Exposing device for film carrier
专利汇可以提供Exposing device for film carrier专利检索，专利查询，专利分析的服务。并且PURPOSE:To eliminate warpage and distortion of an image and to improve positioning accuracy and enable to expose the whole effective exposed area by subjecting a film carrier to stick to a setting stand with vacuum sucking. CONSTITUTION:In an exposing device for reducing a glass mask 1 to 1/2 size by a projecting lens 2 and to reflect onto a film carrier 3 putting upon a setting stand 4, a warpage is generated in a carrier film consisting of a copper foil and polyimide or polyester, as temp. is applied at a laminated photoresist coating process which is a precedent process of exposing process. Then, a vacuum hole 5 is provided in the stand 4 and the carrier 3 is sucked by vacuum only when it is exposed and the warpage is eliminated by sticking the carrier 3 onto the stand 4. Thereby, fine adjustment both of magnification and focus for every one foil according to the degree of warpage is unnecessary and improvement of positioning accuracy is attained.，下面是Exposing device for film carrier专利的具体信息内容。
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