaporation using resistance heating or sputtering, etc. The vacuum evaporated film is coated with a photoresist, if necessary prebaked, and exposed to a desired checkered pattern by contact exposure, projection exposure, etc. The photoresist is developed with a developing liquid of the photoresist, subjected to the post-baking, and etched with an etchant of the metal of the evaporation film. Finally, the photoresist is released with a releasing liquid of the photoresist.
COPYRIGHT: (C)1983,JPO&Japio,下面是Glass plate having precise pattern on its surface and method for manufacturing the same专利的具体信息内容。

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